Highly homogeneous glass-ceramic component

Patent metadata

Field	Value
Publication number	US-11465933-B2
Application number	US-201615243078-A
Country	US
Kind code	B2
Filing date	Aug 22, 2016
Priority date	Feb 21, 2014
Publication date	Oct 11, 2022
Grant date	Oct 11, 2022

Abstract

A glass-ceramic component is provided that has a low average coefficient of thermal expansion (CTE) and a high CTE homogeneity. The use of such a component and a process for producing such a component are also provided.

First claim

What is claimed is:

1. A low thermal expansion glass-ceramic component that has an application temperature that lies within a range of −60° to 100° C., and comprises at the application temperature, a coefficient of thermal expansion (CTE) in an interval of 0±15 ppb/° K, and a total spatial variation of CTE over the entire glass-ceramic component of at most 3 ppb/K, wherein the component has a mass of at least 500 kg.

2. The glass-ceramic component according to claim 1 , wherein the interval is 0±10 ppb/K.

3. The glass-ceramic component according to claim 1 , wherein the application temperature is selected from the group consisting of 22° C., 30° C., 40° C., 60° C., 80° C., and 100° C.

4. The glass-ceramic component according to claim 1 , further comprising a temperature interval that satisfies a CTE tolerance of 0±10 ppb/K and has at least an extent of 10 K.

5. The glass-ceramic component according to claim 1 , wherein the component has a rectangular shape with at least one surface having a surface area of at least 1 m 2 .

6. The glass-ceramic component according to claim 1 , wherein the component comprises an LAS glass-ceramic with the following composition (in % by weight based on oxide):

SiO 2
50-70,

Al 2 O 3
17-32,

P 2 O 5
 3-12,

Li 2 O
2-5,

Na 2 O
0-2,

K 2 O
0-2,

MgO
0-2,

CaO
0-4,

BaO
0-5,

SrO
0-2,

ZnO
0-4,

TiO 2
1-5, and

ZrO 2
0-5.

7. The glass-ceramic component according to claim 1 , wherein the component comprises a glass-ceramic with an OH content of at least 0.06 mol/l.

8. The glass-ceramic component according to claim 1 , wherein the component is a component for use in a field selected from the group consisting of astronomy, metrology, LCD lithography, microlithography, and precision measurement technology.

9. The glass-ceramic component according to claim 1 , wherein the total spatial variation of CTE over the entire glass-ceramic component is at most 5 ppb/K in a temperature range from 0° C. to less than 15° C.

10. The glass-ceramic component according to claim 9 , wherein the temperature range further comprises from greater than 30° C. to 50° C.

11. The glass-ceramic component according to claim 10 , wherein the temperature range further comprises from 15° C. to 30° C.

12. The glass-ceramic component according to claim 1 , wherein the total spatial variation of CTE over the entire glass-ceramic component is at most 5 ppb/K in a temperature range from 0° C. to 50° C.

13. The glass-ceramic component according to claim 1 , wherein the low thermal expansion glass-ceramic component is produced in a batch and at least 1% by weight to at most 10% by weight water is added to the batch.

14. An astronomical mirror comprising a low thermal expansion glass-ceramic component, that has an application temperature that lies within a range of −60° to 100° C., and comprises, at the application temperature, a coefficient of thermal expansion (CTE) in an interval of 0±15 ppb/K, and a total spatial variation of CTE over the entire glass-ceramic component of at most 3 ppb/K, wherein the glass-ceramic component has a diameter of at least 3 m.

15. An extreme ultraviolet lithography device comprising a low thermal expansion glass-ceramic component, that has an application temperature that lies within a range of −60° to 100° C., and, at the application temperature has a coefficient of thermal expansion (CTE) in an interval of 0±15 ppb/K, and a total spatial variation of CTE over the entire glass-ceramic component of at most 3 ppb/K, wherein the component has an edge length, in the case of a rectangular shape, or a diameter, in the case of a round shape, of at least 0.5 m.

16. The device according to claim 15 , wherein the extreme ultraviolet lithography device is a mask or a mirror.

17. A low thermal expansion glass-ceramic component that has an application temperature that lies within a range of −60° to 100° C., and comprises, at the application temperature, a coefficient of thermal expansion (CTE) in an interval of 0±15 ppb/K, and a total spatial variation of CTE over the entire glass-ceramic component of at most 3 ppb/K, wherein the glass-ceramic component has an edge length, in the case of a rectangular shape, or a diameter, in the case of a round shape, of at least 0.5 m.

18. The glass-ceramic component according to claim 17 , wherein the component comprises an LAS glass-ceramic with the following composition (in % by weight based on oxide):

SiO 2
50-70,

Al 2 O 3
17-32,

P 2 O 5
 3-12,

Li 2 O
2-5,

Na 2 O
0-2,

K 2 O
0-2,

MgO
0-2,

CaO
0-4,

BaO
0-5,

SrO
0-2,

ZnO
0-4,

TiO 2
1-5, and

ZrO 2
0-5.

Assignees

• Schott Ag

Inventors

• Jedamzik Ralf
• Grün Steffen
• Lifka Thomas
• Faderl Johann

Classifications

• C03C2204/00

  Glasses, glazes or enamels with special properties · CPC title

• C03B32/02

  Thermal crystallisation, e.g. for crystallising glass bodies into glass-ceramic articles {(C03B27/012 takes precedence)} · CPC title

• G02B7/181

  with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation · CPC title

• G03F1/22

  Masks or mask blanks for imaging by radiation of 100nm or shorter wavelength, e.g. X-ray masks, extreme ultraviolet [EUV] masks; Preparation thereof · CPC title

• C03C10/0027 Primary

  containing SiO2, Al2O3, Li2O as main constituents · CPC title