Ligand-modified filter and methods for reducing metals from liquid compositions

Patent metadata

Field	Value
Publication number	US-11465104-B2
Application number	US-202016779181-A
Country	US
Kind code	B2
Filing date	Jan 31, 2020
Priority date	Feb 8, 2019
Publication date	Oct 11, 2022
Grant date	Oct 11, 2022

Abstract

Described are filter materials including a polyol ligand, such as n-methylglucamine, and/or a polyphosphonic acid ligand, which are highly effective for filtering metals or metal ions from fluids. The filter materials can be particularly useful to filter basic and acidic fluid compositions, such as those used for wet etching, removing photoresist, and cleaning steps in microelectronic device manufacturing.

First claim

What is claimed is:

1. An ultra high molecular weight polyethylene (UPE) porous polymeric filter membrane comprising a polyol ligand having three or more hydroxyl groups and further comprising a polyphosphonic acid ligand selected from an amino polyphosphonic acid ligand or an amino diphosphonic acid ligand, wherein the porous polymeric filter membrane is configured to be used in conjunction with a microelectronic fabrication system for providing a metal- or metal ion-depleted liquid composition.

2. The porous polymeric filter membrane of claim 1 , wherein the polyol ligand has 4 or 5 hydroxyl groups.

3. The porous polymeric filter membrane of claim 1 , wherein the polyol ligand is an amino polyol ligand.

4. The porous polymeric filter membrane of claim 3 , wherein the amino polyol ligand is selected from the group consisting of 1-aminopentane-1,2,3,4,5-pentol, 1-(methylamino)hexane-1,2,3,4,6-pentol, 5-(methylamino)hexane-1,2,3,4,6-pentol, 6-aminohexane-1,2,3,4,5-pentol, 5-(methylamino)hexane-1,2,3,4,6-pentol, 6-(methylamino)hexane-1,2,3,4,5-pentol (n-methylglucamine), 1-deoxy-1-(methylamino)-D-glucitol), and 6-(butylamino)hexane-1,2,3,4,5-pentol.

5. A method of removing one or more metal(s) or metal ion(s) from a liquid composition, the method comprising:
contacting an ultra high molecular weight polyethylene (UPE) porous polymeric filter membrane with a liquid composition comprising one or more metal or metal ions, wherein the porous polymeric filter membrane comprises a polyol ligand having three or more hydroxyl groups and further comprises a polyphosphonic acid ligand selected from an amino polyphosphonic acid ligand or an amino diphosphonic acid ligand, and
reducing an amount of the one or more metal or metal ions in the liquid composition.

6. The method of claim 5 , wherein the polyol ligand has 4 or 5 hydroxyl groups.

7. The method of claim 5 , wherein the polyol ligand is an amino polyol ligand.

8. The method of claim 7 , wherein the amino polyol ligand is selected from the group consisting of 1-aminopentane-1,2,3,4,5-pentol, 1-(methylamino)hexane-1,2,3,4,6-pentol, 5-(methylamino)hexane-1,2,3,4,6-pentol, 6-aminohexane-1,2,3,4,5-pentol, 5-(methylamino)hexane-1,2,3,4,6-pentol, 6-(methylamino)hexane-1,2,3,4,5-pentol (n-methylglucamine), 1-deoxy-1-(methylamino)-D-glucitol), and 6-(butylamino)hexane-1,2,3,4,5-pentol.

9. The method of claim 5 , wherein the liquid composition is an aqueous basic composition having a pH in a range of about 10 to about 14.

10. The method of claim 5 , wherein the liquid composition comprises TMAH, TBAH, ammonium hydroxide, or concentrated HCl having an HCl concentration of greater than 10%.

11. A composite membrane comprising:
a first filter material and a second filter material, wherein the first filter material, the second filter material, or both are an ultra high molecular weight polyethylene (UPE) porous polymeric filter membrane, an output facing surface of the first filter material in contact with an input facing surface of the second filter material,
wherein the first filter material or the second filter material comprises a polyol ligand having three or more hydroxyl groups and further comprising a polyphosphonic acid ligand selected from an amino polyphosphonic acid ligand or an amino diphosphonic acid ligand and the second filter material is different from the first filter material, and
wherein the composite membrane is configured to be used in conjunction with a microelectronic fabrication system for providing a metal- or metal ion-depleted liquid composition.

Assignees

• Entegris Inc

Inventors

• Hamzik James
• Jaber Jad A
• Brewster Justin
• Filipancic Nicholas J

Classifications

• H10P50/642

  Chemical etching · CPC title

• C02F1/44

  by dialysis, osmosis or reverse osmosis {(general membrane separation processes B01D61/00, membrane modules B01D63/00, electrodialysis C02F1/4693, combination of membrane modules and bioreactors C02F3/1268)} · CPC title

• B01D69/125 Primary

  In situ manufacturing by polymerisation, polycondensation, cross-linking or chemical reaction · CPC title

• B01D71/82 Primary

  characterised by the presence of specified groups, e.g. introduced by chemical after-treatment · CPC title

• B01J20/28016

  Particle form · CPC title