Piezoelectric actuator and method for producing piezoelectric actuator

Patent metadata

Field	Value
Publication number	US-11458729-B2
Application number	US-201916658346-A
Country	US
Kind code	B2
Filing date	Oct 21, 2019
Priority date	Nov 30, 2018
Publication date	Oct 4, 2022
Grant date	Oct 4, 2022

Abstract

A piezoelectric actuator includes: a vibration plate: a first piezoelectric body arranged on one side in a thickness direction of the vibration plate; a second piezoelectric body arranged on a side, of the first piezoelectric body, opposite to the vibration plate in the thickness direction; a first electrode arranged between the vibration plate and the first piezoelectric body; a second electrode arranged between the first and second piezoelectric bodies in the thickness direction, and overlapping with the first electrode in the thickness direction; and a third electrode arranged on a side, of the second piezoelectric body, opposite to the first piezoelectric body in the thickness direction, and overlapping with the second electrode in the thickness direction. The second piezoelectric body covers at least a part of a first end surface, of the first piezoelectric body, which is an end surface in a first direction orthogonal to the thickness direction.

First claim

What is claimed is:

1. A piezoelectric actuator comprising:
a vibration plate;
a first piezoelectric body arranged on one side in a thickness direction of the vibration plate;
a second piezoelectric body arranged on a side, of the first piezoelectric body, which is opposite to the vibration plate in the thickness direction;
a first electrode arranged between the vibration plate and the first piezoelectric body in the thickness direction;
a second electrode arranged between the first piezoelectric body and the second piezoelectric body in the thickness direction, and overlapping with the first electrode in the thickness direction; and
a third electrode arranged on a side, of the second piezoelectric body, which is opposite to the first piezoelectric body in the thickness direction, and overlapping with the second electrode in the thickness direction,
wherein the second piezoelectric body covers at least a part of a first end surface of the first piezoelectric body, the first end surface being an end surface in a first direction orthogonal to the thickness direction, and
the first end surface is inclined with respect to the first direction at an inclination angle smaller than that of a second end surface of the second piezoelectric body, the second end surface being an end surface in the first direction.

2. The piezoelectric actuator according to claim 1 ,
wherein the first piezoelectric body is included in a plurality of first piezoelectric bodies arranged side by side in the first direction; and
the second piezoelectric body is included in a plurality of second piezoelectric bodies arranged side by side in the first direction.

3. The piezoelectric actuator according to claim 1 ,
wherein the first end surface is provided as first end surfaces on both sides, respectively, in the first direction of the first piezoelectric body, and
the first end surface on one side in the first direction and the first end surface on the other side in the first direction of the first piezoelectric body are inclined, with respect to the first direction, to opposite sides to each other, and at a same inclination angle with each other.

4. The piezoelectric actuator according to claim 3 ,
wherein the second end surface is provided as second end surfaces on both sides, respectively, in the first direction of the second piezoelectric body, and
the second end surface on one side in the first direction and the second end surface on the other side in the first direction of the second piezoelectric body are inclined, with respect to the first direction, to opposite sides to each other, and at a same inclination angle with each other.

5. The piezoelectric actuator according to claim 1 ,
wherein a length in the first direction of the second piezoelectric body is not less than a length in the first direction of the first piezoelectric body, and
the second piezoelectric body covers entirety of the first end surface.

6. The piezoelectric actuator according to claim 1 ,
wherein a length in the first direction of the second piezoelectric body is shorter than a length in the first direction of the first piezoelectric body, and
the second piezoelectric body covers only a part of the first end surface.

7. The piezoelectric actuator according to claim 1 ,
wherein the first piezoelectric body has a third end surface in a second direction which is orthogonal to both of the thickness direction and the first direction,
the second piezoelectric body has a fourth end surface in the second direction, and
the third end surface is inclined with respect to the second direction at an inclination angle which is smaller than that of the fourth end surface.

8. The piezoelectric actuator according to claim 7 , wherein the inclination angle, with respect to the second direction, of the third end surface is smaller than the inclination angle, with respect to the first direction, of the first end surface.

9. The piezoelectric actuator according to claim 1 ,
wherein the inclination angle, with respect to the first direction, of the second end surface is in a range of not less than 25° to not more than 35°, and
the inclination angle, with respect to the first direction, of the first end surface is in a range of not less than 15° to not more than 20°.

10. The piezoelectric actuator according to claim 1 ,
wherein the first piezoelectric body and the second piezoelectric body are formed by a sol-gel method,
the first piezoelectric body is constructed of a plurality of thin films of a piezoelectric material which are formed by calcination in the sol-gel method,
in the first piezoelectric body, lamination boundaries between the plurality of thin films are arranged side by side in the thickness direction,
the second piezoelectric body is constructed of a plurality of thin films of a piezoelectric material which are formed by calcination in the sol-gel method,
the second piezoelectric body has lamination boundaries between the plurality of thin films,
the lamination boundaries are arranged side by side in the thickness direction at an area covering a surface, of the first piezoelectric body, which is on the side opposite to the vibration plate, and
the lamination boundaries are inclined with respect to the thickness direction at an area covering the first end surface of the first piezoelectric body, such that each of the lamination boundaries is separated farther away from the vibration plate in the thickness direction as approaching toward an inner side of the first piezoelectric body in the first direction.

11. The piezoelectric actuator according to claim 1 , wherein the third electrode has a length in the thickness direction which is longer than those of the first and second electrodes.

Assignees

• Brother Ind Ltd

Inventors

• Wang Rui

Classifications

• B41J2002/14258

  Multi layer thin film type piezoelectric element · CPC title

• B41J2202/20

  Modules · CPC title

• B41J2/1645

  thin film formation by spincoating · CPC title

• B41J2202/11

  characterised by specific geometrical characteristics · CPC title

• B41J2/1626

  etching · CPC title