Vertical cavity surface emitting laser mode control

Patent metadata

Field	Value
Publication number	US-11451009-B2
Application number	US-201916725400-A
Country	US
Kind code	B2
Filing date	Dec 23, 2019
Priority date	Apr 18, 2019
Publication date	Sep 20, 2022
Grant date	Sep 20, 2022

Abstract

A vertical cavity surface emitting laser (VCSEL) may include a top contact, wherein the top contact is associated with a particular shape, and wherein the particular shape is a toothed shape with a particular quantity of teeth. The VCSEL may include at least one implanted region. The VCSEL may include at least one top contact segment.

First claim

What is claimed is:

1. A vertical cavity surface emitting laser (VCSEL), comprising:
a top contact,
wherein the top contact is associated with a particular shape, and
wherein the particular shape is a toothed shape with a plurality of differently shaped teeth.

2. The VCSEL of claim 1 , further comprising:
at least one implanted region disposed under at least a portion of the top contact.

3. The VCSEL of claim 1 , wherein at least a portion of the top contact is segmented to form a set of top contact segments.

4. The VCSEL of claim 1 , wherein the particular shape of the top contact is configured to cause a particular emission mode configuration for emissions of the VCSEL.

5. The VCSEL of claim 1 , wherein the top contact is a p-ohmic top contact or an n-ohmic top contact.

6. The VCSEL of claim 1 , wherein the toothed shape is at least one of a square toothed shape, a rectangular toothed shape, or a triangular toothed shape.

7. The VCSEL of claim 1 , wherein the top contact is larger than an oxidation aperture of the VCSEL.

8. The VCSEL of claim 1 , wherein the top contact includes a particular symmetry associated with a particular quantity of the plurality of differently shaped teeth, and
wherein the particular symmetry and the particular quantity is, respectively, one of:
3-fold radial symmetry with 3 teeth,
4-fold radial symmetry with 4 teeth,
5-fold radial symmetry with 5 teeth, or
6-fold radial symmetry with 6 teeth.

9. A vertical cavity surface emitting laser (VCSEL) comprising:
a top contact; and
a plurality of implanted regions disposed under a portion of the top contact,
wherein the plurality of implanted regions extend through a top surface of the VCSEL and partially surround the VCSEL,
wherein the plurality of implanted regions control an emission mode of the VCSEL.

wherein the plurality of implanted regions form a circular shape defining gaps between respective implant regions of the plurality of implanted regions, and
wherein the plurality of implanted regions are associated with an implanted region configuration.

10. The VCSEL of claim 9 , wherein the top contact is segmented to form a plurality of top contact segments.

11. The VCSEL of claim 9 , wherein the implanted region configuration is configured to cause a particular emission mode configuration for emissions of the VCSEL.

12. The VCSEL of claim 9 , wherein the plurality of implanted regions restrict a flow of current to or from the top contact.

13. The VCSEL of claim 9 , wherein a first conductance of the plurality of implanted regions is less than a second conductance of a mirror region of the VCSEL.

14. The VCSEL of claim 13 , wherein the first conductance is less than 1/100 of the second conductance.

15. The VCSEL of claim 9 , wherein the plurality of implanted regions includes:
3 implantations,
4 implantations,
5 implantations, or
6 implantations.

16. The VCSEL of claim 9 , wherein the emission mode is associated with N-fold symmetry.

17. The VCSEL of claim 9 , wherein the top contact is associated with a toothed shape.

18. A vertical cavity surface emitting laser (VCSEL), comprising:
a plurality of top contact segments,
wherein the plurality of top contact segments is associated with a top contact segment configuration,
wherein the top contact segment configuration is a particular quantity or pattern of top contact segments, and
wherein the plurality of top contact segments include tooth-shaped segments with differently shaped teeth.

19. The VCSEL of claim 9 , wherein the plurality of implanted regions comprise differently sized implanted regions.

20. The VCSEL of claim 18 , wherein the top contact segment configuration is configured to cause a particular emission mode configuration for emissions of the VCSEL.

21. The VCSEL of claim 18 , further comprising at least one implantation region disposed at least partially under a surface of at least one top contact segment, of the plurality of top contact segments, to restrict a current flow in the at least one top contact segment.

22. A vertical cavity surface emitting laser (VCSEL), comprising:
one or more components configured to:
emit a patterned optical emission,
wherein the patterned optical emission results from at least one of:
a top contact region having a toothed shape that comprises a plurality of differently shaped teeth, or
a plurality of implanted regions, disposed under a portion of a top contact of the VCSEL, forming a circular shape defining gaps between respective implant regions of the plurality of implanted regions,
 wherein the plurality of implanted regions extend through a top surface of the VCSEL and partially surround the VCSEL, and
 wherein the plurality of implanted regions control an emission mode of the VCSEL.

23. The VCSEL of claim 22 , wherein the plurality of implanted regions comprise differently sized implanted region.

24. An optical system, comprising:
a vertical cavity surface emitting laser (VCSEL) configured to emit a patterned optical emission,
wherein the patterned optical emission results from at least one of:
a top contact region having a toothed shape that comprises a plurality of differently shaped teeth, or
a plurality of implanted regions, disposed under a portion of a top contact of the VCSEL, forming a circular shape defining gaps between respective implant regions of the plurality of implanted regions,
wherein the plurality of implanted regions extend through a top surface of the VCSEL and partially surround the VCSEL, and
wherein the plurality of implanted regions control an emission mode of the VCSEL.

25. The optical system of claim 24 , wherein the plurality of implanted regions comprise differently sized implanted regions.

Assignees

• Lumentum Operations Llc

Inventors

• Qiao Pengfei
• Lu Chien-Yao
• Yuen Albert

Classifications

• H01S5/2063

  obtained by particle bombardment · CPC title

• H01S5/0653

  Mode suppression, e.g. specific multimode · CPC title

• H01S5/18308

  having a special structure for lateral current or light confinement · CPC title

• H01S5/1833

  with more than one structure · CPC title

• H01S5/18394 Primary

  Apertures, e.g. defined by the shape of the upper electrode · CPC title