Lignin based laser lithography process for fabricating 3D graphene electrode and method

Patent metadata

Field	Value
Publication number	US-11448959-B2
Application number	US-201917259326-A
Country	US
Kind code	B2
Filing date	Jul 1, 2019
Priority date	Jul 23, 2018
Publication date	Sep 20, 2022
Grant date	Sep 20, 2022

Abstract

There is a method for forming a three dimensional or porous graphene electrode pattern on a substrate, the method including providing a substrate; coating the substrate with a lignin-polymer composite film; exposing a first part of the coated lignin-polymer composite film to a laser beam for transforming the first part into the graphene pattern; and removing a second part of the coated lignin-polymer composite film, which was not exposed to the laser beam, by placing the second part in water. The lignin-polymer composite film includes (1) a water-soluble alkaline lignin, (2) a polymer having bonding properties, and (3) a solvent, and an amount of the water-soluble alkaline lignin in the lignin-polymer composite film is between 5 and 60% by weight.

First claim

What is claimed is:

1. A method for forming a three dimensional or porous graphene electrode pattern on a substrate, the method comprising:
providing a substrate;
coating the substrate with a lignin-polymer composite film;
exposing a first part of the coated lignin-polymer composite film to a laser beam for transforming the first part into the graphene pattern; and
removing a second part of the coated lignin-polymer composite film, which was not exposed to the laser beam, by placing the second part in water,
wherein the lignin-polymer composite film includes (1) a water-soluble alkaline lignin, (2) a polymer having bonding properties, and (3) a solvent, and an amount of the water-soluble alkaline lignin in the lignin-polymer composite film is between 5 and 60% by weight.

2. The method of claim 1 , further comprising:
laser scribing the first part of the coated lignin-polymer composite film to form in-plane interdigitated electrodes on the substrate, wherein the graphene pattern is electrically conductive.

3. The method of claim 2 , further comprising:
placing the in-plane interdigitated electrodes in supercapacitors, biosensors, or another electronic device.

4. The method of claim 1 , further comprising:
after the step of exposing, and before the step of removing, coating the first and second parts of the lignin-polymer composite film with a metallic layer.

5. The method of claim 4 , wherein the metallic layer includes gold.

6. The method of claim 4 , wherein the step of removing removes only the second part of the lignin-polymer composite film and a part of the metallic layer that is on top of the second part, but not the first part and another part of the metallic layer that is on top of the first part.

7. The method of claim 4 , further comprising:
after removing the second part of the lignin-polymer composite film, forming a semiconductor device over the first part.

8. The method of claim 1 , wherein the solvent is water and the polymer having bonding properties is Poly(vinyl) alcohol (PVA).

9. The method of claim 1 , wherein the lignin-polymer composite film includes (1) 10% by weight of the water-soluble alkaline lignin, (2) 10% by weight of the polymer having bonding properties, and (3) 80% by weight of the solvent.

10. The method of claim 1 , wherein the water-soluble alkaline lignin includes sulphur.

11. A method for generating a graphene pattern on a substrate, the method comprising:
coating a substrate with a lignin-polymer composite film;
laser scribing a first part of the coated lignin-polymer composite film for transforming the first part into the graphene pattern; and
washing away with water a second part of the coated lignin-polymer composite film, which was not laser scribed,
wherein the lignin-polymer composite film includes (1) a water-soluble alkaline lignin, (2) a polymer having bonding properties, and (3) a solvent.

12. The method of claim 11 , wherein an amount of the water-soluble alkaline lignin in the lignin-polymer composite film is between 5 and 60% by weight.

Assignees

• Univ King Abdullah Sci & Tech

Inventors

• Zhang Wenli
• Lei Yongjiu
• Alshareef Husam Niman

Classifications

• G03F7/30

  Imagewise removal using liquid means · CPC title

• G03F7/0037 Primary

  Production of three-dimensional images · CPC title

• G03F7/038

  Macromolecular compounds which are rendered insoluble or differentially wettable (G03F7/075 takes precedence; macromolecular azides G03F7/012; macromolecular diazonium compounds G03F7/021) · CPC title

• G03F7/322

  Aqueous alkaline compositions · CPC title

• G03F7/2053

  using a laser (ablative removal B41C) · CPC title