Wet substrate processing device

Patent metadata

Field	Value
Publication number	US-11447883-B2
Application number	US-202016858701-A
Country	US
Kind code	B2
Filing date	Apr 26, 2020
Priority date	May 27, 2019
Publication date	Sep 20, 2022
Grant date	Sep 20, 2022

Abstract

Provided is a stirring paddle driving mechanism with a small load. According to one embodiment, a wet substrate processing device is provided, having: a treatment tank for holding a treatment solution; a stirring paddle disposed inside the treatment tank; and a driving mechanism for driving the stirring paddle, wherein the driving mechanism has: a rotary motor; a central rotating member connected to the rotary motor; an outer fixed ring spaced from the central rotating member and surrounding an outside of the central rotating member; a planetary member connected to the central rotating member so as to rotate inside the outer fixed ring; and a driving shaft connected to the planetary member and the stirring paddle and extending in a radial direction of the outer fixed ring, wherein the driving shaft is configured to reciprocate in a longitudinal direction by rotation of the rotary motor.

First claim

What is claimed is:

1. A wet substrate processing device, having:
a treatment tank for holding a treatment solution;
a stirring paddle disposed inside the treatment tank; and
a driving mechanism for driving the stirring paddle, wherein
the driving mechanism has:
a rotary motor;
a central rotating member connected to the rotary motor;
an outer fixed ring spaced from the central rotating member and surrounding an outside of the central rotating member;
a planetary member connected to the central rotating member so as to rotate inside the outer fixed ring;
a driving shaft connected to the planetary member and the stirring paddle and extending in a radial direction of the outer fixed ring; and
a supporting member connected to the planetary member and the driving shaft, wherein
the driving shaft is configured to reciprocate in a longitudinal direction via the supporting member by rotation of the rotary motor,
the outer fixed ring has a through hole extending from an outer surface of the outer fixed ring to an inner surface of the outer fixed ring, and
the through hole of the outer fixed ring is configured to be connectable to a nozzle.

2. The wet substrate processing device according to claim 1 , having:
a bearing for guiding the reciprocating motion of the driving shaft.

3. The wet substrate processing device according to claim 2 , wherein
the bearing comprises a non-contact bearing.

4. The wet substrate processing device according to claim 3 , wherein
the bearing comprises a fluid bearing.

5. The wet substrate processing device according to claim 2 , wherein
the bearing comprises a contact bearing.

6. The wet substrate processing device according to claim 5 , wherein
the bearing has a rotary roller.

7. The wet substrate processing device according to claim 1 , having:
a grease feeder for supplying grease between the outer fixed ring and the planetary member via the nozzle.

8. The wet substrate processing device according to claim 1 , wherein
the through hole extends in the radial direction,
the planetary member has a groove communicable with the through hole of the outer fixed ring.

9. The wet substrate processing device according to claim 7 , having:
a monitoring device for monitoring a state of the driving mechanism for driving the stirring paddle; and
a control device for controlling operation of the grease feeder, wherein
the control device is configured to drive the grease feeder according to a driving state of the stirring paddle.

10. The wet substrate processing device according to claim 9 , wherein
the monitoring device is configured to monitor at least one of (1) an operating time or a traveling distance of the driving mechanism for driving the stirring paddle, (2) a magnitude of vibration of the stirring paddle, and (3) a load factor of the rotary motor, and
the control device is configured to drive the grease feeder according to at least one of (1) the operating time or the traveling distance of the driving mechanism for driving the stirring paddle, (2) the magnitude of vibration of the stirring paddle, and (3) the load factor of the rotary motor.

Assignees

• Ebara Corp

Inventors

• Chang Shao Hua

Classifications

• C25D21/12

  Process control or regulation (controlling or regulating in general G05) · CPC title

• C25D21/10 Primary

  Agitating of electrolytes; Moving of racks · CPC title

• F16N11/00

  Arrangements for supplying grease from a stationary reservoir or the equivalent in or on the machine or member to be lubricated; Grease cups · CPC title

• C25D17/00

  Constructional parts, or assemblies thereof, of cells for electrolytic coating · CPC title

• F16C32/06

  with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings · CPC title