Holding device, method of determining attraction abnormality in holding device, lithography apparatus, and method of manufacturing article
US-2024393682-A1 · Nov 28, 2024 · US
US11446839B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11446839-B2 |
| Application number | US-202016892256-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 3, 2020 |
| Priority date | Mar 20, 2014 |
| Publication date | Sep 20, 2022 |
| Grant date | Sep 20, 2022 |
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The present invention relates to a porous support (20) intended to be removably positioned on a top side (11b) of a perforated plate (11) of a table (10) of a vacuum hold down device (1), the perforated plate having a bottom side (11a) connected to a vacuum system (13) for producing reduced pressure on the bottom side, wherein the porous support includes a perforated tray (21) provided on one side (21a) with outer reliefs (23) and on the other side (21b) with a blade penetrable porous structure (22) fixed thereon. The invention further relates to a vacuum hold down device (1) including such a support. The invention also relates to a process for replacing a first porous support by a second porous support in such a device.
Opening claim text (preview).
What is claimed is: 1. A process for manufacturing cut textiles comprising positioning a first porous support on a top side of a perforated plate of a vacuum hold down device, the first porous support including a first perforated tray provided on a first bottom side with first outer reliefs facing the top side of the perforated plate and on a first top side with a blade penetrable first porous structure, the first porous structure including a first surgical textile laid thereon, cutting at least the first surgical textile with a cutting device, removing the first porous support as a unit from the perforated plate of the vacuum hold device, positioning a second porous support on the top side of the perforated plate of the vacuum hold down device, the second porous support including a second perforated tray provided on a second bottom side with second outer reliefs facing the top side of the perforated plate and on a second top side with a second blade penetrable porous structure including a second surgical textile laid thereon, and cutting at least the second surgical textile with the cutting device. 2. The process of claim 1 , further comprising reducing pressure on a bottom side of the perforated plate via a vacuum system of the vacuum hold down device, prior to cutting at least the first surgical textile. 3. The process of claim 1 , further comprising reducing pressure on a bottom side of the perforated plate via a vacuum system of the vacuum hold down device, prior to cutting at least the second surgical textile. 4. The process of claim 1 , covering the first surgical textile with an air impervious film prior to cutting at least the first surgical textile, wherein the film cooperates with the vacuum system connected to the bottom side of the perforated plate to apply a compacting force to the first surgical textile. 5. The process of claim 1 , covering the second surgical textile with an air impervious film prior to cutting at least the second surgical textile, wherein the film cooperates with the vacuum system connected to the bottom side of the perforated plate to apply a compacting force to the second surgical textile. 6. The process of claim 1 , wherein the first and second surgical textiles are different types of surgical textiles. 7. The process of claim 6 , wherein the first and second surgical textiles are different colors. 8. The process of claim 6 , wherein the first and second surgical textiles have different densities. 9. The process of claim 1 , wherein the first outer reliefs are configured so as to create a space between the top side of the perforated plate and the first perforated tray for allowing passage of airflow from the vacuum system, when the first porous support is positioned on the top side of the perforated plate, with the first outer reliefs facing the top side. 10. The process of claim 1 , wherein the second outer reliefs are configured so as to create a space between the top side of the perforated plate and the second perforated tray for allowing passage of airflow from the vacuum system, when the second porous support is positioned on the top side of the perforated plate, with the second outer reliefs facing the top side. 11. The process of claim 1 , further comprising temporarily fixing the first porous support to the perforated plate by screwing first screws extending from a bottom side of the first perforated tray into threaded holes provided in the top side of the perforated plate. 12. The process of claim 11 , further comprising temporarily fixing the second porous support to the perforated plate by screwing second screws extending from a bottom side of the second perforated tray into the threaded holes provided in the top side of the perforated plate. 13. The process of claim 1 , wherein cutting the first surgical textile further comprises cutting the first film and the first porous structure. 14. The process of claim 1 , wherein cutting the second surgical textile further comprises cutting the second film and the second porous structure. 15. The process of claim 1 , wherein the first perforated tray includes a first pair of sidewalls extending upwardly from opposite ends of the top side of the first perforated tray and having a height which is greater than a thickness of the first blade penetrable porous structure. 16. The process of claim 1 , wherein the second perforated tray includes a second pair of sidewalls extending upwardly from opposite ends of the top side of the second perforated tray and having a height which is greater than a thickness of the second blade penetrable porous structure. 17. The process of claim 1 , wherein the cutting device is supported by a movable carriage. 18. The process of claim 1 , wherein a thickness of the first blade penetrable porous structure is greater than a vertical distance on which the cutting device is configured to penetrate to cut the first surgical textile and the cutting device does not contact the first perforated tray. 19. The process of claim 1 , wherein a thickness of the second blade penetrable porous structure is greater than a vertical distance on which the cutting device is configured to penetrate to cut the second surgical textile and the cutting device does not contact the second perforated tray.
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