Transmissive polarization control device, optical isolator, polarization variable light source, and method of manufacturing transmissive polarization control device

Patent metadata

Field	Value
Publication number	US-11442294-B2
Application number	US-202016909558-A
Country	US
Kind code	B2
Filing date	Jun 23, 2020
Priority date	Jun 25, 2019
Publication date	Sep 13, 2022
Grant date	Sep 13, 2022

Abstract

A transmissive polarization control device includes: a semiconductor layer having a first surface and a second surface opposite to the first surface, the semiconductor layer including: a first conductivity type region having a conductivity type, a second conductivity type region having a conductivity type, and a pn junction located between the first and second conductivity type regions; a loop electrode disposed on the first surface and configured such that an electric current flowing through the loop produces a magnetic field in a direction penetrating the pn junction; and a near-field light formation region in which an impurity of the first conductivity type introduced as a dopant into the first conductivity type region for formation of near-field light is distributed. A polarization direction of linearly polarized light traveling through a region surrounded by the loop electrode and the near-field light formation region is rotated according to the electric current.

First claim

What is claimed is:

1. A transmissive polarization control device comprising:
a semiconductor layer having a first surface and a second surface opposite to the first surface, the semiconductor layer comprising:
a first conductivity type region having a conductivity type that is one of p-type and n-type,
a second conductivity type region having a conductivity type that is the other of p-type and n-type, and
a pn junction located between the first conductivity type region and the second conductivity type region;

a loop electrode disposed on the first surface and configured such that an electric current flowing through the loop produces a magnetic field in a direction penetrating the pn junction; and
a near-field light formation region in which an impurity of the first conductivity type introduced as a dopant into the first conductivity type region for formation of near-field light is distributed,
wherein a polarization direction of linearly polarized light traveling through a region surrounded by the loop electrode and the near-field light formation region is rotated according to the electric current.

2. The transmissive polarization control device of claim 1 , wherein the pn junction is located closer to the first surface than to the second surface.

3. The transmissive polarization control device of claim 2 , further comprising:
an electrically-conductive member on the second surface, the electrically-conductive member defining an opening,
wherein a region surrounded by an edge of the opening overlaps at least part of a region on the second surface that is immediately below the region surrounded by the loop electrode.

4. The transmissive polarization control device of claim 2 , wherein:
the loop electrode comprises a ring portion defining a gap, and
a length of the gap is 25% or less of a length of the ring portion.

5. The transmissive polarization control device of claim 4 wherein, when viewed in a direction from the first surface toward the second surface, the region surrounded by the loop electrode overlaps the near-field light formation region.

6. An optical isolator comprising:
the transmissive polarization control device according to claim 4 ;
a driving circuit electrically connected to the loop electrode of the transmissive polarization control device, the driving circuit configured to change the electric current flowing through the loop electrode to modulate the magnetic field; and
a pair of polarizers comprising:
a first polarizer disposed on a light incident side of the transmissive polarization control device, and
a second polarizer disposed on a light emission side of the transmissive polarization control device,
wherein polarization directions of the first polarizer and the second polarizer are rotated at 45° with respect to each other.

7. A polarization variable light source comprising:
the optical isolator according to claim 6 ; and
a semiconductor laser device,
wherein a wavelength of light emitted from the semiconductor laser device is longer than a wavelength corresponding to an energy gap of a semiconductor material that forms the semiconductor layer.

8. The transmissive polarization control device of claim 1 , further comprising:
an electrically-conductive member on the second surface, the electrically-conductive member defining an opening,
wherein a region surrounded by an edge of the opening overlaps at least part of a region on the second surface that is immediately below the region surrounded by the loop electrode.

9. The transmissive polarization control device of claim 1 , wherein:
the loop electrode comprises a ring portion defining a gap, and
a length of the gap is 25% or less of a length of the ring portion.

10. The transmissive polarization control device of claim 9 , wherein an inner diameter of the ring portion is 50 μm or more and 3000 μm or less.

11. The transmissive polarization control device of claim 1 , wherein the loop electrode comprises a spiral conductor having one or more turns or a coil conductor having one or more turns.

12. The transmissive polarization control device of claim 1 wherein, when viewed in a direction from the first surface toward the second surface, the region surrounded by the loop electrode overlaps the near-field light formation region.

13. The transmissive polarization control device of claim 1 , wherein the semiconductor layer is made of an indirect bandgap semiconductor material.

14. The transmissive polarization control device of claim 13 , wherein the indirect bandgap semiconductor material is SiC.

15. The transmissive polarization control device of claim 1 , wherein the semiconductor layer is made of a direct bandgap semiconductor material.

16. The transmissive polarization control device of claim 15 , wherein the direct bandgap semiconductor material is ZnO.

17. The transmissive polarization control device of claim 1 , wherein the loop electrode is made of a non-magnetic metal.

18. An optical isolator comprising:
the transmissive polarization control device according to claim 1 ;
a driving circuit electrically connected to the loop electrode of the transmissive polarization control device, the driving circuit configured to change the electric current flowing through the loop electrode to modulate the magnetic field; and
a pair of polarizers comprising:
a first polarizer disposed on a light incident side of the transmissive polarization control device, and
a second polarizer disposed on a light emission side of the transmissive polarization control device,
wherein polarization directions of the first polarizer and the second polarizer are rotated at 45° with respect to each other.

19. A polarization variable light source comprising:
the transmissive polarization control device according to claim 1 ; and
a semiconductor laser device,
wherein a wavelength of light emitted from the semiconductor laser device is longer than a wavelength corresponding to an energy gap of a semiconductor material that forms the semiconductor layer.

20. A manufacturing method of a transmissive polarization control device, comprising:
providing a semiconductor layer having a first surface and a second surface opposite to the first surface, a first electrode disposed on the first surface of the semiconductor layer, and a second electrode disposed on the second surface of the semiconductor layer, the semiconductor layer comprising:
a first conductivity type region having a conductivity type that is one of p-type and n-type,
a second conductivity type region having a conductivity type that is the other of p-type and n-type, and
a pn junction located between the first conductivity type region and the second conductivity type region;

irradiating the semiconductor layer with laser light while a forward current flows between the first electrode and the second electrode, to form a near-field light formation region in which an impurity of the first conductivity type for formation of near-field light is distributed;
removing the first electrode and the second electrode; and
forming a loop electrode through which an electric current flows to produce a magnetic field in a direction penetrating the pn junction, the loop electrode disposed on the first surface.

Assignees

• Nichia Corp

Inventors

• Kadowaki Takuya
• Ohtsu Motoichi
• Kawazoe Tadashi

Classifications

• G02F1/093

  used as non-reciprocal devices, e.g. optical isolators, circulators (G02F1/0955 takes precedence) · CPC title

• G02F1/134309

  characterised by their geometrical arrangement · CPC title

• G02F1/0136 Primary

  for the control of polarisation, e.g. state of polarisation [SOP] control, polarisation scrambling, TE-TM mode conversion or separation (G02F1/0353 takes precedence) · CPC title

• G02F1/0081

  Electric or magnetic properties · CPC title

• G02F1/015

  based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction (G02F1/03 takes precedence) · CPC title