Coating liquid composition for forming piezoelectric film, oriented piezoelectric film, and liquid ejection head

Patent metadata

Field	Value
Publication number	US-11440318-B2
Application number	US-201916589582-A
Country	US
Kind code	B2
Filing date	Oct 1, 2019
Priority date	Oct 3, 2018
Publication date	Sep 13, 2022
Grant date	Sep 13, 2022

Abstract

A sodium niobate-barium titanate-based coating liquid composition including: (a) a sol-gel raw material containing (i) a niobium component, such as a niobium alkoxide, (ii) a sodium component, such as a sodium alkoxide, (iii) a titanium component, such as a titanium alkoxide, and (iv) a barium component, such as a barium alkoxide; and (b) a compound including at least one kind selected from the group consisting of a β-ketoester compound and a β-diketone compound represented by the following formula (1):where R1 represents an alkyl group having 1 or more to 6 or less carbon atoms.

First claim

What is claimed is:

1. A sodium niobate-barium titanate-based coating liquid composition comprising:
(a) a sol-gel raw material containing:
(i) at least one kind of niobium component selected from the group consisting of a niobium alkoxide, a hydrolysate of the niobium alkoxide, and a condensate of the hydrolysate of the niobium alkoxide;
(ii) at least one kind of sodium component selected from the group consisting of a sodium alkoxide, a hydrolysate of the sodium alkoxide, and a condensate of the hydrolysate of the sodium alkoxide;
(iii) at least one kind of titanium component selected from the group consisting of a titanium alkoxide, a hydrolysate of the titanium alkoxide, and a condensate of the hydrolysate of the titanium alkoxide; and
(iv) at least one kind of barium component selected from the group consisting of a barium alkoxide, a hydrolysate of the barium alkoxide, and a condensate of the hydrolysate of the barium alkoxide; and
(b) a compound including at least one member selected from the group consisting of a β-ketoester compound and a β-diketone compound represented by the following formula (1):

where R 1 represents an alkyl group having 1 or more to 6 or less carbon atoms.

2. The sodium niobate-barium titanate-based coating liquid composition according to claim 1 , further comprising an alkoxide precursor in which the β-ketoester compound or the β-diketone compound coordinates to form a chelate with at least one member selected from the group consisting of the niobium alkoxide, the sodium alkoxide, the titanium alkoxide, and the barium alkoxide.

3. The sodium niobate-barium titanate-based coating liquid composition according to claim 2 , wherein the compound (b) is dissolved in at least one organic solvent selected from the group consisting of an alcohol and a carboxylic acid.

4. The sodium niobate-barium titanate-based coating liquid composition according to claim 1 , wherein the compound (b) is dissolved in at least one organic solvent selected from the group consisting of an alcohol and a carboxylic acid.

5. A liquid ejection head comprising:
a liquid ejection orifice;
a pressure chamber communicating with the liquid ejection orifice; and
an actuator configured to cause a capacity change for ejecting a liquid from the liquid ejection orifice to the pressure chamber,
wherein the actuator includes:
a vibrating plate;
a sodium niobate-barium titanate-based piezoelectric film comprising a perovskite crystal that has a crystal axis oriented in a normal direction of a film surface, and that is represented by the following general formula (2):
(1− x )NaNbO 3 -xBaTiO 3 (0.01≤ x ≤0.40)  (2);

an upper electrode; and
a lower electrode located between the vibrating plate and the sodium niobate-barium titanate-based piezoelectric film, and
wherein the vibrating plate, the sodium niobate-barium titanate-based piezoelectric film, and the upper electrode are arranged in this order from a pressure chamber side.

Assignees

• Canon Kk

Inventors

• Kotani Yoshinori
• Kobayashi Motokazu
• Ohashi Yoshihiro
• Nakasu Minako

Classifications

• B41J2202/03

  Specific materials used · CPC title

• B41J2/161 Primary

  of film type, deformed by bending and disposed on a diaphragm · CPC title

• C04B2235/441

  Alkoxides, e.g. methoxide, tert-butoxide · CPC title

• B41J2/14233 Primary

  of film type, deformed by bending and disposed on a diaphragm · CPC title

• C04B35/4686

  based on phases other than BaTiO3 perovskite phase · CPC title