Method for preparing a sample for transmission electron microscopy

Patent metadata

Field	Value
Publication number	US-11437217-B2
Application number	US-202117332114-A
Country	US
Kind code	B2
Filing date	May 27, 2021
Priority date	Jun 12, 2020
Publication date	Sep 6, 2022
Grant date	Sep 6, 2022

Abstract

A method for preparing a sample for transmission electron microscopy (TEM) comprises providing a substrate having a patterned area on its surface that is defined by a particular topography. A conformal layer of contrasting material is deposited on the topography by depositing a layer of the contrasting material on a local target area of the substrate, spaced apart from the patterned area via Electron Beam Induced Deposition (EBID). The deposition parameters, the thickness of the layer deposited in the target area, and the distance of the target area to the patterned area are selected so that a conformal layer of the contrasting material is formed on the topography of the patterned area. A protective layer is subsequently deposited. The protective layer does not damage the topography in the patterned area because the patterned area is protected by the conformal layer.

First claim

What is claimed is:

1. A method for preparing a sample for transmission electron microscopy (TEM) comprises:
providing a substrate comprising a patterned area on its surface that comprises patterned features that defines a topology;
depositing a layer of contrasting material in at least one target area that is spaced apart from the patterned area to thereby produce a contrast layer on the topology, wherein depositing of the layer comprises applying Electron Beam Induced Deposition (EBID) to the at least one target area in such a manner that a portion of the contrasting material is also deposited around the target area to thereby form a conformal layer of the contrasting material on at least some of the patterned features of the patterned area;
depositing a protective layer on the patterned area; and
producing the sample in the form of a thin slice of the substrate by removing material on either side of the slice, the slice being oriented transversally to at least a number of the patterned features, so as to visualize the patterned features by TEM.

2. The method according to claim 1 , wherein the EBID is only applied to the at least one target area.

3. The method according to claim 1 , wherein depositing of the layer of contrasting material is performed before depositing the protective layer.

4. The method according to claim 1 , wherein the patterned features of the patterned area are formed from a material that comprises a polymer and wherein the contrasting material is a heavy metal.

5. The method according to claim 4 , wherein the heavy metal comprises Pt.

6. The method according to claim 1 , wherein:
the patterned features corresponds to an array of parallel lines, wherein each line has a particular width, height, and pitch; and
the at least one target area is located to one side of the array and is spaced apart from the array in a direction that is transversal to the lines.

7. The method according to claim 1 , wherein the contrasting material is deposited in a single target area, and wherein a thickness of the conformal layer decreases as a function of a distance to the target area.

8. The method according to claim 1 , wherein the contrasting material is deposited in two or more target areas and wherein the conformal layer is at least partially formed by addition of conformal layers formed as a consequence of the deposition of the contrasting material in the two or more target areas.

9. A sample that facilitates performance of transmission electron microscopy (TEM) comprises:
a substrate comprising a patterned area on its surface that comprises a patterned features that defines a topology;
a contrasting layer applied on at least some of the patterned features, wherein the contrasting layer corresponds to a conformal layer that comprises a contrasting material, wherein the contrasting material is applied on the substrate via Electron Beam Induced Deposition (EBID) in at least one target area that is spaced apart from the patterned area in such a manner that a portion of the contrasting material is also deposited around the target area to thereby produce the contrast layer on the topology; and
a protective layer disposed on the patterned area.

10. The sample according to claim 9 , wherein the patterned features of the patterned area are formed of a polymer and wherein the contrasting material is a heavy metal.

11. The sample according to claim 10 , wherein the heavy metal comprises Pt.

12. The sample according to claim 9 , wherein:
the patterned features corresponds to an array of parallel lines, wherein each line has a particular width, height, and pitch; and
the at least one target area is located to one side of the array and is spaced apart from the array in a direction that is transversal to the lines.

13. The sample according to claim 9 , wherein a thickness of the conformal layer decreases as a function of a distance to the target area.

14. The sample according to claim 9 , wherein the contrasting material is deposited in two or more target areas and wherein the conformal layer is at least partially formed by addition of conformal layers formed as a consequence of the deposition of the contrasting material in the two or more target areas.

Assignees

• Imec Vzw

Inventors

• Vancoille Eric
• Bosman Niels
• Carolan Patrick

Classifications

• H01J2237/262

  Non-scanning techniques · CPC title

• H01J2237/2802

  Transmission microscopes · CPC title

• G01N1/28

  Preparing specimens for investigation {including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q}(mounting specimens on microscopic slides G02B21/34; means for supporting the objects or the materials to be analysed in electron microscopes H01J37/20 {; laboratory gas handling apparatus B01L5/00}) · CPC title

• H01J37/3178

  for applying thin layers on objects · CPC title

• C23C16/06

  characterised by the deposition of metallic material · CPC title