Device and method for coupling light of different wavelengths into a waveguide

Patent metadata

Field	Value
Publication number	US-11435568-B2
Application number	US-202017111557-A
Country	US
Kind code	B2
Filing date	Dec 4, 2020
Priority date	Dec 12, 2019
Publication date	Sep 6, 2022
Grant date	Sep 6, 2022

Abstract

A device includes a grating coupler with a grating constant, two light sources, and a planar waveguide, which are configured to couple light with two different wavelengths λ1, λ2 into the waveguide. The waveguide has a waveguiding layer disposed adjacent to a substrate layer and a cover layer. The waveguiding layer has a thickness d and effective refractive indices of N(λk, jk), wherein λk is one of the wavelengths and jk is an order of a waveguide mode, wherein the coupled light of the wavelength λk has a coupling angle αk into the waveguide, and wherein an amount of difference between the coupling angles is a divergence angle Δα. Guiding of waveguide modes of the order jk>0 is possible for a wavelength of the coupled light. The waveguiding layer is arranged to couple the light via the grating coupler under a divergence angle of Δα<6.

First claim

What is claimed is:

1. A device comprising:
a grating coupler with a grating constant;
at least two light sources;
a planar waveguide; and
a goniometer structure which has at least one rotating mirror and two lenses, and a virtual pivot point on the grating coupler,
wherein the grating coupler, the at least two light sources and the waveguide are configured to couple light with at least two different wavelengths λ 1 , λ 2 into the waveguide,
wherein the waveguide has a waveguiding layer disposed adjacent to a substrate layer and a cover layer, the waveguiding layer having a thickness d and effective refractive indices of N(λ k , j k ), wherein λ k is one of the wavelengths of the coupled light and j k is an order of a waveguide mode, wherein the coupled light of the wavelength λ k has a coupling angle α k into the waveguide, and wherein an amount of difference between the coupling angles of different ones of the at least two light sources is a divergence angle Δα,
wherein the thickness d and the effective refractive indices of N(λ k , j k ) of the waveguiding layer are such that waveguide modes of the order j k >0 are guided for at least one of the at least two different wavelengths of the coupled light, and
wherein the waveguiding layer is arranged to couple the light having the at least two different wavelengths via the grating coupler under a divergence angle of Δα<6°.

2. The device according to claim 1 , wherein the divergence angle Δα is less than 3°.

3. The device according to claim 1 , wherein the at least two wavelengths of the light from the at least two light sources each differ by at least Δλ=100 nm.

4. The device according to claim 1 , wherein one of the at least two light sources has a wavelength in a range of 600 nm-1000 nm, and wherein another one of the at least two light sources has a wavelength in a range of 400 nm-700 nm.

5. The device according to claim 1 , further comprising a goniometer structure which has two rotating mirrors.

6. The device according to claim 1 , wherein at least the irradiated light of the wavelength λ k of at least one of the light sources has a line profile along the grating coupler.

7. The device according to claim 1 , further comprising at least one component for lightbeam shaping which is at least one of a cylindrical lens, a Powell lens, a rotating polygonal beam offset prism, a beam combiner, or a collimating lens.

8. A method comprising using the device according to claim 1 for dark field excitation in molography and fluorescence spectroscopy.

9. The device according to claim 1 , wherein the thickness d and the effective refractive indices of N(λ k , j k ) of the waveguiding layer are such that the light of a first one of the wavelengths λ 1 is coupled with a first coupling angle α 1 into a first waveguide mode j 1 and the light of a second one of the wavelengths λ 2 <λ 1 is coupled with a second coupling angle α 2 into a second waveguide mode j 2 , with j 2 >j 1 .

10. A method for coupling light from at least two different light sources having different wavelengths via a grating coupler with a grating period into a waveguide, the method comprising:
irradiating the light from the at least two different light sources having the different wavelengths onto the grating coupler using a goniometer structure which has at least one rotating mirror and two lenses, and a virtual pivot point on the grating coupler;
coupling the light of a first one of the wavelengths λ 1 with a first coupling angle α 1 into a first waveguide mode j 1 and the light of a second one of the wavelengths λ 2 <λ 1 with a second coupling angle α 2 into a second waveguide mode j 2 , with j 2 >j 1 ,
wherein an amount of difference between the coupling angles from the at least two different light sources is Δα<6°.

11. The method according to claim 10 , further comprising coupling light from at least one further light source with at least one further wavelength λ k <λ 2 <λ 1 into at least one further waveguide mode j k with at least one further coupling angle α k , with j k >j 2 >j 1 .

12. The method according to claim 10 , wherein the light of the at least two light sources having the different wavelengths is coupled into the grating coupler by a goniometer structure having a virtual pivot point.

13. The method according to claim 10 , wherein the light of the at least two different light sources is coupled in a collinear manner at the different wavelengths.

14. The method according to claim 10 , wherein the light of the at least two different light sources having the different wavelengths is coupled into the waveguide at a same time, or wherein the light having one of the different wavelengths and at least the light having another one of the different wavelengths are coupled in one after the other.

15. The method according to claim 10 , wherein at least an optical path of the light having one of the different wavelengths is sheared at an angle β in a plane parallel to the waveguide.

16. The method according to claim 10 , wherein the light of at least one of the at least two different light sources is shaped in such a way that a line profile results along the grating coupler.

Assignees

• Heidenhain Gmbh Dr Johannes

Inventors

• Holzapfel Wolfgang
• Kugler Michael
• Roetzer Martin
• Schade Marco

Classifications

• G02B6/124 Primary

  Geodesic lenses or integrated gratings · CPC title

• G02B21/16

  adapted for ultraviolet illumination {; Fluorescence microscopes (G02B21/0076 takes precedence)} · CPC title

• G01N21/648

  using evanescent coupling or surface plasmon coupling for the excitation of fluorescence · CPC title

• G01N2021/6463

  Optics · CPC title

• G02B6/003

  Lens or lenticular sheet or layer · CPC title