Calibration sample, electron beam adjustment method and electron beam apparatus using same

Patent metadata

Field	Value
Publication number	US-11435178-B2
Application number	US-201716638634-A
Country	US
Kind code	B2
Filing date	Aug 25, 2017
Priority date	Aug 25, 2017
Publication date	Sep 6, 2022
Grant date	Sep 6, 2022

Abstract

To implement a calibration sample by which an incident angle can be measured with high accuracy, an electron beam adjustment method, and an electron beam apparatus using the calibration sample. To adjust an electron beam using a calibration sample, the calibration sample includes a silicon single crystal substrate 201 whose upper surface is a {110} plane, a first recess structure 202 opening in the upper surface and extending in a first direction, and a second recess structure 203 opening in the upper surface and extending in a second direction intersecting the first direction, in which the first recess structure and the second recess structure each include a first side surface and a first bottom surface that intersects the first side surface, and a second side surface and a second bottom surface that intersects the second side surface, the first side surface and the second side surface are {111} planes, and the first bottom surface and the second bottom surface are crystal planes different from the {110} planes.

First claim

The invention claimed is:

1. A calibration sample for measurement of an incident angle of a primary electron emitted from an electron source of an electron beam apparatus, the calibration sample comprising:
a silicon single crystal substrate whose upper surface is a {110} plane;
a first recess structure opening in the upper surface and extending in a first direction; and
a second recess structure opening in the upper surface and extending in a second direction intersecting the first direction, wherein
the first recess structure and the second recess structure each include a first side surface and a first bottom surface that intersects the first side surface, and a second side surface and a second bottom surface that intersects the second side surface,
the first side surface and the second side surface are {111} planes, and
the first bottom surface and the second bottom surface are crystal planes different from the {110} planes.

2. The calibration sample according to claim 1 , wherein
the first bottom surface and the second bottom surface are {311} planes.

3. The calibration sample according to claim 2 , wherein
a bottom surface groove is formed at an intersection line of the first bottom surface and the second bottom surface.

4. The calibration sample according to claim 2 , wherein
the first recess structure and the second recess structure further include a third bottom surface that is a {110} plane, a first bottom surface groove is formed by an intersection line of the first bottom surface and the third bottom surface, and a second bottom surface groove is formed by an intersection line of the second bottom surface and the third bottom surface.

5. The calibration sample according to claim 1 , wherein
a surface film is formed on the upper surface, the first recess structure, and the second recess structure, and
the surface film includes at least one of HfO 2 , Ta 2 O 5 , and La 2 O 3 .

6. The calibration sample according to claim 1 , further comprising:
a third recess structure opening in the upper surface and extending in the first direction; and
a fourth recess structure opening in the upper surface and extending in the second direction, wherein
the third recess structure and the fourth recess structure each include the first side surface, the first bottom surface, the second side surface, and the second bottom surface, and
the first recess structure and the second recess structure have a first depth, and the third recess structure and the fourth recess structure have a second depth shallower than the first depth.

7. The calibration sample according to claim 1 , wherein
the first recess structure intersects the second recess structure.

8. An electron beam adjustment method of adjusting an incident angle of a primary electron emitted from an electron source of an electron beam apparatus to a sample using a calibration sample,
the calibration sample including a first recess structure that has an opening in an upper surface which is a {110} plane of a silicon single crystal substrate, extends in a first direction, and has a {111} plane as a side surface, and the first recess structure including a first upper surface edge and a second upper surface edge formed at the opening and extending in the first direction, and a first bottom surface groove formed at a bottom portion of the first recess structure and extending in the first direction,
the electron beam adjustment method comprising:
imaging the first recess structure of the calibration sample;
obtaining, in an image obtained by imaging the first recess structure, a first center position of upper surface edges that is a center position between the first upper surface edge and the second upper surface edge, and a position of the first bottom surface groove; and
obtaining a first incident angle of the primary electron based on a relative position between the first center position of upper surface edges and the position of the first bottom surface groove, and a height difference between the first and second upper surface edges and the first bottom surface groove.

9. The electron beam adjustment method according to claim 8 , wherein
the calibration sample including a second recess structure that has an opening in the upper surface of the silicon single crystal substrate, extends in a second direction intersecting the first direction, and has the {111} plane as a side surface, and the second recess structure including a third upper surface edge and a fourth upper surface edge formed at the opening and extending in the second direction, and a second bottom surface groove formed at a bottom portion of the second recess structure and extending in the second direction,
the electron beam adjustment method further comprising:
imaging the second recess structure of the calibration sample;
obtaining, in an image obtained by imaging the second recess structure, a second center position of upper surface edges that is a center position between the third upper surface edge and the fourth upper surface edge, and a position of the second bottom surface groove;
obtaining a second incident angle of the primary electron based on a relative position between the second center position of upper surface edges and the position of the second bottom surface groove, and a height difference between the third and fourth upper surface edges and the second bottom surface groove; and
calculating incident angles in two orthogonal directions based on the first incident angle and the second incident angle.

10. The electron beam adjustment method according to claim 9 , wherein
the electron beam apparatus including a first deflector and a second deflector which are configured to deflect the primary electron,
the electron beam adjustment method further comprising:
obtaining, based on the incident angles in two orthogonal directions, an intensity ratio and a relative angle of the first deflector and the second deflector; and
adjusting, based on the obtained intensity ratio and the relative angle, the incident angle of the primary electron to the sample by controlling the first deflector and the second deflector.

11. The electron beam adjustment method according to claim 10 , further comprising:
imaging the first recess structure of the calibration sample with a line scanning direction orthogonal to the first direction; and
imaging the second recess structure of the calibration sample with the line scanning direction orthogonal to the second direction.

12. The electron beam adjustment method according to claim 10 , further comprising:
imaging, when the first recess structure and the second recess structure of the calibration sample are imaged, an upper focus image having a focal position at the upper surface edge and a bottom focus image having a focal position at the bottom surface groove;
obtaining a center position of the upper surface edges from the upper focus image;
obtaining a position of the bottom surface groove from the bottom focus image; and
obtaining the incident angle of the primary electron based on a relative position between the center position of the upper surface edges and the position of the bottom surface groove after a shift amount of an image position due to the focal position is corrected, and a height difference between the upper surface edges and the bottom surface groove.

13. The electron beam adjustment method according to claim 10 , wherein
the calibration sample having recess structures with different depths,
the electron beam adjustment method further comprising:
selectively using a recess structure to be used for adjustment of the electron beam according to an

Assignees

• Hitachi High Tech Corp

Inventors

• Sohda Yasunari
• Nakayama Yoshinori
• BIZEN Kaori
• Ohta Hiroya
• Abe Yusuke

Classifications

• H01J37/04 Primary

  Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement {(H01J37/32009, H01J37/32623, H01J37/3266, H01J37/32697 take precedence; electron or ion-optical systems for localised treatment of objects H01J37/3007)} · CPC title

• H01J37/28

  with scanning beams {(H01J37/268, H01J37/292, H01J37/2955 take precedence)} · CPC title

• H01J2237/2826

  Calibration · CPC title

• H01J2237/281

  Bottom of trenches or holes · CPC title

• H01J37/1474

  Scanning means · CPC title