Device for supporting substrate, apparatus for manufacturing display panel, and method for supporting substrate
US-2020176300-A1 · Jun 4, 2020 · US
US11434128B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11434128-B2 |
| Application number | US-201916754570-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jan 14, 2019 |
| Priority date | Jan 14, 2019 |
| Publication date | Sep 6, 2022 |
| Grant date | Sep 6, 2022 |
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An actuator and a manufacture method thereof, an operation method thereof, and a movable device. The actuator includes a photodeformation layer and a first driving unit, the first driving unit includes at least one first light emitting device, the first light emitting device is connected to a first side of the photodeformation layer, the first light emitting device is capable of emitting first light with a first wavelength to irradiate onto the photodeformation layer, and the photodeformation layer can generate a first deformation under irradiation of the first light.
Opening claim text (preview).
What is claimed is: 1. An actuator, comprising: a photodeformation layer; and a first driving unit, comprising at least one first light emitting device, wherein the first light emitting device is on a first side of the photodeformation layer and is capable of emitting first light with a first wavelength to irradiate onto the photodeformation layer, so as to allow the photodeformation layer to generate a first deformation under irradiation of the first light, wherein the first driving unit further comprises at least one second light emitting device, the second light emitting device is connected to a second side of the photodeformation layer, and is capable of emitting second light with a second wavelength to irradiate onto the photodeformation layer, the photodeformation layer generates a second deformation under irradiation of the second light with the second wavelength, the first wavelength is different from the second wavelength, a deformation direction of the first deformation and a deformation direction of the second deformation are opposite, and the first side and the second side of the photodeformation layer are opposite to each other, the actuator further comprises a second driving unit, the second driving unit comprises at least on third light emitting device and at least one fourth light emitting device, the third light emitting device is connected to the second side of the photodeformation layer, and is capable of emitting third light with the first wavelength to irradiate onto the photodeformation layer, the fourth light emitting device is connected to the first side of the photodeformation layer, and is capable of emitting fourth light with the second wavelength to irradiate onto the photodeformation layer, and in a direction perpendicular to a layer surface of the photodeformation layer, the third light emitting device and the fourth light emitting device are overlapped with each other. 2. The actuator according to claim 1 , wherein a material of the photodeformation layer comprises: azobenzene, a triphenylmethane derivative, copolymers containing cinnamic acid groups, benzospiropyran, or a polyethylene polymer. 3. The actuator according to claim 1 , wherein the first light emitting device comprised in the first driving unit is a light emitting diode device, and the light emitting diode device comprises a flexible substrate, wherein the first light emitting diode device further comprises a flexible encapsulation layer, and is attached to a surface of the photodeformation layer through the flexible encapsulation layer. 4. The actuator according to claim 1 , wherein the first wavelength is a blue light wavelength or an ultraviolet light wavelength, and the second wavelength is an infrared light wavelength. 5. A movable device, comprising at least one actuator according to claim 1 to drive the movable device. 6. The movable device according to claim 5 , further comprising a controller, wherein the controller is configured to at least control a light emitting state of the first light emitting device in the actuator, thereby controlling the actuator to drive. 7. The movable device according to claim 6 , further comprising an image sensor, wherein the image sensor is configured to shoot an external environment of the movable device. 8. A manufacture method of an actuator, comprising: providing a photodeformation layer; and providing a first driving unit on the photodeformation layer, the first driving unit comprising at least one first light emitting device, and the first light emitting device being on a first side of the photodeformation layer, wherein the first light emitting device is capable of emitting first light with a first wavelength, so as to allow the photodeformation layer to generate a first deformation under irradiation of the first light, wherein the first driving unit further comprises at least on fifth light emitting device, the fifth light emitting device is connected to a second side of the photodeformation layer, and is capable of emitting fifth light with a second wavelength to irradiate onto the photodeformation layer, the photodeformation layer generates a second deformation under irradiation of the fifth light with the second wavelength, the first wavelength is different from the second wavelength, a deformation direction of the first deformation and a deformation direction of the second deformation are opposite, and the first side and the second side of the photodeformation layer are opposite to each other, the manufacture method further comprises: providing a second driving unit, wherein the second driving unit comprises at least one third light emitting device and at least one fourth light emitting device, the third light emitting device is connected to the second side of the photodeformation layer, and is capable of emitting third light with the first wavelength to irradiate onto the photodeformation layer, the fourth light emitting device is connected to the first side of the photodeformation layer, and is capable of emitting fourth light with the second wavelength to irradiate onto the photodeformation layer, and in a direction perpendicular to a layer surface of the photodeformation layer, the third light emitting device and the fourth light emitting device are overlapped with each other. 9. The manufacture method according to claim 8 , wherein the photodeformation layer comprises azobenzene, and wherein the providing the photodeformation layer comprises: dissolving azobenzene monomers in a solvent; forming an azobenzene monomer layer on a substrate; and contacting the azobenzene monomer layer with an azobenzene crosslinking agent to allow azobenzene monomers in the azobenzene monomer layer to crosslink. 10. The manufacture method according to claim 9 , wherein the azobenzene monomer layer is formed on the substrate by an inkjet printing method, and the azobenzene crosslinking agent is sprayed on the azobenzene monomer layer by an inkjet printing method. 11. An operation method of the actuator according to claim 1 , comprising: controlling the first light emitting device of the first driving unit to emit the first light with the first wavelength and controlling the third light emitting device of the second driving unit to emit the third light with the first wavelength, to allow the photodeformation layer to generate the first deformation; and controlling the first light emitting device of the first driving unit to stop emitting light and controlling the third light emitting device of the second driving unit to stop emitting light, to allow the photodeformation layer to generate the second deformation. 12. The operation method according to claim 11 , further comprising: controlling the second light emitting device to emit second light with the second wavelength and controlling the fourth light emitting device to emit fourth light with the second wavelength, to allow the photodeformation layer to generate the second deformation.
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