Optical device including lid having first and second cavity with inclined sidewalls

Patent metadata

Field	Value
Publication number	US-11430906-B2
Application number	US-201916518792-A
Country	US
Kind code	B2
Filing date	Jul 22, 2019
Priority date	Jul 26, 2018
Publication date	Aug 30, 2022
Grant date	Aug 30, 2022

Abstract

An optical device includes a substrate, an electronic component and a lid. The electronic component is disposed on the substrate. The lid is disposed on the substrate. The lid has a first cavity over the electronic component and a second cavity over the first cavity. The sidewall of the second cavity is inclined.

First claim

What is claimed is:

1. An optical device, comprising:
a substrate;
an electronic component disposed on the substrate; and
a lid disposed on the substrate, the lid having a first cavity over the electronic component and a second cavity over the first cavity,
wherein the lid comprises a support structure spaced apart from an adhesive material;
the first cavity comprises a first sidewall and a second sidewall adjacent to the first sidewall, and wherein the support structure has a surface extending between the first sidewall and the second sidewall;
the support structure comprises a plurality of parts, each of the plurality of parts is disposed on each corner of the first cavity; and
the plurality of parts is physically separated from one another, wherein a bottom surface of the support structure is physically separated from a top surface of the substrate.

2. The optical device of claim 1 , further comprising a light filter disposed within the second cavity and the adhesive material is disposed between the light filter and a sidewall of the second cavity.

3. The optical device of claim 1 , wherein a projection area of the support structure on the substrate and a projection area of the adhesive material on the substrate are non-overlapped with each other.

4. The optical device of claim 3 , wherein the adhesive material has a substantially triangular shape from a cross-sectional view.

5. The optical device of claim 2 , wherein a projection area of the light filter on the substrate and a projection area of the adhesive material on the substrate are non-overlapping.

6. The optical device of claim 5 , wherein a lower surface of the light filter facing the support structure is exposed from the adhesive material.

7. The optical device of claim 6 , wherein the support structure is disposed adjacent to at least one of corners of the first cavity without extending along an edge connecting two adjacent corners of the first cavity.

8. The optical device of claim 7 , wherein an edge of the lower surface of the light filter is exposed from the support structure.

9. The optical device of claim 8 , wherein a projection area of the light filter on the substrate is entirely within a boundary of a projection area of the support structure on the substrate.

10. The optical device of claim 8 , wherein the support structure has a top surface, and the bottom surface is opposite to the top surface, and a lateral surface extending between the top surface and the bottom surface, and wherein the lateral surface is substantially perpendicular with the bottom surface.

11. The optical device of claim 10 , wherein the support structure has a portion in contact with the light filter, and the portion of the support structure has a substantially constant thickness in a cross-sectional view.

12. An optical device, comprising:
a substrate;
an electronic component disposed on the substrate; and
a lid disposed on the substrate, the lid having a first cavity over the electronic component and a second cavity over the first cavity;
wherein the lid comprises a support structure angled with a sidewall of the second cavity, and the support structure is disposed adjacent to at least one of corners of the first cavity without extending along an edge connecting two adjacent corners of the first cavity;
the first cavity comprises a first sidewall and a second sidewall adjacent to the first sidewall, and wherein the support structure has a surface extending between the first sidewall and the second sidewall;
the support structure comprises a plurality of parts, each of the plurality of parts is disposed on each of the corners of the first cavity; and
the plurality of parts is physically separated from one another, wherein a bottom surface of the support structure is physically separated from a top surface of the substrate.

13. The optical device of claim 12 , wherein the support structure has a substantially triangular shape in a top view.

14. The optical device of claim 12 , wherein the support structure has a lower surface facing the substrate and an upper surface opposite to the lower surface, and wherein the upper surface is substantially parallel to the lower surface.

15. The optical device of claim 14 , wherein the support structure further has a lateral surface extending between the lower surface and the upper surface, and wherein the lateral surface is substantially perpendicular to the lower surface.

16. The optical device of claim 15 , wherein the upper surface, the lower surface, and a surface of the substrate on which the electronic component is disposed are substantially parallel.

17. The optical device of claim 15 , wherein the support structure has a substantially constant thickness in a cross-sectional view.

Assignees

• Advanced Semiconductor Eng

Inventors

• TSAI Chang Chin
• Huang Yu-Che
• Chan Hsun-Wei

Classifications

• G01S17/00

  Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems · CPC title

• G01D5/26

  characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light · CPC title

• G01S7/4813

  Housing arrangements · CPC title

• G01D11/24 Primary

  Housings {; Casings for instruments} · CPC title

• G01S17/06

  Systems determining position data of a target · CPC title