Substrate processing management system
US-2020375076-A1 · Nov 26, 2020 · US
US11428644B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11428644-B2 |
| Application number | US-201916624619-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 27, 2019 |
| Priority date | Nov 27, 2018 |
| Publication date | Aug 30, 2022 |
| Grant date | Aug 30, 2022 |
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An electronic apparatus including a display and one or more processor is disclosed. The one or more processor is configured to: divide a first error value of each of a plurality of first components with respect to a mounting position acquired through inspection of a plurality of substrates of a first type, into a plurality of error values, generate a graph of a tree structure including a plurality of nodes corresponding to the plurality of first components, component types of each of the plurality of first components and a plurality of components included in a mounter, adjust attributes of each of the plurality of nodes using the plurality of error values divided from the first error value of each of the plurality of first components, and display the graph in which the attributes of each of the plurality of nodes are adjusted, on the display.
Opening claim text (preview).
What is claimed is: 1. An electronic apparatus, comprising: a display; and one or more processor, wherein the one or more processor is configured to: divide a first error value of each of a plurality of first components with respect to a mounting position acquired through inspection of a plurality of substrates of a first type on which the plurality of first components are mounted by a mounter, into a plurality of error values; generate a graph of a tree structure including a plurality of nodes corresponding to the plurality of first components, component types of each of the plurality of first components and a plurality of mounter component nodes included in the mounter; adjust attributes of each of the plurality of nodes using the plurality of error values divided from the first error value of each of the plurality of first components; and display the graph, in which the attributes of each of the plurality of nodes are adjusted, on the display. 2. The apparatus of claim 1 , wherein the plurality of mounter component nodes include at least one of a head, a spindle, a nozzle, a feeder and a reel. 3. The apparatus of claim 1 , wherein the plurality of nodes includes a plurality of first nodes corresponding to the plurality of first components, a plurality of second nodes corresponding to the component types of each of the plurality of first components and a plurality of third nodes corresponding to the plurality of mounter component nodes included in the mounter, the plurality of first nodes is set as a lower layer than the plurality of second nodes, and the plurality of second nodes is set as a lower layer than the plurality of third nodes. 4. The apparatus of claim 1 , wherein the attributes of each of the plurality of nodes include at least one of a shape, a size and a color of the plurality of nodes. 5. The apparatus of claim 4 , wherein the one or more processor is configured to: distribute the plurality of error values divided from the first error value of each of the plurality of first components to the plurality of nodes; and adjust the attributes of each of the plurality of nodes based on absolute values of the error values distributed to the plurality of nodes. 6. The apparatus of claim 1 , wherein the one or more processor is configured to: determine a plurality of second components in which a mounting failure has occurred among the plurality of first components by using the plurality of error values divided from the first error value of each of the plurality of first components; and determine a cause of a mounting failure of each of the plurality of second components as at least one of a component mounting position setting error, a mounting condition setting error according to a component type and a defect of the mounter component nodes included in the mounter by using the plurality of error values divided from the first error value of each of the plurality of second components. 7. The apparatus of claim 6 , wherein the one or more processor is configured to: further adjust attributes of at least one node among the plurality of nodes based on the cause of the mounting failure of each of the plurality of second components. 8. The apparatus of claim 6 , wherein the first error value of each of the plurality of first components is an average value of differences between a plurality of measurement values of mounting positions of the plurality of first components measured in inspecting each of the plurality of substrates of the first type, and predetermined reference values, and the one or more processor is configured to: further acquire an error variance value of each of the plurality of first components indicating a variance with respect to the differences between the plurality of measurement values of the mounting positions of the plurality of first components and the predetermined reference values. 9. The apparatus of claim 8 , wherein the one or more processor is configured to: adjust at least one error value among the plurality of error values divided from the first error value of each of the plurality of second components based on the determined cause of the mounting failure of each of the plurality of second components; calculate a first yield to be improved in a manufacturing process for the substrate of the first type through improvement of the determined cause of the mounting failure of each of the plurality of second components, by using at least one adjusted error value and the error variance value for each of the plurality of second components identified through the error variance value of each of the plurality of first components; and display the calculated first yield on the display. 10. The apparatus of claim 9 , wherein the one or more processor is configured to: calculate a second yield of the plurality of substrates of the first type based on the number of at least one substrate of the first type including the plurality of second components among the plurality of substrates of the first type; calculate a third yield for the plurality of substrates of the first type based on the number of at least one substrate of the first type in which a failure has actually occurred among the plurality of substrates of the first type; and adjust the calculated first yield based on the second yield and the third yield, and display the adjusted first yield on the display. 11. A method of displaying an inspection result in an electronic apparatus, comprising: dividing, by one or more processor of the electronic apparatus, a first error value of each of a plurality of first components with respect to a mounting position acquired through inspection of a plurality of substrates of a first type on which the plurality of first components are mounted by a mounter, into a plurality of error values; generating a graph of a tree structure including a plurality of nodes corresponding to the plurality of first components, component types of each of the plurality of first components and a plurality of mounter component nodes included in the mounter; adjusting attributes of each of the plurality of nodes using the plurality of error values divided from the first error value of each of the plurality of first components; and displaying, by a display of the electronic apparatus, the graph in which the attributes of each of the plurality of nodes are adjusted. 12. The method of claim 11 , wherein the elements include at least one of a head, a spindle, a nozzle, a feeder and a reel. 13. The method of claim 11 , wherein the plurality of nodes includes a plurality of first nodes corresponding to the plurality of first components, a plurality of second nodes corresponding to the component types of each of the plurality of first components and a plurality of third nodes corresponding to the mounter component nodes included in the mounter, the plurality of first nodes is set as a lower layer than the plurality of second nodes, and the plurality of second nodes is set as a lower layer than the plurality of third nodes. 14. The method of claim 11 , wherein the attributes of each of the plurality of nodes include at least one of a shape, a size and a color of the plurality of nodes. 15. The method of claim 14 , wherein the adjusting attributes of each of the plurality of nodes includes: distributing the plurality of error values divided from the first error value of each of the plurality of first components to the plurality of nodes; and adjusting the attributes of each of the plurality of nodes based on absolute values of the error values distributed to the plurality of nodes.
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