Methods and apparatus for cleaning substrates
US-2019283090-A1 · Sep 19, 2019 · US
US11426832B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11426832-B2 |
| Application number | US-202016917644-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 30, 2020 |
| Priority date | Mar 12, 2020 |
| Publication date | Aug 30, 2022 |
| Grant date | Aug 30, 2022 |
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The present disclosure provides an ultrasonic drive and driving method configured for driving an ultrasonic tool. The ultrasonic drive includes a switch module, a sensing element and a control element. The sensing element senses the voltage and current of the ultrasonic tool and generates a sensing signal accordingly. The control element receives the sensing signal and outputs a control signal. The switch module outputs an ultrasonic signal according to the control signal for controlling the vibration of the ultrasonic tool. When the ultrasonic drive operates a frequency sweep function, the control element determines an operating interval and an operating frequency of the ultrasonic signal. When the ultrasonic drive operates a frequency following function, the control element adjusts the operating frequency according to the sensing signal for keeping the impedance of the ultrasonic tool consistent.
Opening claim text (preview).
What is claimed is: 1. An ultrasonic drive configured for driving an ultrasonic tool, the ultrasonic drive comprising: a switch module; a sensing element electrically connected to the switch module and the ultrasonic tool, wherein the sensing element is configured for sensing a voltage and a current of the ultrasonic tool and generating a sensing signal according to the voltage and the current; and a control element electrically connected to the sensing element and the switch module for receiving the sensing signal and outputting a control signal to the switch module, wherein the switch module outputs an ultrasonic signal to the ultrasonic tool according to the control signal, and the ultrasonic tool vibrates under the control of the ultrasonic signal, wherein when the ultrasonic drive operates a frequency sweep function, the control element acquires a frequency-domain impedance characteristic and a resonance reference point of the ultrasonic tool according to the voltage and the current of the ultrasonic tool under different kinds of operating frequencies, and the control element determines an operating interval and an operating frequency of the ultrasonic signal in the frequency-domain impedance characteristic according to the resonance reference point, wherein when the ultrasonic tool vibrates at the operating frequency, the ultrasonic drive operates a frequency following function, the control element adjusts the operating frequency according to the sensing signal for keeping an impedance of the ultrasonic tool consistent, and the adjusted operating frequency falls within the operating interval as well. 2. The ultrasonic drive according to claim 1 , wherein when the ultrasonic drive operates the frequency sweep function, the determined operating frequency is corresponding to a reference impedance, the control element acquire an actual impedance of the ultrasonic tool according to the sensing signal when the ultrasonic drive operates the frequency following function, and the control element adjusts the operating frequency for keeping the actual impedance consistent with the reference impedance. 3. The ultrasonic drive according to claim 1 , wherein in the frequency-domain impedance characteristic, the ultrasonic tool has a minimum impedance at the resonance reference point. 4. The ultrasonic drive according to claim 1 , wherein the ultrasonic drive operates the frequency following function when the voltage and the current of the ultrasonic tool are in a steady state. 5. The ultrasonic drive according to claim 1 , wherein the ultrasonic tool has an equivalent circuit, the ultrasonic drive acquires a plurality of default parameters of the equivalent circuit by operating the frequency sweep function, the control element acquires a plurality of actual parameters of the equivalent circuit according to the frequency-domain impedance characteristic and the sensing signal, and the control element compares the plurality of default parameters with the plurality of actual parameters to verify the frequency-domain impedance characteristic and the sensing signal. 6. The ultrasonic drive according to claim 1 , further comprising a rectifier circuit and a filter circuit, wherein the rectifier circuit is electrically connected to the switch module, the rectifier circuit receives and converts an AC power into a DC power, the filter circuit is electrically connected between the switch module and the sensing element, and the filter circuit filters the DC power and outputs the filtered DC power to the ultrasonic tool. 7. The ultrasonic drive according to claim 6 , wherein the filter circuit filters the ultrasonic signal outputted by the switch module. 8. An ultrasonic driving method configured for driving an ultrasonic tool, the method comprising: (a) operating a frequency sweep function, acquiring a frequency-domain impedance characteristic and a resonance reference point of the ultrasonic tool according to a voltage and a current of the ultrasonic tool under different kinds of operating frequencies, and determining an operating interval and an operating frequency in the frequency-domain impedance characteristic according to the resonance reference point; (b) diagnosing characteristics of the ultrasonic tool, and controlling the ultrasonic tool to stop operating if the diagnosis result being abnormal; (c) determining an operating power; (d) controlling the ultrasonic tool to vibrate at the operating power and the operating frequency; (e) determining whether the voltage and the current of the ultrasonic tool are in a steady state, operating a step (f) if the determining result of the step (e) is satisfied, and operating a step (h) if the determining result of the step (e) is not satisfied; (f) operating a frequency following function to adjust the operating frequency for keeping an impedance of the ultrasonic tool consistent, wherein the adjusted operating frequency falls within the operating interval; (g) determining whether there is a variance occurring in the system, operating the step (h) if the determining result of the step (g) is satisfied, and operating the step (f) if the determining result of the step (g) is not satisfied; and (h) determining whether the variance occurring in the system is controllable, operating the step (b) if the determining result of the step (h) is satisfied, and controlling the ultrasonic tool to stop operating if the determining result of the step (h) is not satisfied. 9. The ultrasonic driving method according to claim 8 , wherein a variation range of the impedance of the ultrasonic tool is smaller than a default range. 10. The ultrasonic driving method according to claim 8 , wherein in the operating interval, the correlation between the operating frequency and the impedance of the ultrasonic tool is a positive correlation. 11. The ultrasonic driving method according to claim 8 , wherein in the operating interval, the correlation between the operating frequency and the impedance of the ultrasonic tool is a negative correlation. 12. The ultrasonic driving method according to claim 8 , wherein in the step (a), the operating frequency acquired by operating the frequency sweep function is a center frequency of the operating interval.
Specific application · CPC title
with a feedback signal · CPC title
with consecutive, i.e. sequential generation, e.g. with frequency sweep · CPC title
by measuring power, current or torque of a motor · CPC title
characterised by a specific application or detail not covered by any other subgroup of G01R19/00 · CPC title
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