Additive manufacturing processes and additively manufactured products

Patent metadata

Field	Value
Publication number	US-11426818-B2
Application number	US-201916537361-A
Country	US
Kind code	B2
Filing date	Aug 9, 2019
Priority date	Aug 10, 2018
Publication date	Aug 30, 2022
Grant date	Aug 30, 2022

Abstract

A technique to additively print onto a dissimilar material, especially ceramics and glasses (e.g., semiconductors, graphite, diamond, other metals) is disclosed herein. The technique enables manufacture of heat removal devices and other deposited structures, especially on heat sensitive substrates. It also enables novel composites through additive manufacturing. The process enables rapid bonding, orders-of-magnitude faster than conventional techniques.

First claim

The invention claimed is:

1. A method for forming a structure, comprising:
providing a substrate having a surface;
depositing a first powder comprising components of a first melting temperature composition, having a composition that, when heated, chemically reacts with the surface of the substrate, the substrate being selected from the group consisting of a metal, an alloy, graphite, graphene, diamond, silicon, a silicide, a glass, gallium arsenide, a ceramic, a boride, a nitride, an oxide, and a sulfide;
locally heating the first powder, on the substrate, with a localized energy source to melt the first powder, and to chemically react the melted first melting temperature composition with the surface of the substrate, to form a first adherent interlayer; and
cooling the melted first powder to form a fused first melting temperature layer having a lower boundary defined by the first adherent interlayer and an upper surface formed of the first melting temperature composition.

2. The method according to claim 1 , further comprising:
depositing a second powder comprising components of a second melting temperature composition on the upper surface of the fused first melting temperature layer;
heating the second powder, on the upper surface of the fused first melting temperature composition, with a localized energy source to regionally melt the second powder; and
cooling the melted second powder to form a patterned fused second melting temperature layer.

3. The method according to claim 2 , wherein the second melting temperature composition, when heated by the localized energy source, chemically reacts with the first melting temperature composition to form a second adherent interlayer.

4. The method according to claim 2 , further comprising:
heating the substrate to selectively soften one of the first and second melting temperature composition while maintaining the other of the first and second melting temperature composition as a solid; and
separating the solid from the substrate.

5. The method according to claim 1 , wherein said heating is performed on selected portions of the first powder, and the fused first melting temperature layer is selectively formed in a pattern corresponding to the selected portions.

6. The method according to claim 1 ,
wherein said heating is performed by controlling a focused laser,
further comprising receiving feedback from at least one sensor, to determine:
an optimal laser processing power, and
an optimal scan rate.

7. The method according to claim 1 , wherein said heating is performed by controlling a focused laser, and the structure comprises a plurality of layers formed on the fused first melting temperature layer in a selective pattern, further comprising optimizing a laser processing power, a laser scan rate, and a layer thickness for each respective layer.

8. A method for forming a structure bonded to a substrate, comprising:
providing a substrate having a surface, the substrate being selected from the group consisting of a metal, an alloy, graphite, graphene, diamond, silicon, a silicide, a glass, gallium arsenide, a ceramic, a boride, a nitride, an oxide, and a sulfide;
depositing a powder on the surface of the substrate;
locally heating a portion of the powder on the surface of the substrate with localized energy to form an interlayer resulting from a chemical reaction between the substrate and a metal layer, wherein the interlayer is adherent to the substrate; and
cooling the locally heated portion of the powder.

9. The method according to claim 8 , further comprising:
depositing a metallic powder over the interlayer;
heating a portion of the deposited metallic powder with the localized energy to form a melted portion of the metallic powder, wherein the localized energy is dynamically controlled to regionally melt the portion of the deposited metallic powder while leaving an adjacent portion of the metallic powder unmelted, to form a deposited pattern from the melted portion, and without bringing the substrate underneath the melted region into thermal equilibrium; and
cooling the melted portion of the metallic powder to form a solid layer,
wherein said cooling occurs concurrently with heating of a different portion of the metallic powder deposited over the interlayer with the localized energy, to regionally melt the different portion of the metallic powder.

10. The method according to claim 9 , wherein the localized energy is emitted by a localized energy source which is operated continuously and is dynamically repositioned over the surface, and the metallic powder consists essentially of a metal or metal alloy powder.

11. The method according to claim 8 , wherein the chemical reaction product of the powder with the surface of the substrate forms at least one of an intermetallic compound, a metal carbide compound, a metal nitride compound, a metal boride compound, and a metal silicide compound.

12. The method according to claim 9 , wherein a location of the heated portion of the deposited metallic powder is controlled over time to selectively melt the metallic powder into a predefined patterned layer having gaps between portions of the solid layer.

13. The method according to claim 9 , wherein said heating comprises selective laser melting (SLM).

14. The method according to claim 8 , wherein substrate comprises a semiconductor.

15. The method according to claim 8 , wherein the surface of the substrate comprises an aluminum or copper layer.

16. The method according to claim 9 , further comprising forming a stack of layers over the solid layer above the interlayer, by sequentially depositing a powder on an exposed surface and melting the powder to selectively define a pattern comprising at least one gap in at least one layer, in to form a three-dimensional structure which adheres to the substrate.

17. A method of forming a structure on a substrate, comprising:
providing the substrate having a surface, the substrate being selected from the group consisting of a metal, an alloy, graphite, graphene, diamond, silicon, a silicide, a glass, gallium arsenide, a ceramic, a boride, a nitride, an oxide, and a sulfide;
depositing a powder on the surface of the substrate;
locally heating the powder to a sufficient temperature to melt the powder with focused energy, having limited duration at a particular region to avoid heat-induced damage to the substrate distance from the surface; and
cooling the melted powder to form a solid layer,
wherein the melted powder forms an adherent bonding layer between the substrate and the solid layer, comprising a chemical reaction product of the surface and the powder, having a composition distinct from a composition of the surface and a composition of the solid layer.

18. The method according to claim 17 , wherein the adherent bonding layer comprises an interlayer selected from the group consisting of an intermetallic compound, a metal silicide, a metal carbide, a metal boride, and a metal nitride, and the solid layer comprises a metal or metal alloy.

19. The method according to claim 17 , further comprising forming a stack of additional solid layers over the solid layer in a regional pattern to form a three dimensional structure having at least one gap between portions of a respective additional solid layer over the substrate, while avoiding heat-induced functional damage to the integrated circuit, while avoiding heat-induced damage to structures underlying the surface of the substrate.

20. The method according to claim 17 , wherei

Assignees

• Univ New York State Res Found
• The Research Foundation For The State Univ

Inventors

• Schiffres Scott N
• Azizi Arad

Classifications

• H10P14/40

  of conductive or resistive materials · CPC title

• H10W40/255

  having a laminate or multilayered structure, e.g. direct bond copper [DBC] ceramic substrates · CPC title

• H10W40/22

  characterised by their shape, e.g. having conical or cylindrical projections · CPC title

• H10W40/258

  Metallic materials (H10W40/254, H10W40/257, H10W40/255, H10W40/251, H10W40/253 take precedence) · CPC title

• H10W70/02

  of conductive package substrates serving as an interconnection, e.g. of metal plates (manufacture or treatment of leadframes H10W70/04) · CPC title