Film formation device and film formation method for forming metal film
US-2015014178-A1 · Jan 15, 2015 · US
US11421334B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11421334-B2 |
| Application number | US-201916658665-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 21, 2019 |
| Priority date | Nov 16, 2018 |
| Publication date | Aug 23, 2022 |
| Grant date | Aug 23, 2022 |
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A tin solution applicable to tin film formation by solid electrolyte deposition, and a method for forming a tin film using the solution are provided. The tin solution contains tin methanesulfonate, methanesulfonic acid, water, an isopropyl alcohol, and a polyethylene-block-poly (ethylene glycol).
Opening claim text (preview).
What is claimed is: 1. A tin solution for tin film formation containing; tin methanesulfonate; methanesulfonic acid; water; isopropyl alcohol; and polyethylene-block-poly (ethylene glycol), wherein the polyethylene-block-poly (ethylene glycol) is a lauryl alcohol/ethylene oxide adduct having a count of ethylene oxide units (n) of 9 to 28. 2. The tin solution according to claim 1 , wherein a concentration of the methanesulfonic acid in the tin solution is 1 to 25 M. 3. A method for forming a tin film, comprising: impregnating a solid electrolyte membrane having a sulfo group with the tin solution according to claim 1 ; disposing the solid electrolyte membrane between a substrate as a cathode and an anode such that the substrate is in contact with the solid electrolyte membrane; and applying a voltage between the anode and the substrate to deposit tin on a surface of the substrate. 4. The tin film forming method according to claim 3 , wherein in the impregnating, a temperature of the tin solution is equal to or higher than a freezing point of the tin solution, and lower than 35° C., and wherein in the applying the voltage, a temperature of the substrate is equal to or higher than 35° C., and equal to or lower than a glass transition temperature of the solid electrolyte membrane.
characterised by the organic bath constituents used · CPC title
having carbon, oxygen and other atoms, e.g. sulfonated polyethersulfones [S-PES] · CPC title
Energy storage using batteries · CPC title
involving impregnation with a solution, dispersion, paste or dry powder (H01M4/0438 takes precedence) · CPC title
Organic polymers · CPC title
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