Apparatus and method for adjusting a pedestal assembly for a reactor

Patent metadata

Field	Value
Publication number	US-11417563-B2
Application number	US-202117368135-A
Country	US
Kind code	B2
Filing date	Jul 6, 2021
Priority date	Jul 21, 2014
Publication date	Aug 16, 2022
Grant date	Aug 16, 2022

Abstract

The invention is directed to an alignment assembly for changing the relative position of a plate of a pedestal assembly with respect to a processing chamber of a reactor. The alignment assembly is connected at a first end to a riser shaft of the heating assembly and at a second end to a drive shaft. One or more portions of the alignment assembly may be selectively axially rotated or laterally moved change the relative position of the plate with respect to the processing chamber as desired.

First claim

What is claimed is:

1. An apparatus adapted to be connected to a drive shaft, the apparatus comprising:
a plate, wherein the plate includes a surface and a longitudinal central axis;
a riser shaft secured to the plate; and
an alignment assembly having a first end and a second end vertically below the first end, wherein the first end of the alignment assembly connects to the riser shaft, and wherein the second end of the alignment assembly connects to the drive shaft;
wherein the alignment assembly selectively adjusts the orientation of one or both of the surface and the longitudinal central axis; and
wherein the alignment assembly is positioned intermediately to the drive shaft and the riser shaft.

2. The apparatus of claim 1 , wherein the alignment assembly includes a first portion and a second portion.

3. The apparatus of claim 2 , wherein one or both of the first portion and the second portion includes a non-uniform cross-sectional thickness.

4. The apparatus of claim 3 , wherein one of the first portion and the second portion that includes a non-uniform cross-sectional thickness is a circular plate.

5. The apparatus of claim 4 , wherein rotation of the circular plate about the longitudinal central axis causes the alignment assembly to change the angular position of the alignment assembly relative to the plate.

6. The apparatus of claim 5 , wherein the circular plate is beneath the plate.

7. The apparatus of claim 4 , wherein rotation of the circular plate about the longitudinal central axis causes the alignment assembly to change the angular position of the alignment assembly relative to a processing chamber.

8. The apparatus of claim 7 , wherein the circular plate is beneath the processing chamber.

9. The apparatus of claim 2 , wherein one or both of the first portion and the second portion includes a cam surface.

10. The apparatus of claim 2 , wherein axial rotation of one of the first portion and the second portion selectively adjusts the orientation of the surface.

11. The apparatus of claim 2 , wherein lateral movement of one of the first portion and the second portion selectively adjusts the orientation of the longitudinal central axis.

12. The apparatus of claim 2 , wherein each of the first portion and the second portion defines an actuation recess adapted to effectuate application of torque to rotate each of the first portion and the second portion about the longitudinal central axis.

13. The apparatus of claim 2 , further comprising:
a third portion includes a non-uniform cross-sectional thickness.

14. The apparatus of claim 13 , wherein the third portion that includes a non-uniform cross-sectional thickness is a circular plate.

15. The apparatus of claim 14 , wherein rotation of the circular plate of one of the first portion and second portion and rotation of the circular plate of the third portion about the longitudinal central axis causes the alignment assembly to change the angular position of the alignment assembly relative to the plate or to a processing chamber.

16. The apparatus of claim 15 , wherein the circular plate of the third portion is beneath the plate.

17. The apparatus of claim 15 , wherein the circular plate of the third portion is beneath the processing chamber.

18. The apparatus of claim 1 , wherein the alignment assembly comprises a vernier scale which provides feedback of axial adjustment.

19. The apparatus of claim 1 , further comprising:
a reaction chamber in which the plate is disposed; wherein the alignment assembly provides alignment at least one of within the reaction chamber and outside the reaction chamber.

20. The apparatus of claim 1 , wherein the alignment assembly selectively adjusts the orientation of the surface of the plate parallel to a surface of a showerhead.

Assignees

• Asm Ip Holding Bv
• Asm Inc

Inventors

• Haplin Michael

Classifications

• H10P72/50

  for positioning, orientation or alignment · CPC title

• H10P72/7626 Primary

  characterised by the construction of the shaft · CPC title

• F16D1/02

  for connecting two abutting shafts or the like · CPC title

• B23P19/04

  for assembling or disassembling parts · CPC title

• Y10T29/49826

  Assembling or joining · CPC title