Substrate storage container and method of manufacturing the same

Patent metadata

Field	Value
Publication number	US-11417554-B2
Application number	US-201816635278-A
Country	US
Kind code	B2
Filing date	Jul 10, 2018
Priority date	Aug 10, 2017
Publication date	Aug 16, 2022
Grant date	Aug 16, 2022

Abstract

There is provided a substrate storage container 1 capable of suppressing deformation of a functional member insert-molded and a method of manufacturing the container 1, and an device positioning member 4 as the functional member including: an attachment part 41 having a thick section 413 formed in thickness equal to a wall member of a container body 10 or a lid 20 and a thin section 410 decreasing in thickness as it approaches toward an outer edge from the thick section 413; and a body part 42 coupled to the attachment part 41, the device positioning member 4 being disposed on the container body 10 or the lid 20 so that a first surface 420 of the thick section 413 is flush with an inner surface of the wall member.

First claim

The invention claimed is:

1. A substrate storage container comprising:
a container body storing a substrate;
a lid closing an opening of the container body; and
a functional member formed integrally with the container body or the lid by insert-molding,
wherein the functional member comprises:
an attachment part having a thick section formed in thickness equal to a wall member of the container body or the lid and a thin section decreasing in thickness as the thin section approaches toward an outer edge from the thick section; and
a body part coupled to the attachment part,
the functional member being disposed on the container body or the lid so that a first surface of the thick section and an inner surface of the wall member are flush with each other to form a continuous surface.

2. The substrate storage container according to claim 1 , wherein the thin section is formed, so as to decrease in thickness as the thin section approaches toward the outer edge, in an acute shape having inclined surfaces.

3. The substrate storage container according to claim 1 , wherein the thin section is formed, so as to decrease in thickness as the thin section approaches toward the outer edge, in a thin-walled shape having: an inclined surface inclined by 20° or more with respect to a direction orthogonal to a thickness direction of the attachment part; and a top surface along the thickness direction.

4. The substrate storage container according to claim 1 , wherein the thin section is formed, so as to decrease in thickness as the thin section approaches toward the outer edge, as semicircular part protruding in a direction orthogonal to a thickness direction of the attachment part.

5. The substrate storage container according to claim 1 , wherein the thin section is provided on a circumference of the thick section via a step surface along a thickness direction of the attachment part at the circumference of the thick section.

6. The substrate storage container according to claim 5 , wherein the thin section has 2.00 mm or less of a protrusion amount from the step surface to a tip in a direction orthogonal to the thickness direction.

7. The substrate storage container according to claim 1 , wherein the functional member is formed of a material having a friction coefficient different from a material forming the container body or the lid.

8. The substrate storage container according to claim 1 , wherein the functional member is formed outside of the container body, when the opening faces front, as a device positioning portion to get in contact with a positioning means of a processing device or a transporting device.

9. The substrate storage container according to claim 8 , wherein the device positioning portion is formed in a manner that a first side thereof to be located on the container body or the lid is in a block shape as the attachment part, a second side is provided with a positioning groove to get in contact with the positioning means, and a plurality of ribs are disposed on a peripheral surface between the first side and the second side.

10. The substrate storage container according to claim 2 , wherein the thin section is provided on a circumference of the thick section via a step surface along a thickness direction of the attachment part at the circumference of the thick section.

11. The substrate storage container according to claim 3 , wherein the thin section is provided on a circumference of the thick section via a step surface along the thickness direction of the attachment part at the circumference of the thick section.

12. The substrate storage container according to claim 4 , wherein the thin section is provided on a circumference of the thick section via a step surface along the thickness direction of the attachment part at the circumference of the thick section.

13. The substrate storage container according to claim 2 , wherein the functional member is formed outside of the container body, when the opening faces front, as a device positioning portion to get in contact with a positioning means of a processing device or a transporting device.

14. The substrate storage container according to claim 3 , wherein the functional member is formed outside of the container body, when the opening faces front, as a device positioning portion to get in contact with a positioning means of a processing device or a transporting device.

15. The substrate storage container according to claim 4 , wherein the functional member is formed outside of the container body, when the opening faces front, as a device positioning portion to get in contact with a positioning means of a processing device or a transporting device.

16. The substrate storage container according to claim 5 , wherein the functional member is formed outside of the container body, when the opening faces front, as a device positioning portion to get in contact with a positioning means of a processing device or a transporting device.

17. The substrate storage container according to claim 7 , wherein the functional member is formed outside of the container body, when the opening faces front, as a device positioning portion to get in contact with a positioning means of a processing device or a transporting device.

18. The substrate storage container according to claim 2 , wherein the functional member is formed of a material having a friction coefficient different from a material forming the container body or the lid.

19. The substrate storage container according to claim 3 , wherein the functional member is formed of a material having a friction coefficient different from a material forming the container body or the lid.

Assignees

• Shinetsu Polymer Co

Inventors

• Toda Junya
• Mimura Hiroshi
• Watanabe Naoto

Classifications

• H10P72/17

  specially adapted for supporting large square shaped substrates · CPC title

• H10P72/1918 Primary

  characterised by coupling elements, kinematic members, handles or elements to be externally gripped · CPC title

• H10P72/1922

  characterised by the construction of the closed carrier · CPC title

• H10P72/1916

  characterised by sealing arrangements · CPC title

• H10P72/1914

  characterised by locking systems · CPC title