Perforated wavelength-division multiplexing filters

Patent metadata

Field	Value
Publication number	US-11415744-B1
Application number	US-202117170203-A
Country	US
Kind code	B1
Filing date	Feb 8, 2021
Priority date	Feb 8, 2021
Publication date	Aug 16, 2022
Grant date	Aug 16, 2022

Abstract

Structures for a wavelength-division multiplexing filter and methods of forming a structure for a wavelength-division multiplexing filter. The structure includes a first slab having a first perimeter, a first waveguide core coupled to the first slab, and a plurality of second waveguide cores coupled to the first slab. A second slab is positioned to overlap with the first slab. The second slab includes a second perimeter and openings that are distributed inside the second perimeter. The openings of the second slab penetrate through the second slab.

First claim

What is claimed is:

1. A structure for a wavelength-division multiplexing filter, the structure comprising:
a substrate;
a first slab having a first perimeter, the first slab being solid and imperforate inside the first perimeter;
a first dielectric layer between the first slab and the substrate;
a first waveguide core coupled to a first portion of the first slab;
a plurality of second waveguide cores coupled to respective second portions of the first slab;
a second slab that is positioned to overlap with the first slab, the second slab including a second perimeter that defines an outer boundary, the second slab including a plurality of openings distributed inside the second perimeter, and the plurality of openings of the second slab penetrating through the second slab; and
a second dielectric layer positioned between the first slab and the second slab.

2. The structure of claim 1 wherein the first slab comprises single-crystal silicon, and the second slab comprises silicon nitride.

3. The structure of claim 1 wherein the plurality of openings of the second slab occupy a percentage of a total area inside the second perimeter that is less than 30 percent.

4. The structure of claim 1 wherein the second slab comprises a metamaterial.

5. The structure of claim 1 wherein the second slab includes a plurality of segments defining solid portions that are distributed along with the plurality of openings inside the second perimeter.

6. The structure of claim 5 wherein the second perimeter surrounds a total area of the second slab that is occupied by the plurality of segments and the plurality of openings.

7. The structure of claim 6 wherein the plurality of segments comprise a first percentage of the total area, the plurality of openings comprise a second percentage of the total area that is not occupied by the plurality of segments, and the first percentage is greater than the second percentage.

8. The structure of claim 5 wherein the plurality of segments and the plurality of openings are rectangular.

9. The structure of claim 5 wherein the plurality of segments and the plurality of openings are positioned in an irregular pattern.

10. A structure for a wavelength-division multiplexing filter, the structure comprising:
a substrate;
a first slab having a first perimeter that defines an outer boundary, the first slab having a plurality of openings distributed inside the first perimeter, and the plurality of openings of the first slab penetrating through the first slab;
a first dielectric layer between the first slab and the substrate;
a first waveguide core coupled to a first portion of the first slab;
a plurality of second waveguide cores coupled to respective second portions of the first slab;
a second slab that is positioned to overlap with the first slab, the second slab including a second perimeter, and the second slab being solid and imperforate inside the second perimeter; and
a second dielectric layer positioned between the first slab and the second slab.

11. The structure of claim 10 wherein the plurality of openings of the first slab occupy a percentage of a total area inside the first perimeter that is less than or equal to 20 percent.

12. The structure of claim 11 wherein the first slab comprises single-crystal silicon, and the second slab comprises silicon nitride.

13. The structure of claim 10 wherein the first slab comprises a metamaterial.

14. The structure of claim 10 wherein the first slab includes a plurality of segments defining solid portions that are distributed along with the plurality of openings inside the first perimeter.

15. The structure of claim 14 wherein the first perimeter surrounds a total area of the second slab that is occupied by the plurality of segments and the plurality of openings.

16. The structure of claim 15 wherein the plurality of segments comprise a first percentage of the total area, the plurality of openings comprise a second percentage of the total area that is not occupied by the plurality of segments, and the first percentage is greater than the second percentage.

17. The structure of claim 14 wherein the plurality of segments and the plurality of openings are rectangular.

18. The structure of claim 14 wherein the plurality of segments and the plurality of openings are positioned in an irregular pattern.

19. A method of forming a structure for a wavelength-division multiplexing filter, the method comprising:
forming a first slab having a first perimeter, wherein the first slab is solid and imperforate, and a first dielectric layer is positioned between the first slab and a substrate;
forming a first waveguide core coupled to a first portion of the first slab;
forming a plurality of second waveguide cores coupled to respective second portions of the first slab;
forming a second slab that is positioned to overlap with the first slab and that includes a plurality of openings distributed inside a second perimeter of the second slab and penetrating through the second slab, wherein the second perimeter defines an outer boundary of the second slab; and
forming a second dielectric layer, wherein the second dielectric layer is positioned between the first slab and the second slab.

20. The method of claim 19 wherein the second slab is formed by a design-by-specification approach using inverse design software.

Assignees

• Globalfoundries Us Inc

Inventors

• Hammond Alec
• Bian Yusheng
• Rakowski Michal
• Lee Won Suk
• Chowdhury Asif J
• Augur Roderick A
• Aboketaf Abdelsalam

Classifications

• G02B2006/12109

  Filter · CPC title

• G02B2006/121

  Channel; buried or the like · CPC title

• G02B2006/12061

  Silicon · CPC title

• G02B6/2938

  for multiplexing or demultiplexing, i.e. combining or separating wavelengths, e.g. 1xN, NxM · CPC title

• G02B6/29346 Primary

  operating by wave or beam interference (interferometers for measuring G01B9/02) · CPC title