Slit valve pneumatic control

Patent metadata

Field	Value
Publication number	US-11415230-B2
Application number	US-202016836231-A
Country	US
Kind code	B2
Filing date	Mar 31, 2020
Priority date	Mar 31, 2020
Publication date	Aug 16, 2022
Grant date	Aug 16, 2022

Abstract

Disclosed are a slit valve apparatus and a method for controlling a slit valve. The slit valve apparatus includes a slit valve assembly and a servo-control system in communication with the slit valve assembly. The slit valve assembly includes at least one gate able to transition between an open position and a closed position, at least one pneumatic actuator, at least one proportional pneumatic valve including a plurality of controllers, and a continuous position sensor. The servo-control system includes a centralized controller that generates a control signal and adjusts the movement of the at least one gate based on the position trajectory for the gate, a linear position measurement of the gate from the continuous position sensor, and fluid pressure/flow measurements from the plurality of controllers.

First claim

We claim:

1. A slit valve apparatus for controlling a slit valve, the slit valve apparatus comprising:
a slit valve assembly, comprising:
a gate configured to transition between an open position and a closed position;
a pneumatic actuator comprising a moving member coupled to the gate, the moving member configured to exert a force on the gate;
a plurality of supply lines coupled to the pneumatic actuator;
a proportional pneumatic valve coupled to the plurality of supply lines, to a pressurized fluid supply, and to a vent, the proportional pneumatic valve comprising a plurality of controllers each configured to independently measure and control at least one of fluid pressure or fluid flow in a respective supply line of the plurality of supply lines; and
a continuous position sensor configured to continuously determine a linear position of the gate; and

a centralized controller in communication with the slit valve assembly and configured to:
receive a position trajectory for the gate;
receive a linear position measurement of the gate from the continuous position sensor;
receive at least one of fluid pressure or fluid flow measurement in the plurality of supply lines from the plurality of controllers;
generate control signals based on the position trajectory, the linear position measurement, and the at least one of fluid pressure or fluid flow measurement in each of the plurality of supply lines; and
transmit respective control signals to respective controllers of the plurality of controllers to adjust the at least one of fluid pressure or fluid flow in the plurality of supply lines to control the force exerted by the moving member, wherein, upon the gate being at a closed position, each control signal is configured to adjust the at least one of fluid pressure or fluid flow in the respective supply lines so as to increase the force exerted on the gate.

2. The slit valve apparatus of claim 1 , wherein the slit valve apparatus comprises a plurality of slit-valve assemblies.

3. The slit valve apparatus of claim 2 , wherein the centralized controller is in communication with the plurality of slit-valve assemblies.

4. The slit valve apparatus of claim 1 , wherein the at least one of fluid pressure or fluid flow to the pneumatic actuator is to control the force exerted by the moving member within the pneumatic actuator on the gate.

5. The slit valve apparatus of claim 4 , wherein, upon the gate approaching the open position or the closed position, each control signal is configured to adjust the at least one of fluid pressure or fluid flow in the respective supply lines so as to decelerate the gate and pause the gate upon reaching the open position or the closed position.

6. The slit valve apparatus of claim 4 , wherein, upon the gate initiating movement from the open position towards the closed position or from the closed position towards the open position, each control signal is configured to adjust the at least one of fluid pressure or fluid flow in the respective supply lines so as to accelerate the gate.

7. The slit valve apparatus of claim 1 , wherein one of:
a pressure differential between a first station proximate to a first side of the gate and a second station proximate to a second side opposite the first side of the gate is less than 300 Torr, and wherein the fluid pressure to the respective supply lines ranges from about 10 psig to about 45 psig; or
a pressure differential between a first station proximate to a first side of the gate and a second station proximate to a second side opposite the first side of the gate is greater than 300 Torr, and wherein the fluid pressure to the respective supply lines ranges from about 55 psig to about 80 psig.

8. The slit valve apparatus of claim 1 , wherein the continuous position sensor is configured to generate a continuous analog output or a continuous digital output indicative of the linear position of the gate throughout its motion from the open position to the closed position and vice versa.

9. The slit valve apparatus of claim 8 , wherein the continuous position sensor comprises at least one of a varistor, an inductive sensor, an encoder, a light based system, or a capacitive based system.

10. The slit valve apparatus of claim 1 , wherein the proportional pneumatic valve comprises an analog control configured to vary fluid flow between full flow and no flow.

11. The slit valve apparatus of claim 10 , wherein the proportional pneumatic valve comprises a poppet valve or a proportional spool valve.

12. A method of controlling a slit valve apparatus, comprising:
receiving, by a centralized controller, a position trajectory for a gate of the slit valve apparatus;
receiving, by the centralized controller, a linear position measurement from a continuous position sensor that continuously determines a linear position of the gate;
receiving, by the centralized controller, at least one of fluid pressure or a fluid flow measurement from each of a plurality of controllers of a proportional pneumatic valve that independently measures at least one of fluid pressure or fluid flow in a respective supply line of a plurality of supply lines coupled to a pneumatic actuator;
generating, by the centralized controller, control signals based on the position trajectory, the linear position measurement, and the at least one of fluid pressure or fluid flow measurement in each of the respective supply lines;
transmitting, by the centralized controller, each control signal to respective controllers of the plurality of controllers to adjust the at least one of fluid pressure or fluid flow in the respective supply lines to control a force exerted by a moving member, of the pneumatic actuator, on the gate; and
in response to the gate reaching a closed position, causing, by the centralized controller, each control signal to adjust the at least one of fluid pressure or fluid flow in the respective supply lines so as to increase the force exerted on the gate.

13. The method of claim 12 , wherein, upon the gate approaching an end position, causing, by the centralized controller, the proportional pneumatic valve and the plurality of controllers to adjust the at least one of fluid pressure or fluid flow in the respective supply lines so as to decelerate the gate and pause the gate upon reaching the end position.

14. The method of claim 13 , wherein the end position is an open position or a closed position.

15. The method of claim 12 , wherein, upon the gate initiating movement from an open position towards a closed position or from a closed position towards an open position, causing, by the centralized controller, the plurality of controllers of the proportional pneumatic valve to adjust the at least one of fluid pressure or fluid flow in the respective supply lines to the pneumatic actuator so as to accelerate the gate.

16. A method comprising:
operating a servo-control system to exert force on a gate of a slit valve assembly, the operating comprising:
actuating a proportional pneumatic valve to permit fluid to flow through a plurality of supply lines coupled to a pneumatic actuator of the slit valve assembly;
measuring at least one of fluid pressure or fluid flow in the plurality of supply lines;
measuring a linear position of the gate with a continuous position sensor;
in response to the linear position measurement and the at least one of fluid pressure or fluid flow measurement in the plurality of supply lines, controlling the proportional pneumatic valve adjust the at least one of fluid pressure or fluid flow in the plurality of supply lines;
exerting force on

Assignees

• Applied Materials Inc

Inventors

• Wirth Paul Z
• Amir Ofer
• Kuchar Michael C

Classifications

• H10P72/3406

  involving removal of lid, door or cover · CPC title

• H10P72/0402

  Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence) · CPC title

• H10P72/33

  into and out of processing chamber · CPC title

• H10P72/0441 Primary

  Apparatus for sealing, encapsulating, glassing, decapsulating or the like · CPC title

• F16K37/0091

  by measuring fluid parameters · CPC title