Air knife inlet and exhaust for additive manufacturing

Patent metadata

Field	Value
Publication number	US-11413817-B2
Application number	US-201916684524-A
Country	US
Kind code	B2
Filing date	Nov 14, 2019
Priority date	Sep 26, 2019
Publication date	Aug 16, 2022
Grant date	Aug 16, 2022

Abstract

An additive manufacturing apparatus includes a platform, a dispenser configured to deliver a plurality of successive layers of feed material onto the platform, at least one energy source to selectively fuse feed material in a layer on the platform, and an air knife assembly. The air knife assembly includes an inlet unit to deliver gas over the platform and an exhaust unit to receive gas from over the platform. The inlet unit includes a multi-chamber plenum, a gas inlet, and a gas distribution module. The multi-chamber plenum has a plurality of vertically stacked chambers that are fluidically connected, with a first chamber of the plurality of vertically stacked chambers positioned at a higher elevation than a collection chamber of the plurality of vertically stacked chambers.

First claim

What is claimed is:

1. An additive manufacturing apparatus comprising:
a platform;
a dispenser configured to deliver a plurality of successive layers of feed material onto the platform;
at least one energy source configured to selectively fuse the plurality of successive layers of feed material delivered onto the platform; and
an air knife assembly including an inlet unit configured to deliver gas over the platform and an exhaust system configured to receive gas from over the platform, the inlet unit and the exhaust system separated by a volume, the inlet unit including:
a multi-chamber plenum, the multi-chamber plenum comprising a plurality of vertically stacked chambers fluidically connected, a first chamber of the plurality of vertically stacked chambers positioned at a higher elevation than a collection chamber of the plurality of vertically stacked chambers, wherein the collection chamber includes an inner surface having an aperture and an outer surface that is farther from the volume than the inner surface and that is at least partially curved and forms a bulged chamber protruding away from the inner surface;
a gas inlet configured to supply gas into the first chamber of the plurality of vertically stacked chambers, and wherein the plurality of vertically stacked chambers are configured to guide the gas from the gas inlet to the collection chamber, and
a gas distribution module fluidically coupled to the aperture in the inner surface of the collection chamber, the gas distribution module comprising at least one perforated sheet positioned for the gas to flow out of the collection chamber through perforations of the at least one perforated sheet and over the platform.

2. The apparatus of claim 1 , wherein the exhaust system includes a plenum having a port connected to a gas return conduit, and a gas collector that is open at a front end to receive gas from over the platform and has a concave plate at a back end of the gas collector, and wherein an aperture formed at a back of the concave plate between the gas collector and the plenum provides a constricted flow path for gas from the gas collector to the plenum.

3. The apparatus of claim 1 , wherein the at least one perforated sheet of the gas distribution module comprises three perforated sheets including a first perforated sheet defining first apertures, a second perforated sheet defining second apertures smaller than the first apertures, and a third perforated sheet defining third apertures smaller than the second apertures, wherein the second perforated sheet is disposed between the first perforated sheet and the third perforated sheet with the first perforated sheet disposed upstream of the third perforated sheet.

4. The apparatus of claim 1 , wherein each perforated sheet of the at least one perforated sheet comprises a length equal to a length of the collection chamber.

5. The apparatus of claim 1 , wherein the collection chamber comprises a longitudinally horizontal wall, the longitudinally horizontal wall defining a plurality of nozzles with fluid outlets facing the gas distribution module.

6. The apparatus of claim 5 , wherein the at least one perforated sheet of the gas distribution module comprises a first perforated sheet, and wherein the gas distribution module further comprises, between the fluid outlets of the plurality of nozzles and the first perforated sheet, a plurality of plenums separated by baffles, each respective plenum of the plurality of plenums configured to receive gas from a respective nozzle of the plurality of nozzles to increase a pressure of the gas in the respective plenum as gas leaves the respective plenum through a respective portion of the first perforated sheet.

7. The apparatus of claim 1 , wherein the plurality of vertically stacked chambers are fluidically connected by a plurality of apertures positioned to form a circuitous flow path for the gas between the first chamber and the collection chamber.

8. The apparatus of claim 7 , wherein the apertures span a longitudinal length of the plurality of vertically stacked chambers.

9. The apparatus of claim 7 , wherein the plurality of vertically stacked chambers comprises an S-shape cross section, and wherein each chamber of the plurality of vertically stacked chambers comprises a longitudinally horizontal chamber.

10. The apparatus of claim 1 , wherein the gas distribution module is configured to discharge the gas in a laminar flow parallel to a top surface of the platform.

11. The apparatus of claim 1 , wherein the collection chamber further includes a flat surface that extends tangent to a curved portion of the outer surface, and wherein the flat surface and a horizontal plane intersecting the flat surface define an acute angle.

12. The apparatus of claim 5 , wherein the plurality of nozzles are configured to converge in a direction of the gas flow and distribute the gas from the collection chamber to the gas distribution module.

13. The apparatus of claim 12 , wherein the plurality of nozzles are evenly distributed along a width of the longitudinally horizontal wall.

14. The apparatus of claim 13 , wherein the width of the longitudinal horizontal wall is 1000 millimeters.

15. The apparatus of claim 1 , wherein the inlet unit has a height of 170 millimeters and a thickness of 120 millimeters.

16. The apparatus of claim 6 , wherein the at least one perforated sheet of the gas distribution module comprises the first perforated sheet and a second perforated sheet positioned such that gas from the plurality of plenums flows into a common volume between the first perforated sheet and the second perforated sheet.

17. The apparatus of claim 7 , wherein the plurality of apertures comprises three apertures, wherein the three apertures are positioned to form the circuitous flow path for the gas between the first chamber and the collection chamber.

18. The apparatus of claim 17 , wherein one aperture of the three apertures that is configured to fluidically connect the collection chamber with another chamber is formed at least by the outer surface or the inner surface of the collection chamber.

Assignees

• Applied Materials Inc

Inventors

• Patel Dakshalkumar
• Chaturvedi Girish Kumar
• Upadhye Bahubali S
• Acharya Sumedh
• Chidambaram Mahendran
• Bagul Nilesh Chimanrao

Classifications

• B33Y40/00

  Auxiliary operations or equipment, e.g. for material handling · CPC title

• B22F10/28

  Powder bed fusion, e.g. selective laser melting [SLM] or electron beam melting [EBM] · CPC title

• B29C64/35

  Cleaning · CPC title

• B22F12/222

  for motion along a direction orthogonal to the plane of a layer · CPC title

• B22F12/63

  Rollers · CPC title