Multi-turn drive assembly and systems and methods of use thereof

Patent metadata

Field	Value
Publication number	US-11413744-B2
Application number	US-202016808015-A
Country	US
Kind code	B2
Filing date	Mar 3, 2020
Priority date	Mar 3, 2020
Publication date	Aug 16, 2022
Grant date	Aug 16, 2022

Abstract

Disclosed herein are multi-turn drive assemblies, systems and methods of use thereof. The multi-turn drive assemblies enable a robot link member to have a maximum rotation of at least 360 degrees about an axis. The multi-turn drive assemblies can be incorporated into a robot arm for enabling 360 degrees rotation of one or more link members about an axis. The robot arm may be located in a transfer chamber of an electronic device processing system. Also disclosed are methods of controlling the multi-turn drive assemblies and related robots.

First claim

What is claimed is:

1. A robot, comprising:
an arm rotatable about a shoulder axis;
a forearm rotatable relative to the arm about a forearm axis at a position offset from the shoulder axis, wherein the forearm has a joint rotation of at least 360 degrees about the forearm axis; and
a forearm drive assembly for rotating the forearm about the forearm axis, the forearm drive assembly comprising:
a forearm driving member;
a forearm driven member attached to the forearm, wherein the forearm driven member is attached to the forearm driving member by a torsion spring;
a forearm transmission element comprising:
a first band, wherein a first end of the first band is affixed to the forearm driving member and a second end of the first band is affixed to the forearm driven member, and wherein the first band wraps at least two times around the forearm driving member when the forearm is in a first forearm position; and
a second band, wherein a first end of the second band is affixed to the forearm driving member and a second end of the second band is affixed to the forearm driven member, wherein the second band wraps at least two times around the forearm driven member when the forearm is in the first position,
wherein the first band is wrapped around the forearm driving member in a first direction and the second band is wrapped around the forearm driving member in an opposite second direction.

2. The robot of claim 1 , wherein the first band wraps at least two times around the forearm driven member when the forearm is in a second forearm position.

3. The robot of claim 1 , wherein the forearm drive assembly further comprises:
a first tensioner element, wherein the first band is affixed to the forearm driving member via the first tensioner element; and
a second tensioner element, wherein the first band is affixed to the forearm driven member via the second tensioner element;
wherein the first tensioner element and the second tensioner element are jointly operable to control tension in the first band and to control a phase of the forearm driven member to the forearm driving member.

4. The robot of claim 1 , wherein the forearm drive assembly further comprises:
a third tensioner element, wherein the second band is affixed to the forearm driving member via the third tensioner element; and
a fourth tensioner element, wherein the second band is affixed to the forearm driven member via the fourth tensioner element;
wherein the third tensioner element and the fourth tensioner element are jointly operable to control tension in the second band and to control a phase of the forearm driven member to the forearm driving member.

5. The robot of claim 1 , wherein the first band wraps about 2 to 10 times around the forearm driving member when the forearm is in the first forearm position, and wherein the joint rotation about the forearm axis is at least 720 degrees.

6. The robot of claim 1 , wherein the first band comprises a metal.

7. The robot of claim 1 , wherein at least one of a shape or a radius of the forearm transmission element on the forearm driving member changes with rotations of the forearm about the forearm axis.

8. The robot of claim 7 , wherein:
rotations of the forearm in a first direction causes the first band to wind around the forearm driving member and further causes the radius of the forearm driving member to increase; and
rotations of the forearm in an opposite second direction causes the first band to unwind from the forearm driving member and further causes the radius of the forearm driving member to decrease.

9. The robot of claim 1 , further comprising:
a first end effector attached to the forearm, the first end effector to hold a first substrate;
optionally a second arm rotatable about the shoulder axis;
a second forearm rotatable relative to the arm or the second arm about a second forearm axis at a second position offset from the shoulder axis;
a second forearm drive assembly that drives the second forearm; and
a second end effector attached to the second forearm, the second end effector to hold a second substrate;
wherein the joint rotation of at least 360 degrees about the forearm axis for the first forearm enables the first substrate to be removed from a chamber and the second substrate to be inserted into the chamber while avoiding a substrate over substrate condition between the first substrate and the second substrate.

10. The robot of claim 1 , wherein the forearm drive assembly comprises a non-linear transmission ratio between the forearm driven member and the forearm driving member, wherein the non-linear transmission ratio is based on a first number of wrappings of the first band about the forearm driving member and a second number of wrappings of the first band about the forearm driven member.

11. The robot of claim 10 , wherein the forearm drive assembly further comprises a forearm motor and a forearm shaft attached to the forearm motor and to the forearm driving member, the robot further comprising:
a controller configured to drive the forearm motor, the controller comprising a control algorithm that mathematically defines the non-linear transmission ratio.

12. The robot of claim 1 , further comprising a forearm transition element in the forearm driving member, wherein the forearm transition element provides a transition between a first wrapped configuration of the forearm transmission element wrapped only about the forearm driving member and a second wrapped configuration of the forearm transmission element wrapped around an underlying wrapping of the forearm transmission element on the forearm driving member, wherein the transition lacks a stress concentration.

13. The robot of claim 1 , wherein the forearm drive assembly further comprises a forearm motor and a forearm shaft attached to the forearm motor and to the forearm driving member.

14. A robot, comprising:
an arm rotatable about a shoulder axis;
a forearm rotatable relative to the arm about a forearm axis at a position offset from the shoulder axis;
a first wrist member rotatable relative to the forearm about a wrist axis at a position offset from the shoulder axis, wherein the first wrist member has a joint rotation of at least 360 degrees about the wrist axis; and
a first wrist drive assembly for rotating the first wrist member about the wrist axis, the first wrist drive assembly comprising:
a first wrist driving member;
a first wrist driven member attached to the forearm, wherein the first wrist driven member is attached to the first wrist driving member by a torsion spring; and
a first wrist transmission element, comprising:
a first band, wherein a first end of the first band is affixed to the first wrist driving member and a second end of the first band is affixed to the first wrist driven member, and wherein the first band wraps at least two times around the first wrist driving member when the first wrist member is in a first wrist position; and
a second band, wherein a first end of the second band is affixed to the first wrist driving member and a second end of the second band is affixed to the first wrist driven member, wherein the second band wraps at least two times around the first wrist driven member when the first wrist member is in the first position,
wherein the first band is wrapped around the first wrist driving member in a first direction and the second band is wrapped around the first wrist driving member in an opposite second direction.

15. The robot of claim 14 , further comprising:
a second wrist member rotatable relative to the forearm about the wrist axis, wherein the second

Assignees

• Applied Materials Inc

Inventors

• Hudgens Jeff
• Cox Damon K
• Thanu Rajkumar

Classifications

• H10P72/7602

  the wafers being placed on a robot blade or gripped by a gripper for conveyance · CPC title

• H10P72/3302 Primary

  Mechanical parts of transfer devices · CPC title

• H10P72/3311

  Horizontal transfer of a batch of workpieces · CPC title

• B25J18/00

  Arms · CPC title

• B25J9/1045 Primary

  comprising tensioning means · CPC title