Piezoelectric resonator device

Patent metadata

Field	Value
Publication number	US-11411550-B2
Application number	US-201917289261-A
Country	US
Kind code	B2
Filing date	Oct 29, 2019
Priority date	Nov 26, 2018
Publication date	Aug 9, 2022
Grant date	Aug 9, 2022

Abstract

In a crystal oscillator accordance to an embodiment, a crystal resonator plate is bonded to, via laminated bonding patterns, a first sealing member covering a first excitation electrode of the crystal resonator plate; and a second sealing member covering a second excitation electrode of the crystal resonator plate. An internal space is formed, which hermetically seals a vibrating part including the first and second excitation electrodes of the crystal resonator plate. The laminated bonding patterns include a laminated sealing pattern annularly formed to surround the vibrating part in plan view so as to hermetically seal the internal space, and a laminated conductive pattern establishing conduction between wiring and electrodes. The laminated conductive pattern is disposed within a closed space surrounded by the laminated sealing pattern. To the laminated sealing pattern, GND potential is applied when the crystal oscillator operates.

First claim

The invention claimed is:

1. A piezoelectric resonator device, comprising:
a piezoelectric resonator plate including a first excitation electrode formed on a first main surface of a substrate, and a second excitation electrode formed on a second main surface of the substrate, the second excitation electrode making a pair with the first excitation electrode;
a first sealing member covering the first excitation electrode of the piezoelectric resonator plate;
a second sealing member covering the second excitation electrode of the piezoelectric resonator plate; and
an internal space formed by bonding the first sealing member to the piezoelectric resonator plate and by bonding the second sealing member to the piezoelectric resonator plate, the internal space hermetically sealing a vibrating part including the first excitation electrode and the second excitation electrode of the piezoelectric resonator plate, wherein
the first sealing member and the second sealing member are respectively bonded to the piezoelectric resonator plate, both via laminated bonding patterns each constituted of a laminated film including at least a base film that is made of Ti and a bonding film that is made of Au and is formed on the base film,
each of the laminated bonding patterns includes a laminated sealing pattern that is annularly formed and surrounds the vibrating part in plan view so as to hermetically seal the internal space, and a laminated conductive pattern that establishes conduction between wiring and electrodes,
the laminated conductive pattern is disposed within a closed space inside the laminated sealing pattern, the closed space being provided outside of the internal space surrounded by the laminated sealing pattern, and
a GND potential is applied to the laminated sealing pattern when the piezoelectric resonator device operates.

2. The piezoelectric resonator device according to claim 1 , wherein
the laminated sealing pattern is connected to the laminated conductive pattern to which the GND potential is applied when the piezoelectric resonator device operates.

3. The piezoelectric resonator device according to claim 1 , wherein
the laminated sealing pattern also serves as the laminated conductive pattern to which the GND potential is applied when the piezoelectric resonator device operates.

Assignees

• Daishinku Corp

Inventors

• Ishino Satoru
• Kojo Takuya

Classifications

• H03H9/19 Primary

  consisting of quartz · CPC title

• H03H9/172

  Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume · CPC title

• H03H9/131

  consisting of a multilayered structure · CPC title

• H03B5/32

  being a piezoelectric resonator (selection of piezoelectric material H10N30/00) · CPC title

• H03H9/0547

  consisting of a vertical arrangement (H03H9/0566 takes precedence) · CPC title