Backside binary grated lens coupled to front side waveguide

Patent metadata

Field	Value
Publication number	US-11409046-B2
Application number	US-202016739418-A
Country	US
Kind code	B2
Filing date	Jan 10, 2020
Priority date	Jun 30, 2015
Publication date	Aug 9, 2022
Grant date	Aug 9, 2022

Abstract

A wafer structure includes a diffractive lens disposed on a backside of a wafer and coupled to a front side waveguide, the diffractive lens being configured to receive light and focus the light to the front side waveguide.

First claim

What is claimed:

1. A method comprising:
forming a waveguide to a front side of a semiconductor wafer;
forming an insulator layer on a backside of the semiconductor wafer;
etching a plurality of trenches through the insulator layer; and
forming segments by filling the plurality of trenches with material, wherein each of the segments extends from a first surface of the insulator layer to a second surface of the insulator layer,
wherein the insulator layer and the segments constitute a diffractive lens configured to receive light and focus the light to the waveguide connected to the front side of the semiconductor wafer.

2. The method of claim 1 , wherein the material has a substantially different index of refraction than the insulator layer.

3. The method of claim 1 , wherein the plurality of trenches are filled with a silicon nitride material.

4. The method of claim 1 , further comprising providing a coupler including a polysilicon material and connecting the waveguide to the semiconductor wafer,
wherein the coupler receives light redirected by the insulator layer and the material filled in the trenches.

5. The method of claim 4 , wherein the coupler includes a polysilicon material.

6. The method of claim 1 , wherein the light is received by the lens from an optical fiber.

7. The method of claim 1 , wherein the diffractive lens is a binary diffractive lens.

8. The method of claim 1 , wherein the trenches that each extend from the first surface of the insulator layer to the second surface of the insulator layer, the second surface of the insulator layer contacting the backside of the semiconductor wafer.

9. The method of claim 8 , wherein each of the segments comprises an insulator material with a surface that is co-planar with the first surface of the insulator layer.

10. The method of claim 1 , wherein each of the segments comprises an insulator material with a surface that is co-planar with the first surface of the insulator layer.

11. The method of claim 1 , wherein the diffractive lens is formed on a backside of the semiconductor wafer and coupled to the frontside of the semiconductor wafer.

12. The method of claim 11 , wherein the trenches each extend from the first surface of the insulator layer to the second surface of the insulator layer, and the second surface of the insulator layer contacting the backside of the semiconductor wafer.

13. The method of claim 12 , wherein the material of the segments comprises insulator material with a surface that is co-planar with the first surface of the insulator layer.

14. The method of claim 13 , wherein the insulator material is different than the insulator layer.

15. The method of claim 14 , further comprising planarizing the insulator material so that the insulator material is co-planar with the first surface of the insulator layer.

16. The method of claim 15 , wherein the diffractive lens comprises a binary diffractive grated lens having a diffraction grating that redirects light to the frontside of the semiconductor wafer.

17. The method of claim 15 , further comprising forming a coupler on the frontside of the semiconductor wafer, the forming of the coupler comprising forming polysilicon material covered with an oxide material over the semiconductor wafer, the coupler being coupled to the waveguide and extending on a semiconductor on insulator layer formed on the frontside of the semiconductor wafer.

18. The method of claim 1 , wherein a width of each of the segments and a distance between each of the segments vary across the diffractive lens.

19. The method of claim 18 , wherein the segments are formed as concentric circles when viewed from a top.

Assignees

• IBM

Inventors

• Amoah Yoba
• Brown Brennan J
• Ellis-Monaghan John J
• Kreider Ashleigh R

Classifications

• G02B6/30

  for use between fibre and thin-film device · CPC title

• G02B6/32 Primary

  having lens focusing means {positioned between opposed fibre ends (with lens being an integral part of the single fibre end G02B6/262)} · CPC title

• G02B6/29304

  operating by diffraction, e.g. grating (G02B6/29301 takes precedence; spectrometers using gratings G01J3/18) · CPC title

• G02B6/34

  utilising prism or grating {(G02B6/293 takes precedence)} · CPC title

• G02B6/305

  and having an integrated mode-size expanding section, e.g. tapered waveguide · CPC title