Sensor for determining concentration of gas
US-9636058-B2 · May 2, 2017 · US
US11406299B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11406299-B2 |
| Application number | US-201916282543-A |
| Country | US |
| Kind code | B2 |
| Filing date | Feb 22, 2019 |
| Priority date | Feb 22, 2019 |
| Publication date | Aug 9, 2022 |
| Grant date | Aug 9, 2022 |
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A sensor comprises a microfabricated chip having a surface with one or more cavities formed thereon, the cavities including sensing components, one or more lids, each covering said surface so as to close at least one of said cavities, the lids contacting rims that delimit said cavities on said surface. Electric circuit portions join, each, a respective one of the lids, to allow the lids to be partly dissolved, electrochemically, responsive to being exposed to an electrochemical solution. In addition, masking material portions cover peripheral regions of the lids at the level of the rims, so as to seal the lids and shield such peripheral regions from said electrochemical solution, in operation. Related apparatuses and sensing methods may be provided.
Opening claim text (preview).
What is claimed is: 1. A sensor comprising: a microfabricated chip having a surface with one or more cavities formed thereon, the cavities including sensing components; one or more lids, each covering said surface so as to close at least one of said cavities, the lids contacting rims that delimit said cavities on said surface; electric circuit portions, each joining a respective one of the lids, configured to allow the lids to be at least partly dissolved, electrochemically, responsive to being exposed to an electrochemical solution; and masking material portions covering peripheral regions of the lids at the level of the rims, so the masking material portions are configured to seal the lids and shield such peripheral regions from said electrochemical solution, in operation. 2. The sensor according to claim 1 , wherein said one or more lids include two neighboring lids, which close respective ones of said cavities and contact, each, an intermediate portion of the surface, which forms rims delimiting said respective ones of said cavities, and said masking material portions covers peripheral regions of the two neighboring lids at the level of this intermediate portion of the surface. 3. The sensor according to claim 1 , wherein the sensing components comprise, each, an electrode arranged in a respective one of the cavities, and receptors anchored to said electrode, and said electric circuit portions are first electric circuit portions, the sensor including second electric circuit portions connected to said electrode. 4. The sensor according to claim 3 , wherein said electrode is patterned on a wall of the respective cavity. 5. The sensor according to claim 3 , wherein said electrode is a first electrode, and the cavities comprise, each, a second electrode arranged therein, wherein said second electrode is connected by the second electric circuit portions. 6. The sensor according to claim 3 , wherein said masking material portions at least partly mask said second electric circuit portions. 7. The sensor according to claim 3 , wherein each of the lids has a standard redox potential between −0.8 V and +1.6 V with respect to a standard hydrogen electrode. 8. The sensor according to claim 7 , wherein each of the lids includes a metallic layer that essentially comprises one or more of the following metals: gold, silver, aluminum, and nickel. 9. The sensor according to claim 8 , wherein each of the lids further comprises a reinforcement layer of material supporting said metallic layer, the latter arranged on top of the reinforcement layer, which is structured so as to allow a liquid to penetrate the cavities upon dissolution of the metallic layer. 10. The sensor according to claim 1 , wherein an average diameter of an aperture of the cavities at the level of said surface is less than 1.0 mm. 11. The sensor according to claim 1 , wherein an average thickness of said lids is between 5 and 200 micrometers. 12. A sensing apparatus, comprising: a microfabricated chip, wherein the chip includes: a surface with one or more cavities formed thereon, the cavities including sensing components; one or more lids, each covering said surface so as to close at least one of said cavities, the lids contacting rims that delimit said cavities on said surface; electric circuit portions, each joining a respective one of the lids; and masking material portions covering peripheral regions of the lids at the level of the rims so the masking material portions are configured to seal the lids and shield said peripheral regions from said electrochemical solution, in operation; and an electrical control, connected to said electric circuit portions, and configured to allow the lids to be at least partly dissolved, electrochemically, responsive to being exposed to an electrochemical solution. 13. The sensing apparatus according to claim 12 , wherein the cavities comprise first electrodes respectively arranged therein, wherein receptors are anchored to said first electrodes, the apparatus further comprises one or more second electrodes, said electric circuit portions are first electric circuit portions, the chip comprising second electric circuit portions connected to said first electrodes and second electrodes, and the apparatus further comprises a readout device, the latter configured to read measurement signals obtained from the first and second electrodes via the electric circuit portions, in operation. 14. The sensing apparatus according to claim 13 , wherein the apparatus further comprises an auxiliary electrode, and said electrical control means are further connected to said auxiliary electrode, the electrical control means configured to apply a voltage bias between a selected one of said lids and said auxiliary electrode, to allow the lids to be partly dissolved. 15. A sensing method comprising: providing a sensor, the latter including: a microfabricated chip having a surface with one or more cavities formed thereon, the cavities including sensing components; one or more lids, each covering said surface so as to close at least one of said cavities, the lids contacting rims that delimit said cavities on said surface; electric circuit portions, each joining a respective one of the lids; and masking material portions covering peripheral regions of the lids at the level of the rims; exposing the surface of the chip to an electrochemical solution; energizing the electric circuit portions connecting one of the lids to electrochemically dissolve an inner region thereof, its peripheral regions being shielded from said electrochemical solution by one or more of the masking portions, in order to expose one or more of the sensing components to an external medium; and sensing said external medium via said one or more of the sensing components exposed. 16. The method according to claim 15 , wherein energizing said electric circuit portions causes said sensing components to be exposed to analytes contained in said electrochemical solution upon, whereby sensing said external medium comprises sensing said analytes. 17. The method according to claim 16 , wherein the cavities of the sensor provided comprise first electrodes respectively arranged therein, wherein receptors for said analytes are anchored to said first electrodes, the sensor comprising one or more second electrodes arranged so as to come in contact with said external medium, in operation, and sensing said external medium comprises sensing analytes of said external medium via a measurement signal obtained thanks to: the first electrode arranged in one of the cavities corresponding to said one of the lids; and one or more of the second electrodes. 18. The method according to claim 17 , wherein the method further comprises: selecting another one of the lids, based on an outcome of the sensing of said analytes; energizing the electric circuit portions connecting the selected lid to electrochemically dissolve an inner region thereof as the surface of the chip is exposed to an electrochemical solution, whereas peripheral regions of the selected lid are shielded from the electrochemical solution by one or more of the masking portions, in order to expose receptors of one or more cavities corresponding to the selected lid to analytes in an electrochemical solution; and sensing analytes in said another electrochemical solution via a measurement signal obtained thanks to: one of the first electrodes that is arranged in a cavity corresponding to the selected lid; and one or more of
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