Solar energy converter and related methods

Patent metadata

Field	Value
Publication number	US-11402132-B2
Application number	US-202017012444-A
Country	US
Kind code	B2
Filing date	Sep 4, 2020
Priority date	Jun 30, 2016
Publication date	Aug 2, 2022
Grant date	Aug 2, 2022

Abstract

A solar thermal energy device is provided. Also provided is a method of making a solar thermal energy device.

First claim

We claim:

1. A method of making a solar thermal absorbing device, the method comprising:
forming a template by interference lithography and etching, the template comprising a substrate having a major surface comprising a plurality of indentations, each of the plurality of indentations having an opening at the major surface, wherein the openings are spaced less than 200 nm apart, and the opening of each of the plurality of indentations having a side length or a diameter ranging from 100 nm to 1000 nm;
depositing a metal layer onto the template, wherein the metal is deposited in an amount to fill in the indentations of the template and to produce a contiguous metal layer having a thickness of from 1 μM to 100 μM over at least a portion of the major surface of the template comprising the indentations;
releasing the deposited metal layer from the template to produce a metallic substrate having a major surface, comprising a plurality of protuberances on the major surface, each of the plurality of protuberance having a base having an edge or a diameter, and an apex, and tapering from the base to the apex, wherein the distance between the base of adjacent protuberances is less than 200 nm, and the diameter or an edge of the base ranges from 100 nm to 1000 nm; and
depositing an antireflective coating over at least a portion of the metallic substrate including the plurality of protuberances to form the solar thermal absorbing device.

2. The method of claim 1 , wherein the template is a silicon substrate having a major surface comprising a silica coating, and the indentations are pyramidal indentations with a square or rectangular opening at the major surface.

3. The method of claim 1 , wherein the antireflective coating comprises a metal oxide or a silicon nitride.

4. The method of claim 1 , wherein the antireflective coating has a thickness of from 50 nm to 1 μm.

5. The method of claim 1 , wherein the antireflective coating comprises an oxide of aluminum, hafnium, titanium, or zirconium.

6. The method of claim 1 , wherein the antireflective coating comprises an aluminum oxide.

7. The method of claim 1 , wherein the metallic substrate is nickel, copper, silver, gold, or an alloy thereof.

8. The method of claim 1 , wherein the protuberances are pyramidal, conical, frusto-pyramidal, or frusto-conical.

9. The method of claim 8 , wherein the protuberances are pyramidal, having a square or rectangular base and wherein a plane containing a side of the protuberance is at an angle of 54.7 degrees from the plane of the major surface of the contiguous portion of the metallic substrate from which the protuberance extends.

10. The method of claim 8 , wherein the protuberances are frusto-conical or frusto-pyramidal.

11. The method of claim 1 , wherein the distance between the base of adjacent protuberances is less than 50 nm.

12. The method of claim 1 , wherein the protuberances are uniformly-spaced on the substrate.

13. The method of claim 1 , wherein the antireflective coating has a thickness of from 65 nm to 80 nm.

Assignees

• Univ Carnegie Mellon

Inventors

• Shen Sheng
• Li Pengfei
• Liu Baoan

Classifications

• H10F77/315

  the coatings being antireflective or having enhancing optical properties · CPC title

• H10F71/00

  Manufacture or treatment of devices covered by this subclass (patterning processes to connect thin photovoltaic cells in integrated devices, or assemblies of multiple devices, having photovoltaic cells H10F19/33; manufacture or treatment of encapsulations or containers for integrated devices, or assemblies of multiple devices, having photovoltaic cells H10F19/80; manufacture or treatment of integrated devices, or assemblies of multiple devices, comprising at least one element in which radiation controls the flow of current H10F39/00) · CPC title

• F24S70/225 Primary

  for spectrally selective absorption · CPC title

• F24S70/16

  made of ceramic; made of concrete; made of natural stone · CPC title

• F24S70/25

  Coatings made of metallic material · CPC title