Fluid synthesis system

Patent metadata

Field	Value
Publication number	US-11401450-B2
Application number	US-201916518201-A
Country	US
Kind code	B2
Filing date	Jul 22, 2019
Priority date	Feb 23, 2017
Publication date	Aug 2, 2022
Grant date	Aug 2, 2022

Abstract

Fluid synthesis system and corresponding method for synthesis of slurry containing abrasive particles. The system and method are configured to substantially segregate the abrasive particles passing through the filter, used at the filtering step of the process, from the sticky components that clog such filter prior to the filtering step of the synthesis process to achieve a sustaining filtration of the slurry as a result of which the filter remains substantially unclogged for the whole predetermined duration of the filtering process.

First claim

What is claimed is:

1. A method for manufacturing abrasive slurry with a slurry synthesis system, the method comprising:
in a dispersing portion of said system, forming a first suspension of material, the first suspension containing abrasive solid particles in a fluid medium;
in a segregating portion of said system, segregating viscous components contained in said first suspension from said first suspension to form a second suspension of the abrasive solid particles in said fluid medium; and
in a filtration portion of said system, filtering the second suspension by passing the second suspension through at least one filter to remove particles with dimensions exceeding threshold dimensions.

2. A method according to claim 1 , wherein said segregating includes forming the second suspension in which a relative portion of the abrasive solid particles exceeds that in the first suspension.

3. A method according to claim 1 , wherein the segregating includes forming sediments of said viscous components on a surface of a container containing the first suspension, said surface being inclined with respect to a surface formed by the first suspension in the container.

4. A method according to claim 3 , wherein the segregating includes forming sediments of said viscous components on said surface of the container while leaving abrasive solid particles suspended in the fluid medium above the sediments.

5. A method according to claim 3 , wherein the forming includes forming said sediments on said bottom of the container while the first suspension is flowing through the container.

6. A method according to claim 5 , further comprising removing the sediments from the bottom of the container while the first suspension continues to flow through the container.

7. A method according to claim 3 , wherein the segregating includes forming said sediments while the first suspension is fully contained in and does not flow through the container.

8. A method according to claim 7 , further comprising at least one of (i) removing the second suspension from the container while leaving the sediments in the container and (ii) removing the sediments from the container while extracting the second suspension from the container.

9. A method according to claim 1 ,
wherein said segregating is carried out in a chosen container, and

further comprising:
delivering the first suspension of the material to said container along a first axis that is transverse to a surface formed by the first suspension in the chosen container, and
removing the second suspension from the container along a second axis that is substantially parallel to said surface formed by the first suspension in the chosen container.

10. A method according to claim 1 , wherein said filtering is characterized by filtration pressure levels all of which remain below a level of pressure associated with a delivery of slurry into the filtration portion of the system substantially for a whole duration of said filtering.

11. A method according to claim 1 , wherein said filtering is characterized by a rate of flow of the second suspension through a filter of the filtration portion of the system, wherein said rate of flow increases from a substantially zero level at a beginning of said filtering to a constant level and remains substantially unchanged at said constant level substantially for a whole duration of said filtering.

12. A method according to claim 1 , further comprising performing said segregating during a segregating time that is substantially equal to a product of (i) a volume of a container used for holding the first suspension and (ii) a value that is reciprocal to a rate of a fluid flow representing said first suspension during said segregating.

Assignees

• Nikon Corp

Inventors

• Nagata Takashi
• Teng Ting-Chien
• Magome Nobutaka
• Yuan Bausan

Classifications

• C09K3/1463 Primary

  Aqueous liquid suspensions · CPC title

• B01D37/00

  Processes of filtration (processes specially adapted for filtering gases B01D46/00) · CPC title

• B01D21/02

  Settling tanks {with single outlets for the separated liquid} · CPC title

• B01F23/581

  Mixing liquids with solids, slurries or sludge, for obtaining a diluted slurry · CPC title

• C09G1/02 Primary

  containing abrasives or grinding agents {(abrasives as such C09K3/14; polishing of semi-conductors H10P52/40)} · CPC title