Level correction system

Patent metadata

Field	Value
Publication number	US-11397128-B2
Application number	US-202017118954-A
Country	US
Kind code	B2
Filing date	Dec 11, 2020
Priority date	Nov 5, 2020
Publication date	Jul 26, 2022
Grant date	Jul 26, 2022

Abstract

A level correction system includes a first adjustment device, a chuck device provided on the first adjustment device, a first reflective device provided on the chuck device, a second adjustment device, a carrying table provided on the second adjustment device, a second reflective device provided on the carrying table, a laser emitter configured to emit incident laser light, a laser receiver, and a controller. The first reflective device and the second reflective device are used to reflect the incident laser light to form a reflected laser light. The laser receiver is used to receive the reflected laser light. The controller is used to determine a height of the chuck device or the carrying table and whether a center point of a reflected light spot formed by the reflected laser light is offset from a center point of an incident light spot formed by the incident laser light.

First claim

What is claimed is:

1. A level correction system comprising:
a platform;
a first adjustment device provided on the platform;
a chuck device provided on the first adjustment device;
a first reflective device detachably provided on the chuck device;
a second adjustment device provided on the platform;
a carrying table provided on the second adjustment device;
a second reflective device detachably provided on the carrying table;
a laser emitter configured to emit incident laser light;
a laser receiver; and
a controller electrically coupled to the laser emitter and the laser receiver; wherein:
both the first reflective device and the second reflective device are used to reflect the incident laser light to form a reflected laser light;
the laser receiver is used to receive the reflected laser light;
the controller is used to determine a height of the chuck device or the carrying table, and at the same time determine whether a center point of a reflected light spot formed by the reflected laser light is offset from a center point of an incident light spot formed by the incident laser light.

2. The level correction system of claim 1 , wherein:
if the center point of the reflected light spot is offset from the center point of the incident light spot, the controller adjusts the first adjustment device or the second adjustment device to adjust a level of the chuck device or the carrying platform so that the center point of the reflected light spot is aligned with the center point of the incident light spot.

3. The level correction system of claim 1 , wherein:
the carrying table is located above the chuck device;
the carrying table defines a through hole;
the second reflective device is arranged at the through hole; and
the first reflective device is arranged below the through hole.

4. The level correction system of claim 3 , wherein:
the incident laser light comprises a first incident laser light and a second incident laser light;
the first incident laser light passes through the second reflective device and is reflected by the first reflective device; and
the second incident laser light is reflected by the second reflective device.

5. The level correction system of claim 1 , wherein:
there are at least three second adjustment devices arranged at a bottom of the carrying platform.

6. The level correction system of claim 1 , wherein:
the incident light spot and the reflected light spot are both cross-shaped.

7. The level correction system of claim 1 , further comprising a display device electrically coupled to the controller.

8. The level correction system of claim 1 , wherein the first adjustment device and the second adjustment device are both adjusting nuts.

9. A level correction system comprising:
a platform;
a first adjustment device provided on the platform;
a chuck device provided on the first adjustment device;
a first reflective device detachably provided on the chuck device;
a second adjustment device provided on the platform;
a carrying table provided on the second adjustment device;
a second reflective device detachably provided on the carrying table;
a laser emitter configured to emit a first incident laser light and a second incident laser light;
a laser receiver configured to receive a first reflected laser light and a second reflected laser light; and
a controller electrically coupled to the laser emitter and the laser receiver; wherein:
the first incident laser light is reflected by the first reflective device to form the first reflected laser light;
the second incident laser light is reflected by the second reflective device to form the second reflected laser light;
the controller is used to determine a height of the chuck device and determine whether a center point of a reflected light spot formed by the first reflected laser light is offset from a center point of an incident light spot formed by the first incident laser light; and
the controller is used to determine a height of the carrying platform and determine whether a center point of a reflected light spot formed by the second reflected laser light is offset from a center point of an incident light spot formed by the second incident laser light.

10. The level correction system of claim 9 , wherein:
if the center point of the reflected light spot of the first reflected light is offset from the center point of the incident light spot of the first incident light, the controller adjusts the first adjustment device to adjust a level of the chuck seat; and
if the center point of the reflected light spot of the second reflected light is offset from the center point of the incident light spot of the second incident light, the controller adjusts the second adjustment device to adjust a level of the carrying table.

11. The level correction system of claim 10 , wherein:
the carrying table is located above the chuck device;
the carrying table defines a through hole;
the second reflective device is arranged at the through hole; and
the first reflective device is arranged below the through hole.

12. The level correction system of claim 11 , wherein:
there are at least three second adjustment devices arranged at a bottom of the carrying platform.

13. The level correction system of claim 12 , wherein:
the incident light spots of the first incident light and the second incident light and the reflected light spots of the first reflected light and the second reflected light are cross-shaped.

14. The level correction system of claim 13 , further comprising a display device electrically coupled to the controller, wherein:
the display device is configured to display the incident light spots of the first incident light and the second incident light and the reflected light spots of the first reflected light and the second reflected light.

15. The level correction system of claim 9 , wherein the first adjustment device and the second adjustment device are both adjusting nuts.

Assignees

• Triple Win Tech Shenzhen Co Ltd

Inventors

• Zhu Cong

Classifications

• G02B27/34 Primary

  illuminated · CPC title

• B25H1/18

  in inclination · CPC title

• B25H1/08

  with provision for attachment of work holders · CPC title

• G01M11/04 Primary

  Optical benches therefor · CPC title

• G01M11/0214 Primary

  Details of devices holding the object to be tested · CPC title