Optical module and method for manufacturing optical module

Patent metadata

Field	Value
Publication number	US-11385455-B2
Application number	US-201816636413-A
Country	US
Kind code	B2
Filing date	Aug 6, 2018
Priority date	Aug 10, 2017
Publication date	Jul 12, 2022
Grant date	Jul 12, 2022

Abstract

An optical module includes a mirror unit having a movable mirror portion, a magnet portion configured to generate a magnetic field acting on the movable mirror portion, and a package accommodating the magnet portion. The magnet portion has a Halbach structure including a first magnet applied with a force in a first direction, and a second magnet applied with a force in a second direction. The package has a bottom walls portion, a side wall portion, and a restriction portion configured to restrict movement of the second magnet in the second direction. The movable mirror portion is disposed in a space formed by the restriction portion.

First claim

The invention claimed is:

1. An optical module comprising:
a mirror unit having a movable mirror portion including a coil;
a magnet portion having an upper surface, a bottom surface, and a side surface extending from the upper surface to the bottom surface, and configured to generate a magnetic field acting on the movable mirror portion; and
a package accommodating the magnet portion,
wherein the magnet portion has a Halbach structure including a first magnet including a first area on the bottom surface and applied with a force in a first direction from the upper surface to the bottom surface, and a second magnet including a second area on the upper surface and applied with a force in a second direction from the bottom surface to the upper surface,
wherein the package has a bottom wall portion configured to support the first area, a side wall portion supporting the side surface, and a restriction portion configured to restrict movement of the second magnet in the second direction by covering at least a portion of the second area, and
wherein the movable mirror portion is disposed in a space formed by the upper surface and the restriction portion.

2. The optical module according to claim 1 ,
wherein the magnet portion has a pair of second magnets disposed with the first magnet interposed therebetween,
wherein one second magnet of the pair of second magnets includes a first side part and a second side part of the second area, and
wherein the restriction portion covers at least a portion of the first side part and the second side part.

3. The optical module according to claim 2 ,
wherein the other second magnet of the pair of second magnets includes a third side part and a fourth side part of the second area, and
wherein the restriction portion covers at least a portion of the third side part and forms a leading-out portion of a wiring by exposing at least a portion of the fourth side part.

4. The optical module according to claim 1 ,
wherein the restriction portion covers at least a portion of each of the two side parts of the upper surface.

5. The optical module according to claim 1 ,
wherein the restriction portion covers at least a portion of each of the four side parts of the upper surface.

6. The optical module according to claim 1 ,
wherein a gap is formed between the mirror unit and the restriction, portion when viewed in a direction intersecting the upper surface.

7. The optical module according to claim 1 ,
wherein the bottom wall portion, the side wall portion, and the restriction portion are integrally formed.

8. The optical module according to claim 1 ,
wherein the movable mirror portion has a movable portion, and
wherein a width of the movable portion along the upper surface is smaller than a width of the first area along the upper surface.

9. A method for manufacturing an optical module comprising:
a first step of preparing a mirror unit having a movable mirror portion including a coil, a package, and a magnet portion being accommodated in the package and having an upper surface, a bottom surface, and a side surface extending from the upper surface to the bottom surface; and
a second step of disposing the mirror unit on the magnet portion subsequently to the first step,
wherein the magnet portion has a Halbach structure including a first magnet including a first area on the bottom surface and applied with a force in a first direction from the upper surface to the bottom surface, and a second magnet including a second area on the upper surface and applied with a force in a second direction from the bottom surface to the upper surface,
wherein the package has a bottom wall portion configured to support the first area, a side wall portion configured to support the side surface, and a restriction portion configured to restrict movement of the second magnet in the second direction by covering at least a portion of the second area, and
wherein, in the second step, the movable mirror portion is disposed in a space formed by the upper surface and the restriction portion.

Assignees

• Hamamatsu Photonics Kk

Inventors

• Suzuki Daiki
• IWASHINA Shinya
• MORINAGA Yuki

Classifications

• G02B26/101

  with both horizontal and vertical deflecting means, e.g. raster or XY scanners (colour television using laser beams scanning a display screen H04N9/3129) · CPC title

• B81B2201/04

  Optical MEMS · CPC title

• G02B26/085 Primary

  the reflecting means being moved or deformed by electromagnetic means · CPC title

• B81B3/0051

  For defining the movement, i.e. structures that guide or limit the movement of an element (mechanical arrangements for preventing or damping vibration or shock H01H3/60) · CPC title

• G02B26/10 Primary

  Scanning systems · CPC title