Piezoelectric device and method for manufacturing piezoelectric device

Patent metadata

Field	Value
Publication number	US-11380837-B2
Application number	US-201815948113-A
Country	US
Kind code	B2
Filing date	Apr 9, 2018
Priority date	Oct 27, 2015
Publication date	Jul 5, 2022
Grant date	Jul 5, 2022

Abstract

A piezoelectric device that includes a sintered body in which a first conductor portion and a second conductor portion are disposed on both principal surfaces of a piezoelectric ceramic base body. The first conductor portion includes conductive films having a predetermined pattern. An insulating film is formed on the principal surface of the piezoelectric ceramic base body on which the conductive films are disposed such that portions of the conductive films are exposed therethrough. The insulating film has a malleability equal to or greater than that of the conductive films.

First claim

The invention claimed is:

1. A piezoelectric device comprising:
a sintered body having:
a piezoelectric ceramic base body with first and second principal surfaces;
a first conductor on the first principal surface, the first conductor including a plurality of conductive films having a predetermined pattern, the plurality of conductive films being separate from each other, and each of the plurality of conductive films being on the first principal surface of the piezoelectric ceramic base body; and
a single second conductor on the second principal surface; and

an insulating film on the first principal surface of the piezoelectric ceramic base body and disposed such that at least portions of the plurality of conductive films are exposed therethrough,
wherein the insulating film has a malleability equal to or greater than that of the plurality of conductive films.

2. The piezoelectric device according to claim 1 , wherein the insulating film has a Young's modulus equal to or less than that of the conductive films.

3. The piezoelectric device according to claim 2 , wherein (ts/tm) 3 <Em/Es, where ts is an average thickness of the insulating film, tm is an average thickness of the conductive films, Es is a Young's modulus of the insulating film, and Em is a Young's modulus of the plurality of conductive films.

4. The piezoelectric device according to claim 1 , wherein (ts/tm) 3 <Em/Es, where ts is an average thickness of the insulating film, tm is an average thickness of the conductive films, Es is a Young's modulus of the insulating film, and Em is a Young's modulus of the plurality of conductive films.

5. The piezoelectric device according to claim 1 , wherein the piezoelectric ceramic base body has an average thickness of 90 μm or less.

6. The piezoelectric device according to claim 5 , wherein the piezoelectric ceramic base body has an average thickness of 4 μm to 90 μm.

7. The piezoelectric device according to claim 1 , wherein the piezoelectric ceramic base body has a multilayer structure including an internal conductor.

8. The piezoelectric device according to claim 1 , wherein the insulating film contains an organic compound as a main component.

9. The piezoelectric device according to claim 1 , wherein the piezoelectric ceramic base body contains a perovskite-type compound containing at least niobium and an alkali metal element.

10. The piezoelectric device according to claim 1 , wherein the first conductor and the second conductor contain a non-precious metal material.

11. The piezoelectric device according to claim 1 , further comprising a plurality of electrode layers, each of which being respectively disposed on the portion of each of the plurality of conductive films exposed through the insulating film.

12. A method for manufacturing a piezoelectric device, the method comprising:
firing a body that includes a piezoelectric ceramic sheet having first and second main surfaces, a first conductive material on the first main surface and a second conductive material on the second main surface to form a sintered body having a piezoelectric ceramic base body with a first principal surface and a second principal surface, a first conductor portion on the first principal surface and a single second conductor portion on the second principal surface;
patterning the first conductor portion into a plurality of conductive films, the plurality of conductive films being separate from each other, and each of the plurality of conductive films being on the first principal surface of the piezoelectric ceramic base body; and
applying an insulating material onto the piezoelectric ceramic base body such that at least portions of the plurality of conductive films are exposed therethrough so as to form an insulating film, the insulating film having a malleability equal to or greater than that of the plurality of conductive films.

13. The method for manufacturing a piezoelectric device according to claim 12 , wherein the insulating film has a Young's modulus equal to or less than that of the plurality of conductive films.

14. The method for manufacturing a piezoelectric device according to claim 12 , wherein the insulating material is composed of an organic compound.

15. The method for manufacturing a piezoelectric device according to claim 12 , further comprising forming a respective electrode layer on each of the portions of the plurality of conductive films that are exposed through the insulating material.

16. The method for manufacturing a piezoelectric device according to claim 12 , wherein (ts/tm) 3 <Em/Es, where ts is an average thickness of the insulating film, tm is an average thickness of the plurality of conductive films, Es is a Young's modulus of the insulating film, and Em is a Young's modulus of the plurality of conductive films.

17. The method for manufacturing a piezoelectric device according to claim 12 , wherein the piezoelectric ceramic base body has an average thickness of 90 μm or less.

18. The method for manufacturing a piezoelectric device according to claim 17 , wherein the piezoelectric ceramic base body has an average thickness of 4 μm to 90 μm.

19. The method for manufacturing a piezoelectric device according to claim 12 , wherein the piezoelectric ceramic base body has a multilayer structure including an internal conductor.

20. The method for manufacturing a piezoelectric device according to claim 12 , wherein the piezoelectric ceramic base body contains a perovskite-type compound containing at least niobium and an alkali metal element.

Assignees

• Murata Manufacturing Co

Inventors

• Tani Shinsuke

Classifications

• H01L41/053

  Electricity · mapped topic

• H01L41/1873

  Electricity · mapped topic

• H01L41/0533

  Electricity · mapped topic

• H01L41/0474

  Electricity · mapped topic

• H01L41/23

  Electricity · mapped topic