Charged particle beam source

Patent metadata

Field	Value
Publication number	US-11380511-B2
Application number	US-202016828571-A
Country	US
Kind code	B2
Filing date	Mar 24, 2020
Priority date	Mar 24, 2020
Publication date	Jul 5, 2022
Grant date	Jul 5, 2022

Abstract

A charged particle beam source, such as for use in an electron microscope, can include an electrically conductive support member coupled to a base, a mounting member coupled to the support member and defining a bore, and an emitter member received in the bore and retained by a fixative material layer flowed around the emitter member in the bore.

First claim

The invention claimed is:

1. A charged particle beam source, comprising:
an electrically conductive support member coupled to a base;
a mounting member coupled to the support member and defining a bore, the mounting member further comprising an opening that is a channel defined in a side wall of the mounting member that is in communication with the bore, the channel being offset from a free end of the mounting member in a direction toward the support member; and
an emitter member received in the bore and retained by a fixative material layer flowed around the emitter member in the bore, wherein fixative material of the fixative material layer is received in the channel.

2. The charged particle beam source of claim 1 , wherein:
the mounting member defines a longitudinal axis; and
the bore extends along the longitudinal axis.

3. The charged particle beam source of claim 1 , wherein the mounting member comprises a plurality of channels spaced apart along its length and at least one retaining portion that extends around the emitter member.

4. The charged particle beam source of claim 1 , wherein the emitter member comprises lanthanum hexabromide (LaB 6 ) or cesium hexabromide (CeB 6 ).

5. A charged particle beam source, comprising:
an electrically conductive support member coupled to a base;
a mounting member coupled to the support member and defining a bore, the mounting member further comprising an opening that is a channel defined in a side wall of the mounting member that is in communication with the bore, the channel being offset from a free end of the mounting member in a direction toward the support member; and
an emitter member received in the bore and retained by a fixative material layer flowed around the emitter member in the bore, wherein fixative material of the fixative material layer is received in the channel;
wherein the fixative material layer is formed from a dispersed phase of a colloidal liquid.

6. The charged particle beam source of claim 5 , wherein the fixative material layer comprises graphite.

7. The charged particle beam source of claim 1 , configured as an electron beam source.

8. The charged particle beam source of claim 1 , wherein the emitter member is not clamped by other components of the charged particle beam source.

9. A scanning electron microscope comprising the charged particle beam source of claim 1 .

10. A method of making a charged particle beam source, comprising:
forming a bore in a mounting member, the mounting member being coupled to an electrically conductive support member that is coupled to a base;
forming a channel in a side wall of the mounting member that is in communication with the bore, the channel being offset from a free end of the mounting member in a direction toward the support member;
inserting an emitter member into the bore in the mounting member; and
flowing a colloidal liquid around the emitter member and the mounting member to form a fixative material layer that retains the emitter member in the bore, fixative material of the fixative material layer being received in the channel.

11. A method of using the charged particle beam source of claim 1 , comprising:
heating the emitter member to generate a charged particle beam; and
directing the charged particle beam at a target.

12. A charged particle beam source, comprising:
an electrically conductive support member coupled to a base;
a mounting member coupled to the support member and defining a bore, the mounting member further comprising an opening that is a channel defined in a side wall of the mounting member that is in communication with the bore, the channel being offset from a free end of the mounting member in a direction toward the support member; and
an emitter member received in the bore and retained by a fixative material layer formed from a dispersed phase of a colloidal liquid, wherein fixative material of the fixative material layer is received in the channel;

wherein the mounting member comprises a retaining portion that extends around the emitter member.

13. The charged particle beam source of claim 12 , wherein the fixative material layer coats the emitter member.

14. The charged particle beam source of claim 13 , wherein the fixative material layer comprises graphite.

15. The charged particle beam source of claim 12 , further comprising a channel defined in the mounting member.

16. The charged particle beam source of claim 12 , wherein the bore and the emitter member each comprise a rectangular cross section.

17. A charged particle beam source, comprising:
an electrically conductive support member coupled to a base;
a mounting member coupled to the support member and defining a bore, the mounting member comprising an opening that is a channel defined in a side wall of the mounting member and that is offset from a free end of the mounting member in a direction toward the support member, the channel being in communication with the bore; and
an emitter member received in the bore and retained in the bore by a fixative material layer that is received in the channel in the mounting member and coats the emitter member in the bore;

wherein a cross-section of the bore is larger than a cross-section of the emitter member.

18. The charged particle beam source of claim 17 , wherein the emitter member is not clamped by the mounting member.

19. The charged particle beam source of claim 1 , wherein the fixative material layer coats an outer surface of the mounting member and the emitter member in the bore.

20. The charged particle beam source of claim 17 , wherein the fixative material layer comprises graphite.

Assignees

• Fei Co

Inventors

• Liu Kun
• Randolph Steven J

Classifications

• H01J37/261

  Details · CPC title

• H01J37/065 Primary

  Construction of guns or parts thereof (H01J37/067 - H01J37/077 take precedence) · CPC title

• H01J37/28

  with scanning beams {(H01J37/268, H01J37/292, H01J37/2955 take precedence)} · CPC title

• H01J1/88

  Mounting, supporting, spacing, or insulating of electrodes or of electrode assemblies · CPC title

• H01J1/3044

  Point emitters · CPC title