Microscale photoacoustic spectroscopy, imaging, and microscopy

Patent metadata

Field	Value
Publication number	US-11378552-B2
Application number	US-202016893612-A
Country	US
Kind code	B2
Filing date	Jun 5, 2020
Priority date	Jun 7, 2019
Publication date	Jul 5, 2022
Grant date	Jul 5, 2022

Abstract

A microscale photoacoustic sensor uses the detection of ultrasound waves generated by a sample in response to incident light absorption to perform photoacoustic spectroscopy, imaging, and microscopy. The microscale photoacoustic sensor, including components to excite a sample and detect ultrasound waves, may be integrated onto a single chip. The microscale photoacoustic sensor may excite a sample using a metasurface collimator. The metasurface collimator includes an array of diffraction grooves to collimate an excitation beam uniformly out of the plane of the sensor to create a wide and homogeneous beam spot. The microscale photoacoustic sensor may detect ultrasound waves using an optical photoacoustic transducer. The optical photoacoustic transducer includes a resonator on a mechanical membrane to detect ultrasound waves with high sensitivity. The microscale photoacoustic sensor may be used in applications such as deep-tissue neural imaging or microfluidic biological screening.

First claim

The invention claimed is:

1. A sensor comprising:
an excitation light source to emit an excitation beam;
an output coupler, in optical communication with the excitation light source, to couple the excitation beam into an analyte medium, the excitation beam causing the analyte medium to emit a photoacoustic wave;
a first resonator, in acoustic communication with the analyte medium, with a first resonance frequency that shifts in response to the photoacoustic wave;
at least one probe light source, in optical communication with the first resonator, to couple a first probe beam into the first resonator; and
at least one detector, in optical communication with the first resonator, to detect at least a portion of the first probe beam transmitted or reflected by the first resonator; and
a processor, operably coupled to the at least one detector, to determine a shift of the first resonance frequency in response to the photoacoustic wave based on the at least a portion of the first probe beam detected by the at least one detector.

2. The sensor of claim 1 , wherein the output coupler comprises a collimator to collimate the excitation beam.

3. The sensor of claim 2 , wherein the collimator comprises a meta-surface.

4. The sensor of claim 1 , wherein the photoacoustic wave has at least one spectral component in a band from about 1 MHz to about 50 MHz.

5. The sensor of claim 1 , wherein the photoacoustic wave has at least one spectral component in a band from about 1 MHz to about 20 MHz.

6. The sensor of claim 1 , wherein the first resonator is disposed on a flexible membrane configured to deflect in response to the photoacoustic wave.

7. The sensor of claim 1 , wherein the first resonator comprises a polymer ring resonator.

8. The sensor of claim 1 , further comprising:
a second resonator, in acoustic communication with the analyte medium and in optical communication with the at least one probe light source and the at least one detector, with a second resonance frequency that shifts in response to the photoacoustic wave.

9. The sensor of claim 8 , wherein the second resonance frequency is different than the first resonance frequency.

10. The sensor of claim 8 , wherein the at least one probe light source is configured to couple a second probe beam into the second resonator, the at least one detector is configured to detect at least a portion of the second probe beam transmitted or reflected by the second resonator, and the processor is configured to determine a shift of the second resonance frequency in response to the photoacoustic wave based on the at least a portion of the second probe beam detected by the at least one detector.

11. The sensor of claim 10 , where the processor is configured to determine a temporal shift between the shift in the first resonance frequency and the shift in the second resonance frequency.

12. The sensor of claim 1 , wherein the first resonator is disposed on a membrane that vibrates in response to the photoacoustic wave, and the membrane is at least partially disposed above a cavity.

13. The sensor of claim 1 , further comprising:
a microfluidic channel, in optical communication with the output coupler and the first resonator, to flow the analyte medium past the output coupler and the first resonator.

14. The sensor of claim 1 , further comprising:
a substrate,
wherein the output coupler and the first sensor are disposed on a surface of the substrate.

15. The sensor of claim 1 , wherein the excitation beam has a center wavelength of about 1530 nm to about 1565 nm.

16. A neurophotonic probe comprising:
a substrate with a tip for penetrating neural tissue;
probe ring resonators, along the tip of the substrate, having respective resonance frequencies that shift in response to acoustic excitation;
at least one input waveguide, on the substrate and evanescently coupled to the probe ring resonators, to couple probe light into the ring resonators; and
at least one output waveguide, on the substrate and evanescently coupled to the probe ring resonators, to couple probe light out of the probe ring resonators.

17. The neurophotonic probe of claim 16 , wherein at least a portion of the tip of the substrate is configured to deflect in response to the acoustic excitation, thereby shifting the respective resonance frequencies of the probe ring resonators.

18. The neurophotonic probe of claim 16 , further comprising:
wavelength-division multiplexing (WDM) ring resonators, evanescently coupled to the at least one output waveguide and a bus waveguide, to couple the probe light from the at least one output waveguide to the bus waveguide.

19. A method of imaging neural tissue, the method comprising:
inserting a neural probe into the neural tissue;
measuring a shift in a resonance frequency of a first optical ring resonator on the neural probe caused by a photoacoustic excitation propagating through the neural tissue; and
generating an image of the neural tissue based at least in part on the shift in resonance frequency of the first optical ring resonator.

20. The method of claim 19 , wherein generating the image comprises generating the image with a spatial resolution of about 20 microns to about 50 microns.

21. The method of claim 19 , wherein generating the image comprises generating the image over a volume of about 1 cubic millimeter.

22. The method of claim 19 , further comprising:
measuring a shift in a resonance frequency of a second optical ring resonator on the neural probe caused by the photoacoustic excitation propagating through the neural tissue.

23. The method of claim 19 , further comprising:
illuminating the neural tissue with a probe beam to produce the photoacoustic excitation propagating through the neural tissue.

Assignees

• Massachusetts Inst Technology

Inventors

• Singh Robin
• Agarwal Anuradha M
• Anthony Brian

Classifications

• G01N2201/06113

  Coherent sources; lasers · CPC title

• A61B5/0095

  by applying light and detecting acoustic waves, i.e. photoacoustic measurements · CPC title

• A61B8/4483

  characterised by features of the ultrasound transducer · CPC title

• A61B8/14

  Echo-tomography · CPC title

• G01N2021/1706

  in solids · CPC title