Evaporation mask, OLED panel and system, and evaporation monitoring method

Patent metadata

Field	Value
Publication number	US-11374173-B2
Application number	US-201816323062-A
Country	US
Kind code	B2
Filing date	Apr 28, 2018
Priority date	Sep 29, 2017
Publication date	Jun 28, 2022
Grant date	Jun 28, 2022

Abstract

An evaporation mask, an organic light-emitting diode (OLED) panel and system, and an evaporation monitoring method. The evaporation mask includes a first functional region and a first peripheral region disposed outside of the first functional region. The first functional region has a first opening for forming a functional layer by evaporation, and the first peripheral region has a second opening for monitoring an evaporation effect of the first opening. A monitoring structure can be formed on an observation layer of the OLED panel by evaporation through the second opening of the evaporation mask, and the evaporation effect of the first opening of the evaporation mask can be monitored via the monitoring structure, so that the evaporation effect can be monitored in time to achieve real-time on-line monitoring.

First claim

What is claimed is:

1. An organic light-emitting diode (OLED) panel, comprising: a second functional region comprising a plurality of film layers on a substrate, and a second peripheral region comprising a plurality of film layers, which are same to that in the second functional region, and disposed outside of the second functional region, and the second peripheral region further comprises an observation layer on the plurality of film layers, the second functional region having a functional layer formed thereon by evaporation through at least one first opening of an evaporation mask, the observation layer of the OLED panel having at least one monitoring structure formed thereon by evaporation through at least one second opening of the evaporation mask, an evaporation effect of the at least one first opening being monitored via the monitoring structure.

2. The OLED panel of claim 1 , wherein the observation layer is made of a reflective material.

3. The OLED panel of claim 1 , wherein a thickness of the observation layer is from 100 nm to 200 nm, and a height difference between a surface of the second peripheral region and a surface of the second functional region is less than or equals to 200 nm.

4. A method for evaporation monitoring, comprising:
providing an evaporation mask, the evaporation mask comprising a first functional region and a first peripheral region disposed outside of the first functional region, the first functional region defining at least one first opening, the first peripheral region defining at least one second opening;
providing an OLED panel, the OLED panel comprising: a second functional region comprising a plurality of film layers on a substrate, and a second peripheral region comprising a plurality of film layers, which are same to that in the second functional region, on the substrate and disposed outside of the second functional region, and the second peripheral region further comprises an observation layer on the plurality of film layers;
forming a functional layer and at least one monitoring structure on the second functional region and the observation layer of the OLED panel respectively using the evaporation mask;
capturing a contour or boundary of the at least one monitoring structures and calculating an actual center of the at least one monitoring structure on the OLED panel; and
comparing the actual center of the monitoring structure with a theoretical center of the monitoring structure to obtain an evaporation effect of the at least one first opening of the evaporation mask.

5. The method for evaporation monitoring of claim 4 , wherein the evaporation through the at least one first opening is considered to have no offset when the actual center of the monitoring structure and the theoretical center of the monitoring structure are at the same position, and the evaporation through the at least one first opening is considered to have offset when the actual center of the monitoring structure and the theoretical center of the monitoring structure are at different positions.

6. The OLED panel of claim 1 , wherein a color of the observation layer is greatly different from a color of the monitoring structures formed on the observation layer.

7. The method for evaporation monitoring of claim 4 , wherein the comparison of actual centers and theoretical centers of the monitoring structures is achieved by comparing coordinates of the two.

8. The OLED panel of claim 1 , wherein the plurality of film layers on the second peripheral region are formed at the same time as the plurality of film layers on the second functional region.

9. The OLED panel of claim 1 , wherein the observation layer is configured to cover a whole of the second peripheral region.

10. The OLED panel of claim 1 , a height of the surface of the second peripheral region is higher than a height of the surface of the second functional region.

11. The OLED panel of claim 1 , wherein the plurality of film layers on the second peripheral region comprises a silicon oxide layer, a silicon nitride layer, a titanium aluminum titanium layer and an organic adhesive layer, and the plurality of film layers on the second functional region comprises a silicon oxide layer, a silicon nitride layer, a titanium aluminum titanium layer and an organic adhesive layer.

12. The OLED panel of claim 1 , the plurality of film layers on the second peripheral region and the plurality of film layers on the second functional region have a same number of film layers.

13. The OLED panel of claim 1 , wherein a plurality of monitoring structures are formed on the observation layer, and the plurality of monitoring structures formed on the observation layer are uniformly arranged surrounding the second functional region.

14. The OLED panel of claim 1 , a height of the surface of the second peripheral region excluding a height of the observation layer is similar to a height of the surface of the second functional region.

Assignees

• Kunshan Govisionox Optoelectronics Co Ltd

Inventors

• Liu Mingxing
• Li Junfeng
• Wang Xuliang
• Gao Feng

Classifications

• H10W46/00

  Marks applied to devices, e.g. for alignment or identification · CPC title

• H10P72/00

  Handling or holding of wafers, substrates or devices during manufacture or treatment thereof · CPC title

• H10P74/27

  Structural arrangements therefor · CPC title

• H10P72/0604

  Process monitoring, e.g. flow or thickness monitoring · CPC title

• H10K59/88

  Dummy elements, i.e. elements having non-functional features · CPC title