Optical modulator, method for forming the same, and method for controlling the same

Patent metadata

Field	Value
Publication number	US-11372271-B2
Application number	US-201816628581-A
Country	US
Kind code	B2
Filing date	Jun 7, 2018
Priority date	Jul 6, 2017
Publication date	Jun 28, 2022
Grant date	Jun 28, 2022

Abstract

According to embodiments of the present invention, an optical modulator is provided. The optical modulator includes a substrate, and a waveguiding arrangement on the substrate, the waveguiding arrangement having a waveguide, and at least one graphene layer arranged to interact with light propagating in the waveguiding arrangement, wherein the waveguide is designed such that the light interacting with the at least one graphene layer has a maximum intensity overlapping with the at least one graphene layer. According to further embodiments of the present invention, a method for forming the optical modulator, and a method for controlling the optical modulator are also provided.

First claim

The invention claimed is:

1. An optical modulator comprising:
a substrate; and
a waveguiding arrangement on the substrate,
an optical light source on the substrate, the optical light source being optically coupled to and monolithically integrated with the waveguiding arrangement; and
an optical out-coupler optically coupled to the waveguiding arrangement,
wherein the waveguiding arrangement comprises:
a waveguide; and
at least one graphene layer arranged to interact with light propagating in the waveguiding arrangement,
wherein the waveguide is designed such that the light interacting with the at least one graphene layer has a maximum intensity overlapping with the at least one graphene layer, and
wherein the optical out-coupler comprises a second order grating configured to receive the light from the waveguiding arrangement to provide a surface-emitting output light in a direction perpendicular to a direction of the light propagating in the waveguiding arrangement.

2. The optical modulator as claimed in claim 1 , wherein the waveguide is designed to have a thickness of between about 250 nm and about 450 nm.

3. The optical modulator as claimed in claim 1 , wherein the waveguide is designed to have a width of between about 15 μm and about 30 μm.

4. The optical modulator as claimed in claim 1 , wherein the waveguide comprises a dielectric waveguide.

5. The optical modulator as claimed in claim 1 , wherein the at least one graphene layer is arranged on top of the waveguide or is embedded within the waveguide.

6. The optical modulator as claimed in claim 1 , wherein the at least one graphene layer comprises two graphene layers arranged spaced apart from each other.

7. The optical modulator as claimed in claim 1 , wherein the substrate comprises a metal layer.

8. The optical modulator as claimed in claim 1 , wherein the optical light source comprises a quantum cascade laser.

9. A method for forming an optical modulator, the method comprising:
forming a waveguiding arrangement on a substrate, comprising:
forming a waveguide; and
forming at least one graphene layer to interact with light propagating in the waveguiding arrangement,

forming an optical light source on the substrate, the optical light source being formed optically coupled to and monolithically integrated with the waveguiding arrangement; and
optically coupling an optical out-coupler to the waveguiding arrangement,
wherein forming a waveguide comprises designing the waveguide such that the light interacting with the at least one graphene layer has a maximum intensity overlapping with the at least one graphene layer, and
wherein the optical out-coupler comprises a second order grating configured to receive the light from the waveguiding arrangement to provide a surface-emitting output light in a direction perpendicular to a direction of the light propagating in the waveguiding arrangement.

10. The method as claimed in claim 9 , wherein the optical light source comprises a quantum cascade laser.

11. The method as claimed in claim 9 , wherein forming at least one graphene layer comprises forming two graphene layers spaced apart from each other.

12. The method as claimed in claim 9 , wherein designing the waveguide comprises designing a thickness of the waveguide to be between about 250 nm and about 450 nm.

13. The method as claimed in claim 9 , wherein designing the waveguide comprises designing a width of the waveguide to be between about 15 μm and about 30 μm.

14. The method as claimed in claim 9 , wherein the waveguide comprises a dielectric waveguide.

15. The method as claimed in claim 9 , wherein forming at least one graphene layer comprises forming the at least one graphene layer on top of the waveguide or embedded within the waveguide.

16. A method for controlling an optical modulator, the method comprising:
supplying a light using an optical light source to a waveguiding arrangement of the optical modulator for propagation in the waveguiding arrangement to provide a surface-emitting output light via an optical out-coupler of the optical modulator, the optical light source and the waveguiding arrangement being formed on a substrate of the optical modulator, wherein the optical light source is optically coupled to and monolithically integrated with the waveguiding arrangement, wherein the optical out-coupler is optically coupled to the waveguiding arrangement, wherein the waveguiding arrangement comprises a waveguide, and at least one graphene layer arranged to interact with the light, and wherein the waveguide is designed such that the light interacting with the at least one graphene layer has a maximum intensity overlapping with the at least one graphene layer, and wherein the optical out-coupler comprises a second order grating configured to receive the light from the waveguiding arrangement to provide the surface-emitting output light in a direction perpendicular to a direction of the light propagating in the waveguiding arrangement; and
applying an electrical signal to the at least one graphene layer.

17. The method as claimed in claim 16 , further comprising varying a magnitude of the electrical signal.

18. The method as claimed in claim 16 , wherein the optical light source comprises a quantum cascade laser.

Assignees

• Univ Nanyang Tech

Inventors

• Hu Xiaonan
• Liang Guozhen
• Meng Bo
• Wang Qijie

Classifications

• G02F2203/10

  plasmon · CPC title

• G02B6/1226

  involving surface plasmon interaction · CPC title

• G02F1/025 Primary

  in an optical waveguide structure (G02F1/017, {G02F1/2257} take precedence) · CPC title