Deformable mirror with integrated microchannel support

Patent metadata

Field	Value
Publication number	US-11372235-B2
Application number	US-201916522261-A
Country	US
Kind code	B2
Filing date	Jul 25, 2019
Priority date	Jul 25, 2019
Publication date	Jun 28, 2022
Grant date	Jun 28, 2022

Abstract

A deformable mirror has a mirror front face and a mirror back exposed surface. An elastomeric support structure is connected to the mirror back exposed surface. The elastomeric support structure includes a multitude of microchannels wherein the microchannels have a closed end located proximate the mirror back exposed surface and an open end located away from the mirror back exposed surface. A fluid pressure source is connected to the open end of the microchannels. A power source and control system are connected to the fluid pressure source.

First claim

The invention claimed is:

1. A deformable mirror, comprising:
a thin film mirror, said thin film mirror having a mirror front face and a mirror back exposed surface;
an elastomeric support structure connected to said mirror back exposed surface;
said elastomeric support structure including a multitude of microchannels wherein said microchannels have a closed end located proximate said mirror back exposed surface and an open end located away from said mirror back exposed surface;
a fluid pressure source connected to said open end of said microchannels; and
a power source and control system connected to said fluid pressure source.

2. The deformable mirror of claim 1 wherein said microchannels are elastomeric.

3. The deformable mirror of claim 1 wherein said microchannels are flexible.

4. The deformable mirror of claim 1 wherein said fluid pressure source includes a piezoelectric crystal.

5. The deformable mirror of claim 1 wherein said fluid pressure source includes a valve.

6. The deformable mirror of claim 1 wherein said elastomeric support structure is an additive manufactured flow elastomeric support structure.

7. The deformable mirror of claim 1 wherein said mirror back exposed surface has areas that allow deformation of said thin film mirror and wherein said closed end of said microchannels are individually addressable to said areas that allow deformation of said thin film mirror.

8. The deformable mirror of claim 7 wherein said closed end of said microchannels that are individually addressable to said areas that allow deformation of said thin film mirror are positioned to provide said mirror front face with a convex shape.

9. The deformable mirror of claim 7 wherein said closed end of said microchannels that are individually addressable to said areas that allow deformation of said thin film mirror are positioned to provide said mirror front face with a concave shape.

10. The deformable mirror of claim 7 wherein said closed end of said microchannels that are individually addressable to said areas that allow deformation of said thin film mirror are positioned to provide said mirror front face with an asymmetrical shape.

11. A deformable mirror, comprising:
a thin film mirror, said thin film mirror having a mirror front face and a mirror back exposed surface;
additive manufactured elastomeric support structure means for causing said thin film mirror to be deformed to a desired shape connected to said mirror back exposed surface wherein said additive manufactured elastomeric support structure means for causing said thin film mirror to be deformed to a desired shape includes a multitude of microchannels wherein said microchannels have a closed end located proximate said mirror back exposed surface and an open end located away from said mirror back exposed surface;
fluid pressure source means for producing fluid pressure connected to said open end of said microchannels; and
power source and control means connected to said fluid pressure source for pressuring certain of said microfluidic channels causing said thin film mirror to be deformed to a desired shape.

12. The deformable mirror of claim 11 wherein said fluid pressure source means includes a piezoelectric crystal.

13. The deformable mirror of claim 11 wherein said fluid pressure source means includes a valve.

Assignees

• L Livermore Nat Security Llc

Inventors

• Pascall Andrew J
• Krauter Kerry G

Classifications

• G02B26/0858 Primary

  the reflecting means being moved or deformed by piezoelectric means · CPC title

• B33Y80/00

  Products made by additive manufacturing · CPC title

• B33Y10/00

  Processes of additive manufacturing · CPC title