Waveguide for guiding an electro-magnetic wave comprising plural waveguide parts with different widths extend in parallel planes

Patent metadata

Field	Value
Publication number	US-11372158-B2
Application number	US-201916703242-A
Country	US
Kind code	B2
Filing date	Dec 4, 2019
Priority date	Dec 4, 2018
Publication date	Jun 28, 2022
Grant date	Jun 28, 2022

Abstract

A waveguide for guiding an electro-magnetic wave comprises: a first waveguide part; and a second waveguide part; wherein the first waveguide part has a first width in a first direction (Y) perpendicular to the direction of propagation of the electro-magnetic wave and the second waveguide part has a second width in the first direction (Y), wherein the second width is larger than the first width; and wherein the first and the second waveguide parts are spaced apart by a gap in a second direction (Z) perpendicular to the first and second planes in which the waveguide parts are formed, wherein the gap has a size which is sufficiently small such that the first and second waveguide parts unitely form a single waveguide for guiding the electro-magnetic wave. The waveguide may be used in numerous applications, such as in a photonic integrated circuit, in a sensor or in an actuator.

First claim

What is claimed is:

1. A waveguide for guiding an electro-magnetic wave, said waveguide comprising:
a first waveguide part; and
a second waveguide part;
wherein the first waveguide part and the second waveguide part are configured to extend in a first plane and a second plane, respectively, the first and the second plane being parallel, wherein at least the first waveguide part is patterned in the first plane for defining a direction of propagation of the electro-magnetic wave in the first and the second planes through the waveguide;
wherein the first waveguide part has a first width in a first direction perpendicular to the direction of propagation of the electro-magnetic wave and the second waveguide part has a second width in the first direction, wherein the second width is larger than the first width; and
wherein the first and the second waveguide parts are spaced apart by a gap in a second direction perpendicular to the first and second planes, wherein the gap has a size which is sufficiently small such that the first and second waveguide parts unitely form a single waveguide for guiding the electro-magnetic wave.

2. The waveguide according to claim 1 , wherein the waveguide is configured for dynamically changing propagation properties of the waveguide based on changing a property of the gap, such as a size of the gap and/or a substance present in the gap and/or an electro-magnetic property of the substance present in the gap.

3. The waveguide according to claim 1 , wherein the second width is at least two times larger than the first width.

4. The waveguide according to claim 1 , wherein the first width of the first waveguide part is smaller than 10 times a wavelength, preferably smaller than a wavelength, of the electro-magnetic wave to be guided by the waveguide.

5. The waveguide according to claim 1 , wherein the gap, at least in an undeformed state of the waveguide, is smaller than half a wavelength, preferably smaller than a hundredth of a wavelength, of the electro-magnetic wave to be guided by the waveguide.

6. The waveguide according to claim 1 , wherein a combined thickness in the second direction of the first waveguide part and the second waveguide part is configured for providing a single mode waveguide in the second direction.

7. The waveguide according to claim 1 , wherein the first waveguide part is arranged on a substrate with the first plane extending in parallel with the substrate, wherein at least one supporting structure is further arranged on the substrate, and wherein the second waveguide part is arranged to be supported by the supporting structure for being arranged above the first waveguide part in a direction normal to the substrate for forming the gap between the first and the second waveguide parts.

8. The waveguide according to claim 7 , wherein the first waveguide part, at least along a part of the extension of the first waveguide part for defining the direction of propagation of the electro-magnetic wave, is laterally spaced from supporting structures on opposite sides of the width of the first waveguide part.

9. The waveguide according to claim 7 , wherein the second waveguide part is supported between spaced apart positions of at least one supporting structure so as to suspend between the spaced apart positions above the first waveguide part.

10. The waveguide according to claim 7 , wherein the second waveguide part is supported by one supporting structure to be suspended therefrom.

11. The waveguide according to claim 1 , wherein the gap is filled by a cladding material at end portions of the first and second waveguide parts along a direction of propagation of the electro-magnetic wave.

12. The waveguide according to claim 1 , wherein the waveguide is provided with a gap between the first and second waveguide parts only at portions of the waveguide along the direction of propagation of the electro-magnetic wave.

13. A photonic integrated circuit component, said component comprising:
a waveguide according to claim 1 ,
an actuator for controlling a property of the gap, such as a size of the gap and/or a substance present in the gap and/or an electro-magnetic property of the substance present in the gap for changing propagation properties of the waveguide.

14. A sensor comprising:
a waveguide according to claim 1 ;
the waveguide being configured to be affected by an external influence for causing a change in propagation properties of the waveguide based on changing a property of the gap, such as a size of the gap and/or a substance present in the gap and/or an electro-magnetic property of the substance present in the gap; and
a detector, which is configured to detect a change in the propagation properties of the waveguide for acquiring a measure of the external influence.

15. An actuator comprising:
a waveguide according to claim 1 ,
the waveguide being configured for generating a force based on the electro-magnetic wave being guided through the waveguide,
wherein the actuator is configured to use said force for holding and/or moving particles in the gap and/or for actuating a physical movement of a structure on which one of the first and the second waveguide part is arranged.

Assignees

• Imec Vzw
• Univ Leuven Kath

Inventors

• Westerveld Wouter Jan
• Rochus Veronique
• Severi Simone
• Jansen Roelof

Classifications

• G01D5/268

  using optical fibres (G01D5/28 - G01D5/38 take precedence) · CPC title

• G02B6/122 Primary

  Basic optical elements, e.g. light-guiding paths · CPC title

• G02B6/12007

  forming wavelength selective elements, e.g. multiplexer, demultiplexer · CPC title

• G01H9/004

  using fibre optic sensors (light guides per se G02B6/00, acousto-optical devices specially adapted for gating or modulating in optical wave guides G02F1/125) · CPC title

• G02B6/12002

  Three-dimensional structures · CPC title