Measurement apparatus for measuring mass concentration of particles using correlation of number concentration, humidity and concentration and measurement method for measuring mass concentration of particles using correlation of number concentration, humidity and concentration

Patent metadata

Field	Value
Publication number	US-11371925-B2
Application number	US-201916451670-A
Country	US
Kind code	B2
Filing date	Jun 25, 2019
Priority date	Jan 13, 2017
Publication date	Jun 28, 2022
Grant date	Jun 28, 2022

Abstract

A measurement apparatus includes: a number concentration measurement device configured to measure a number concentration of particles in a air; a humidity measurement device configured to measure a humidity of the air; and a air concentration measurement device configured to measure a concentration of a specific air in the air, wherein a mass concentration of the particles in the air is calculated based on a measured number concentration, a measured humidity, a measured concentration of the specific air, and a predetermined correlation between the number concentration, the humidity, and the concentration of the specific air, and the mass concentration of the particles in the air.

First claim

What is claimed is:

1. A measurement apparatus comprising:
a number concentration measurement device configured to measure a number concentration of particles in an air;
a humidity measurement device configured to measure a humidity of the air;
an air concentration measurement device configured to measure a concentration of a specific air in the air; and
a processor configured to calculate a mass concentration of the particles in the air based on a measured number concentration, a measured humidity, a measured concentration of the specific air, and a predetermined correlation between the number concentration, the humidity, and the concentration of the specific air, and the mass concentration of the particles in the air.

2. The measurement apparatus according to claim 1 , wherein the specific air is at least one air of H 2 S, NO, NH 3 , NO 2 , SO 2 , O 3 , CO, and VOCs.

3. The measurement apparatus according to claim 1 , comprising:
an environment measurement device configured to measure at least one piece of environmental information of an amount of ultraviolet light which is irradiated to the air, a temperature of the air, and a pressure of the air,
wherein the predetermined correlation includes a correlation among the measured number concentration, the measured humidity, the measured concentration of the specific air and the measured environmental information, a predetermined number concentration, humidity, concentration of the specific air and environmental information, and the mass concentration in the air.

4. The measurement apparatus according to claim 1 , wherein the measured concentration of the specific air is a concentration of the specific air which is measured a predetermined period before a time when the measured number concentration and the measured humidity are measured.

5. The measurement apparatus according to claim 1 , wherein the processor is configured to calculate the mass concentration of the particles in the air based on the measured number concentration, the measured humidity, the measured concentration of the specific air, and the predetermined correlation.

6. The measurement apparatus according to claim 5 , comprising:
a storage that stores a function of the mass concentration of the particles in the air with respect to the number concentration, the humidity, and the concentration of the specific air,
wherein the processor calculates the mass concentration of the particles in the air based on the measured number concentration, the measured humidity, the measured concentration of the specific air, and the function.

7. The measurement apparatus according to claim 5 , comprising:
a storage that stores a table illustrating the mass concentration of the particles in the air corresponding to the number concentration, the humidity, and the concentration of the specific air,
wherein the processor calculates the mass concentration of the particles in the air based on the measured number concentration, the measured humidity, the measured concentration of the specific air, and the table.

8. The measurement apparatus according to claim 1 , wherein the number concentration measurement device measures the number concentration using a light scattering detection method.

9. A measurement method comprising:
measuring a number concentration of particles in an air;
measuring a humidity of the air;
measuring a concentration of a specific air in the air; and
calculating a mass concentration of the particles in the air based on a measured number concentration, a measured humidity, a measured concentration of the specific air, and a predetermined correlation between the number concentration, the humidity, and the concentration of the specific air, and the mass concentration of the particles in the air.

10. The measurement method according to claim 9 , wherein the specific air is at least one air of H 2 S, NO, NH 3 , NO 2 , SO 2 , O 3 , CO, and VOCs.

11. The measurement method according to claim 9 , comprising:
measuring at least one piece of environmental information of an amount of ultraviolet light which is irradiated to the air, a temperature of the air, and a pressure of the air,
wherein the predetermined correlation includes a correlation among the measured number concentration, the measured humidity, the measured concentration of the specific air and the measured environmental information, a predetermined number concentration, humidity, concentration of the specific air and environmental information, and the mass concentration in the air.

12. The measurement method according to claim 9 , wherein the measured concentration of the specific air is a concentration of the specific air which is measured a predetermined period before a time when the measured number concentration and the measured humidity are measured.

13. The measurement method according to claim 9 , comprising:
calculating the mass concentration of the particles in the air based on the measured number concentration, the measured humidity, the measured concentration of the specific air, and the predetermined correlation.

14. The measurement method according to claim 9 , further comprising:
measuring the number concentration using a light scattering detection method.

Assignees

• Fujitsu Ltd

Inventors

• Takasu Ryozo

Classifications

• G01N33/0037

  NOx · CPC title

• G01N33/0044

  Sulphides, e.g. H2S · CPC title

• G01N33/0039

  O3 · CPC title

• G01N33/0042

  SO2 or SO3 · CPC title

• G01N15/06 Primary

  Investigating concentration of particle suspensions (by weighing G01N5/00; investigating sedimentation of particle suspensions G01N15/04; investigating individual particles G01N15/10) · CPC title