Zinc oxide sputtering target
US-2015376024-A1 · Dec 31, 2015 · US
US11370671B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11370671-B2 |
| Application number | US-201915734863-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 4, 2019 |
| Priority date | Jun 6, 2018 |
| Publication date | Jun 28, 2022 |
| Grant date | Jun 28, 2022 |
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Focusing on zinc oxide itself, which is a main raw material for a zinc oxide varistor (laminated varistor), a predetermined amount of additive is added to a zinc oxide powder having crystallite size of 20 to 100 nm, particle diameter of 20 to 110 nm found using a specific area BET method, untamped density of 0.60 g/cm3 or greater, and tap density of 0.80 g/cm3 or greater. This allows a zinc oxide sintered body to secure uniformity, high density, and high electric conductivity, resulting in a zinc oxide varistor with high surge resistance, capable of downsizing and cost reduction. Moreover, addition of aluminum (Al), as a donor element, to the zinc oxide powder allows control of sintered grain size in conformity with the aluminum added amount and baking temperature, and also allows adjustment of varistor voltage, etc.
Opening claim text (preview).
The invention claimed is: 1. A zinc oxide varistor, comprising zinc oxide (ZnO) as a main component, one or more kinds of additives selected as a grain boundary forming component selected from the group consisting of bismuth (Bi) and praseodymium (Pr) and mixtures thereof, and one or more kinds of additives selected as a transition metal element selected from the group consisting of cobalt (Co), manganese (Mn) and nickel (Ni) and mixtures thereof; wherein the zinc oxide has a crystallite size of 20 to 100 nm found by X-ray diffraction, grain diameter of 20 to 110 nm found using a BET method, untamped density of 0.60 g/cm 3 or greater, and tap density of 0.80 g/cm 3 or greater. 2. The zinc oxide varistor according to claim 1 , wherein an amount of aluminum (Al) 20 ppm to 20000 ppm in molar ratio is added as a donor element to zinc (Zn). 3. The zinc oxide varistor according to claim 2 , wherein the aluminum-added zinc oxide, which is generated by adding the aluminum (Al), is obtained by heat treating at a temperature of 250° C. or higher, a carbonate hydrate generated through precipitate generating reactions in an aluminum salt aqueous solution, a zinc salt aqueous solution, a carbonate aqueous solution, and an alkali aqueous solution. 4. The zinc oxide varistor according to claim 3 , wherein the carbonate hydrate contains either a basic zinc carbonate represented by the following Expression (1) or a hydrate of the basic zinc carbonate; M 4-6 (CO 3 ) 1-3 (OH) 6-7 .n H 2 O (1) where M denotes Zn 1-x Al x , x denotes a number 2×10 −5 to 0.02, and n denotes a number 0 to 2. 5. The zinc oxide varistor according to claim 2 , wherein either powder of the aluminum-added zinc oxide is molded as is, or molded after either pulverizing using a bead mill or granulating using a spraying dryer, and sintered at a temperature of 1200° C. or lower, resulting in a zinc oxide sintered body. 6. The zinc oxide varistor according to claim 2 , wherein one or more kinds of donor elements selected from the group consisting of boron (B) and gallium (Ga), and mixtures thereof is further added. 7. The zinc oxide varistor according to claim 1 , wherein one or more kinds of donor elements selected from the group consisting of boron (B) and gallium (Ga), and mixtures thereof is further added.
Solid density · CPC title
oxides · CPC title
Powder tap density · CPC title
containing elements as dopants · CPC title
Surface area · CPC title
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