Support frame for pellicles, pellicle, and method for manufacturing same

Patent metadata

Field	Value
Publication number	US-11360381-B2
Application number	US-201716334627-A
Country	US
Kind code	B2
Filing date	Aug 29, 2017
Priority date	Sep 20, 2016
Publication date	Jun 14, 2022
Grant date	Jun 14, 2022

Abstract

Provided are: a support frame for pellicle that has both low dust generation property and high light resistance, and further has an ion elution amount which is reduced to the utmost limit to an extent that haze is not generated even when a short wavelength laser is used for exposure light source, a pellicle using the support frame for pellicle, and a method for efficiently manufacturing the support frame for pellicle, support frame for pellicle which comprises a frame member comprising aluminum or aluminum alloy and an inorganic coating layer formed on the surface of the frame member, wherein the main chain of the inorganic coating layer is constituted by a —Si—O—Si—O— bond. An anodized film is preferably formed between the frame member and the inorganic coating layer.

First claim

The invention claimed is:

1. A support frame for pellicle which comprises:
a frame member comprising aluminum or aluminum alloy, and
an inorganic coating layer formed on the surface of the frame member,
wherein the main chain of the inorganic coating layer is constituted by a —Si—O—Si—O— bond,
wherein, in ion elution test for measuring concentration of ion eluted by immersing the frame in pure water at80° C. for 4 hours, elution concentration of acetate ion to 100 ml of pure water per 100 cm 2 of the surface area is 0.2 ppm or less, elution concentration of formate ion is 0.2 ppm or less, elution concentration of oxalate ion is 0.2 ppm or less, elution concentration of sulfate ion is 0.1 ppm or less, elution concentration of nitrate ion is 0.2 ppm or less, elution concentration of nitrite ion is 0.2 ppm or less, elution concentration of chlorine ion is 0.2 ppm or less, and elution concentration of phosphate ion is 0.1 ppm or less, and
wherein a thickness of the inorganic coating layer is 15 μm or more and 30 μm or less.

2. The support frame for pellicle according to claim 1 , which comprises:
the frame member,
an anodized film formed on the surface of the frame member, and
the inorganic coating layer formed on the surface of the anodized film.

3. The support frame for pellicle according to claim 1 , wherein a lightness index *L value is 50 or less by blackening.

4. The support frame for pellicle according to claim 1 , wherein the frame is colored by at least one of dyeing pigmentation, natural coloring and electrolytic coloring.

5. A method for manufacturing the support frame for pellicle according to claim 1 , which comprises a step for applying an inorganic coating on the surface of the frame member comprising aluminum or aluminum alloy, and an inorganic coating agent having the molecular structure of:

wherein R is a hydrocarbon group is used for the inorganic coating.

6. The method for manufacturing the support frame for pellicle according to claim 5 , which comprises:
a first step for subjecting the frame member comprising aluminum or aluminum alloy to an anodizing treatment, and
a second step for applying the inorganic coating to the surface of an anodized film formed by the anodizing treatment,
wherein the inorganic coating agent is used for the inorganic coating.

7. The method for manufacturing the support frame for pellicle according to claim 5 , which further comprises:
a coloring step for adjusting a lightness index *L value by at least one of dyeing pigmentation, natural coloring and electrolytic coloring.

8. The method for manufacturing the support frame for pellicle according to claim 5 , wherein the lightness index *L value is adjusted to 50 or less by blackening.

9. A pellicle comprising
the support frame for pellicle according to claim 1 , and
a pellicle film supported by the support frame for pellicle.

Assignees

• Nippon Light Metal Co

Inventors

• Yamaguchi Takayuki

Classifications

• C23C28/04

  only coatings of inorganic non-metallic material · CPC title

• C25D11/18 Primary

  After-treatment, e.g. pore-sealing · CPC title

• C25D11/08

  containing inorganic acids · CPC title

• C09D183/04

  Polysiloxanes · CPC title

• B32B15/20

  comprising aluminium or copper {(B32B15/016 and B32B15/017 take precedence)} · CPC title