Multinode multi-use O-ring and method for forming a seal

Patent metadata

Field	Value
Publication number	US-11359722-B2
Application number	US-201916517299-A
Country	US
Kind code	B2
Filing date	Jul 19, 2019
Priority date	Jul 19, 2018
Publication date	Jun 14, 2022
Grant date	Jun 14, 2022

Abstract

A sealing member is provided, including a plurality of nodes and a plurality of antinodes. Each sealing member can be rotated to expose nondamaged lobes for sealing, and prevents the sealing member from falling out of the lobed groove. A chamber is provided, including a groove that the sealing member is placed in. A method of rotating and placing the sealing member is provided, including a rotation to expose nondamaged portions of the sealing member.

First claim

What is claimed is:

1. A method of forming a seal between a first separable component and a second separable component, comprising:
compressing a sealing device between the first separable component and the second separable component, wherein the second separable processing chamber component comprises a channel formed in the component surface, wherein the channel consisting essentially of a sealing nodule separating at least two indentations, the indentations in the form of concave recesses;
a sealing device comprising:
a body having a cross-sectional profile that is symmetrical about a center of the profile;
a plurality of sealing nodes comprising an odd number of sealing nodes having substantially the same shape, the sealing nodes symmetrically arranged about the center of the profile; and

a plurality of sealing antinodes, wherein a portion of at least one of the sealing nodes has a surface that contacts and forms a seal with at least one surface of the first separable processing chamber component and at least two of the sealing nodes has a surface contacting the indentations of the second separable processing chamber component, wherein there are three sealing nodes and three sealing antinodes;
wherein a portion of a surface of a first sealing node of the plurality of sealing nodes and a portion of a surface of a first sealing antinode of the plurality of sealing antinodes each comprise a first color, wherein the first color is different than a second color found on a portion of a surface of a second sealing node of the plurality of sealing nodes and a portion of a surface of a second sealing antinode of the plurality of sealing antinodes;
separating the first separable component and the second separable component; and
reorienting the sealing device relative to the first separable component and then compressing the sealing device, wherein compressing the sealing device after reorienting the sealing device causes a second sealing node to form a third seal between the second sealing node and the surface of the first separable component and a fourth seal between a second sealing antinode and the surface of the second separable component.

2. The method of claim 1 , wherein a number of sealing antinodes in the plurality of sealing antinodes is an odd number, wherein sealing nodes are projections and sealing antinodes are recesses between sealing nodes.

3. A processing chamber, comprising:
a first separable processing chamber component having a sealing surface;
a second separable processing chamber component having a component surface, wherein the second separable processing chamber component comprises a channel formed in the component surface, wherein the channel consisting essentially of a sealing nodule separating at least two indentations, the indentations in the form of concave recesses; and
a sealing device comprising:
a body having a cross-sectional profile that is symmetrical about a center of the profile;
a plurality of sealing nodes comprising an odd number of sealing nodes having substantially the same shape, the sealing nodes symmetrically arranged about the center of the profile; and
a plurality of sealing antinodes, wherein a portion of at least one of the sealing nodes has a surface that contacts and forms a seal with at least one surface of the first separable processing chamber component and at least two of the sealing nodes has a surface contacting the indentations of the second separable processing chamber component, wherein there are three sealing nodes and three sealing antinodes; and wherein a portion of a surface of a first sealing node of the plurality of sealing nodes and a portion of a surface of a first sealing antinode of the plurality of sealing antinodes each comprise a first color, wherein the first color is different than a second color found on a portion of a surface of a second sealing node of the plurality of sealing nodes and a portion of a surface of a second sealing antinode of the plurality of sealing antinodes.

4. The processing chamber of claim 3 , wherein the sealing device comprises an elastic material.

5. The processing chamber of claim 3 , wherein a number of sealing antinodes in the plurality of sealing antinodes is an odd number, wherein sealing nodes are projections and sealing antinodes are recesses between sealing nodes.

6. The processing chamber of claim 3 , wherein the body is formed in the shape of toroid.

7. The processing chamber of claim 3 , wherein the body is a closed loop.

8. The processing chamber of claim 3 , wherein each sealing antinode is positioned diametrically opposite to a sealing node in a cross section of the body.

9. The process chamber of claim 3 , wherein a surface of the sealing nodule of the channel is configured to form a seal with a surface of the plurality of sealing antinode s.

10. The process chamber of claim 3 , wherein the sealing surface of the first separable processing chamber component is substantially planar.

Assignees

• Applied Materials Inc

Inventors

• Maheshwari Shagun P
• Yang Yao-Hung
• Lee King F
• Yu Andrew
• Pal Aniruddha
• Cho Tom K
• Liao Chien-Min

Classifications

• Y10S277/944

  Elastomer or plastic · CPC title

• F16J15/062

  characterised by the geometry of the seat · CPC title

• F16J15/025 Primary

  and with at least one flexible lip · CPC title

• F16J15/022 Primary

  characterised by structure or material · CPC title

• F16J15/106

  homogeneous · CPC title