Pattern drawing device, pattern drawing method, and method for manufacturing device
US-2019113741-A1 · Apr 18, 2019 · US
US11357113B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11357113-B2 |
| Application number | US-201816476583-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 5, 2018 |
| Priority date | Jul 31, 2017 |
| Publication date | Jun 7, 2022 |
| Grant date | Jun 7, 2022 |
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An apparatus for preparing graphene by means of laser irradiation in liquid, comprising a laser generating system, and further comprising a computer control system, a cleaning and drying system, and a workpiece auxiliary system. The light spot diameter of the laser emitted from a pulse laser unit (26) is increased by means of a beam expander (24), and the laser is reflected and split by a beam splitter to form two laser beams; a first laser beam (19) shocks the right vertical plane of a graphite solid target (18) by means of a focusing lens, and a second laser beam (17) shocks the left vertical plane of the graphite solid target (18) by means of the focusing lens, so as to grow graphene on a copper foil (5) substrate.
Opening claim text (preview).
The invention claimed is: 1. A device for preparing graphene by liquid-phase pulsed laser ablation, the device comprising a moving platform and a reaction chamber which is arranged on the moving platform, a deionized aqueous solution in the reaction chamber, a first group of rotating shafts, a second group of rotating shafts, a first copper foil engaging the first group of rotating shafts, a second copper foil engaging the second group of rotating shafts, and first and second focusing lenses; the first group of rotating shafts and the second group of rotating shafts being symmetrically arranged inside the reaction chamber; the first group of rotating shafts including a first rotating shaft, a second rotating shaft, and a third rotating shaft; the second group of rotating shafts including a fourth rotating shaft, a fifth rotating shaft, and a sixth rotating shaft; an axis of the first rotating shaft, an axis of the second rotating shaft, an axis of the third rotating shaft, an axis of the fourth rotating shaft, an axis of the fifth rotating shaft, and an axis of the sixth rotating shaft being parallel to each other; wherein: the first rotating shaft and the sixth rotating shaft are arranged in opposite directions at a top of the reaction chamber; the second rotating shaft and the fifth rotating shaft are symmetrically arranged between the first rotating shaft and the sixth rotating shaft, and the first rotating shaft, the second rotating shaft, the fifth rotating shaft, and the sixth rotating shaft are located in a plane; the third rotating shaft and the fourth rotating shaft are arranged at a bottom of the reaction chamber, the third rotating shaft is located directly below the second rotating shaft, and the fourth rotating shaft is located directly below the fifth rotating shaft; the reaction chamber has a midregion between the third rotating shaft and the fourth rotating shaft in which a graphite solid target is receivable so that the graphite solid target is located in the deionized aqueous solution in the reaction chamber; a liquid level of the deionized aqueous solution is lower than the top of the reaction chamber and lower than the first and second focusing lenses and higher than the third rotating shaft and the fourth rotating shaft; and a pulse laser device is disposed above the reaction chamber. 2. The device according to claim 1 , characterized in that the first copper foil and the second copper foil are symmetrically arranged and each has an L-shape form; a first end of the first copper foil is attached to the fourth rotating shaft, a second end of the first copper foil is attached to the sixth rotating shaft, a middle portion of the first copper foil passes across and contacts the fifth rotating shaft; a first end of the second copper foil is attached to the first rotating shaft, a second end of the second copper foil is attached to the third rotating shaft, a middle portion of the second copper foil passes across and contacts the second rotating shaft; and a laser emitted by the pulsed laser device expands the diameter of the spot through a beam expander and reflects the light through a beam splitter to generate a first laser beam and a second laser beam, the first laser beam is focused by the first focusing lens onto a first side of the midregion of the reaction chamber so as to be operable to ablate a first façade of the graphite solid target when received in the midregion of the reaction chamber, and the second laser beam passes through the second focusing lens onto a second side of the midregion of the reaction chamber so as to be operable to ablate a second façade of the graphite solid target in the deionized aqueous solution when received in the midregion of the reaction chamber. 3. The device according to claim 2 , characterized in that two rows of racks are fixed on a bottom surface of the reaction chamber, and the two rows of racks are connected by a constraint plate, the graphite solid target when received in the midregion of the reaction chamber is constrained by the constraint plate, each of the two rows of racks is provided with two meshing plates, and the graphite solid target is located in the middle of the meshing plates when received in the midregion of the reaction chamber, two ends of the third rotating shaft, the second rotating shaft, the fourth rotating shaft, and the fifth rotating shaft are correspondingly mounted on the two rows of racks on the meshing plate. 4. The device according claim 2 , characterized in that the reaction chamber is located in a collection chamber located on the moving platform, a water inlet of a circulating electric pump is connected to a bottom of the collecting chamber, a water outlet of the circulating electric pump is connected to a middle of the reaction chamber, and the water outlet of the circulating electric pump is provided with a liquid storage tank and a flow meter. 5. The device according to claim 4 , characterized in that a first motor and a second motor are installed on the first rotating shaft and the sixth rotating shaft, respectively, the first motor, the second motor, the circulating electric pump, the moving platform and the flow meter are connected with a digital controller, and the digital controller and the pulsed laser device are connected to a computer. 6. The device according to claim 4 , characterized in that four magnets are disposed between the collection chamber and the reaction chamber, and the graphite solid target is located in the middle of the four magnets when received in the midregion of the reaction chamber. 7. The device according to claim 1 , characterized by first and second roller shafts wherein the second roller shaft is disposed below the first rotating shaft, and the first roller shaft is disposed on a horizontal surface of the second roller shaft, a seventh rotating shaft is disposed above the first roller shaft, the second copper foil is wound on the seventh rotating shaft, sequentially passing through the third rotating shaft, the second rotating shaft, the first rotating shaft, the second roller shaft and the first roller shaft, a plurality of air nozzles are disposed on a first side of the second copper foil, which is located between the first roller shaft and the seventh rotating shaft, a plurality of liquid nozzles are disposed above the second copper foil, which is located between the first roller shaft and the second roller shaft. 8. The device according to claim 7 , characterized in that a third roller shaft is disposed below the sixth rotating shaft, a fourth rover shaft is disposed on a horizontal plane of the third roller shaft, an eighth rotating shaft is disposed above the fourth rover shaft, a first end the first copper foil is attached to the fourth rotating shaft, a second end of the first copper foil is attached to the eighth rotating shaft, the first copper foil sequentially passing across the fourth rotating shaft, the fifth rotating shaft, the sixth rotating shaft, the third roller shaft and the fourth roller shaft, the plurality of liquid nozzles are disposed above the first copper foil between the third roller shaft and the fourth roller shaft, the plurality of aft nozzles are disposed on a second side of the first copper foil between the eighth rotating shaft and the fourth roller shaft, a laser emitted by the pulsed laser device expands the diameter of the spot through a beam expander and reflects the light through a beam splitter to generate a first laser beam and a second laser beam, the first laser beam is focused by the first focusing lens onto a first side of the midregion of the reaction chamber so as to be operable to ablate a first facade of the graphite solid target when received in the midregion of the reaction chamb
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