Optical displacement sensor element
US-2016138906-A1 · May 19, 2016 · US
US11353523B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11353523-B2 |
| Application number | US-201816755067-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 10, 2018 |
| Priority date | Oct 10, 2017 |
| Publication date | Jun 7, 2022 |
| Grant date | Jun 7, 2022 |
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A field detector (2) comprises a field-responsive element (10) which undergoes a dimensional change when exposed to a predetermined field; and an interferometric read-out arrangement arranged to detect the dimensional change of the field-responsive element. A light source (4) is arranged to provide a measurement beam reflected from the field-responsive element (10) and a reference beam not reflected from the field-responsive element (10), an optical detector (6) being disposed so as to detect at least part of an interference pattern produced by the measurement beam and the reference beam. The field-responsive element (10) has a shape comprising a curved surface and is constrained at least one edge (12) thereof such that the dimensional change causes the curved surface to be displaced in a direction which changes an optical path length of the measurement beam relative to the reference beam, thereby changing the interference pattern detected by said optical detector.
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The invention claimed is: 1. A field detector comprising: a field-responsive element which undergoes a dimensional change when exposed to a predetermined field; and an interferometric read-out arrangement arranged to detect the dimensional change of the field-responsive element and comprising: a light source and at least one optical detector, wherein the light source is arranged to provide a measurement beam reflected from the field-responsive element and a reference beam not reflected from the field-responsive element, the optical detector being disposed so as to detect at least part of an interference pattern produced by the measurement beam and the reference beam; wherein the field-responsive element has a shape comprising a curved surface, which is curved without being constrained in the detector, with a curvature that increases when exposed to the predetermined field and wherein the field-responsive element is constrained at at least one edge thereof such that the dimensional change causes the curved surface to be displaced in a direction which changes an optical path length of the measurement beam relative to the reference beam, thereby changing the interference pattern detected by said optical detector; and wherein the field-responsive element is constrained such that a concave or convex surface of the curved surface faces towards the light source. 2. The field detector of claim 1 , wherein the field-responsive element is in the form of an elongate strip. 3. The field detector of claim 2 , wherein the elongate strip has a length of between 1-100 mm. 4. The field detector of claim 2 , wherein the elongate strip has a width of between 1-10 mm. 5. The field detector of claim 2 , wherein the elongate strip is constrained at at least two edges thereof. 6. The field detector of claim 5 , wherein two edges of the at least two edges are opposite one another. 7. The field detector of claim 1 , wherein the at least one edge of the field-responsive element comprises a spherical or elliptical edge. 8. The field detector of claim 7 , wherein the at least one edge which is constrained comprises an entire, continuous edge of the surface. 9. The field detector of claim 7 , wherein the at least one edge which is constrained comprises only part of an entire outer edge of the surface. 10. The field detector of claim 1 , wherein the field-responsive element is constrained by engaging the at least one edge of the field-responsive element in a support structure. 11. The field detector of claim 10 , wherein the support structure prevents lateral movement of the field-responsive element but allows some other movement of the field-responsive element. 12. The field detector of claim 10 , wherein the field-responsive element is constrained such that the at least one edge is fixedly held in place. 13. The field detector of claim 1 , wherein the curved surface of the field-responsive element is present when no mechanical loading is applied to the field-responsive element. 14. The field detector of claim 13 , wherein the field-responsive element is constrained such that the field responsive element is suspended within the field detector and experiences substantially no mechanical loading that impacts a curvature of the field-responsive element. 15. The field detector of claim 1 , wherein an entire surface of the field-responsive element is curved. 16. The field detector of claim 1 , wherein the field-responsive element comprises at least a first portion that is curved and at least a second portion that has a different curvature or no curvature compared to the first portion. 17. The field detector of claim 1 , the field-responsive element being constrained at two points, wherein the field responsive element comprises a length, and a ratio of the length of the field-responsive element to a distance between the two points at which the field-responsive element is constrained is greater than 1. 18. The field detector of claim 17 , wherein the ratio of the length of the field-responsive element to the distance between the two points at which the field responsive element is constrained is between 1.0001 and 1.05. 19. The field detector of claim 1 , wherein the field-responsive element has a thickness of between 10 and 100 μm. 20. The field detector of claim 1 , wherein the field-responsive element is constructed or constrained so that the field-responsive element is only responsive to fields from a single direction. 21. The field detector of claim 1 , wherein the field-responsive element comprises a mangnetostrictive material that undergoes a dimensional change in presence of a magnetic field. 22. The field detector of claim 21 , wherein the magnetostrictive element is formed from at least one of: amorphous metals, Fe, Ni, Co, Metglas™ alloy, Galfenol alloy, Terfenol-D alloy, or multi-layer films. 23. The field detector of claim 21 , further comprising Helmholtz coils. 24. The field detector of claim 1 , wherein the field-responsive element forms an outer part of the field detector. 25. The field detector of claim 1 , wherein the interferometric read-out arrangement further comprises a diffractive element positioned in a light path of the measurement beam and the reference beam. 26. The field detector of claim 1 , wherein the field-responsive element and the interferometric arrangement are arranged such that twice a distance between a diffractive element and the curved surface is shorter than a coherence length of light emitted from the light source. 27. The field detector of claim 26 , wherein twice the distance between the diffractive element and the curved surface is in a range of 0.1 to 5 mm. 28. The field detector of claim 1 , wherein the light source comprises a laser diode. 29. A three-axis detector comprising three field detectors, each of said three field detectors being a field detector according to claim 1 , said three field detectors being arranged orthogonal to one another.
based on interference in an adjustable optical cavity (interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26) · CPC title
by interferometric means · CPC title
using magneto-optic devices, e.g. Faraday {or Cotton-Mouton effect} · CPC title
Three-component magnetometers · CPC title
Interferometers · CPC title
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