Charged particle beam device

Patent metadata

Field	Value
Publication number	US-11348758-B2
Application number	US-201917287233-A
Country	US
Kind code	B2
Filing date	Feb 5, 2019
Priority date	Feb 5, 2019
Publication date	May 31, 2022
Grant date	May 31, 2022

Abstract

An objective of the present invention is to provide a charged particle beam device capable of estimating a lifetime of a filament of a charged particle beam source with a cheap and simple circuit configuration. The charged particle beam device according to the present invention includes a boosting circuit that boosts a voltage to be supplied to a filament and estimates a remaining duration of the filament using a measured value of a current flowing on a low-voltage side of the boosting circuit (see FIG. 3 ).

First claim

The invention claimed is:

1. A charged particle beam device that radiates a charged particle beam to a sample, the device comprising:
a charged particle beam source configured to radiate the charged particle beam from a filament;
a boosting circuit configured to boost a voltage to be supplied to the filament; and
a control unit configured to estimate a remaining duration in which the filament is normally usable,
wherein the boosting circuit includes a low-voltage side circui…

Assignees

• Hitachi High Tech Corp

Inventors

• SUGA Anoru
• YABU Shuhei
• Ishizawa Kazuki
• Hatano Michio

Classifications

• H01J1/13

  Electricity · mapped topic

• H01J37/06 Primary

  Electricity · mapped topic

• H01J2237/065

  Electricity · mapped topic

• H01J37/242

  Electricity · mapped topic

• H01J37/248 Primary

  Electricity · mapped topic