In-plane MEMS optical switch

Patent metadata

Field	Value
Publication number	US-11340399-B2
Application number	US-202016919602-A
Country	US
Kind code	B2
Filing date	Jul 2, 2020
Priority date	Jul 2, 2020
Publication date	May 24, 2022
Grant date	May 24, 2022

Abstract

An optical switch includes a first bus waveguide supported by a substrate, an optical antenna suspended over the first bus waveguide via a spring, and interdigitated electrodes coupling the substrate with optical antenna and configured to control a position of the optical antenna relative to the first bus waveguide. When a voltage difference applied to the interdigitated electrodes is less than a lower threshold, the optical antenna is at a first position offset from the first bus waveguide, when the voltage difference applied to the interdigitated electrodes is greater than an upper threshold, the optical antenna is at a second position offset from the first bus waveguide, and the offset at the second position is greater than at the first position.

First claim

What is claimed is:

1. An optical switch comprising:
a first bus waveguide supported by a substrate;
an optical antenna suspended over the first bus waveguide via a spring; and
interdigitated electrodes coupling the substrate with optical antenna and configured to control a position of the optical antenna relative to the first bus waveguide,
wherein when a voltage difference applied to the interdigitated electrodes is less than a lower threshold, the optical antenna is at a first position offset from the first bus waveguide, when the voltage difference applied to the interdigitated electrodes is greater than an upper threshold, the optical antenna is at a second position offset from the first bus waveguide, and the offset at the second position is greater than at the first position.

2. The optical switch of claim 1 further comprising,
a second bus waveguide supported by the substrate and parallel with the first bus wave guide,
wherein when a voltage difference applied to the interdigitated electrodes is less than a lower threshold, the optical antenna is at a first position a first distance offset from the first bus waveguide, when the voltage difference applied to the interdigitated electrodes is greater than an upper threshold, the optical antenna is at a second position a second distance offset from the second bus waveguide.

3. The optical switch of claim 2 , wherein a first coupling efficiency between the first bus waveguide and the optical antenna is greater than 50 percent and a second coupling efficiency between the second bus waveguide and the optical antenna is less than 1% when less than the lower threshold voltage difference is applied to the interdigitated electrodes, and the first coupling efficiency between the first bus waveguide and the optical antenna is less than 1 percent and the second coupling efficiency between the second bus waveguide and the optical antenna is greater than 50 percent when greater than the upper threshold voltage difference is applied to the interdigitated electrodes.

4. The optical switch of claim 1 , wherein the lower threshold voltage difference is 5 Volts, and the upper threshold voltage difference is 20 volts.

5. The optical switch of claim 1 , wherein the substrate is a Silicon on Insulator (SoI) substrate and the bus waveguide is etched in a silicon layer of the substrate that is coupled with an insulating layer.

6. The optical switch of claim 1 arranged in an array of optical switches, wherein the optical antenna is an array of optical antennae arranged in at least two columns, the two columns being spaced apart at an interval, the array of optical antennae being arranged in at least one row such that the first position is separated from the second position by the interval.

7. The optical switch of claim 6 further including an optical tree configured to distribute light to the array of optical antennae, the optical tree is configured to selectively enable one of the at least one rows.

8. An optical switch comprising:
a bus waveguide supported by a substrate;
an optical antenna suspended over the bus waveguide via a spring; and
interdigitated electrodes coupling the substrate with optical antenna and configured to control a position of the optical antenna relative to the bus waveguide,
wherein when a voltage difference applied to the interdigitated electrodes is less than a lower threshold, the optical antenna is disposed at a first position relative to the bus waveguide, when the voltage difference applied to the interdigitated electrodes is greater than an upper threshold, the optical antenna is disposed at a second position relative to the bus waveguide, and the first position is separated from the second position by a predetermined distance.

9. The optical switch of claim 8 , wherein a coupling efficiency between the bus waveguide and the optical antenna is greater than 50 percent when the optical antenna is at the first position and at the second position.

10. The optical switch of claim 9 arranged in an array of optical switches, wherein the optical antenna is an array of optical antennae arranged in at least two rows spaced apart at an interval, and at least one column such that the first position is separated by the second position by the interval.

11. The optical switch of claim 10 further including an optical tree configured to distribute light to the array of optical antennae, wherein the array of optical antennae is arranged in at least one row and at least one column and the optical tree is configured to selectively enable one of the at least one rows.

12. The optical switch of claim 10 further including an optical tree configured to collect light from the array of optical antennae, wherein the array of optical antennae is arranged in at least two rows and at least one column and the optical tree is configured to selectively enable one of the at least one rows.

13. The optical switch of claim 10 further including a lens spaced apart from the substrate and configured to diffract light onto the optical antenna, wherein the lens is configured to translate along a vector perpendicular to the substrate, and a distance of the lens from the substrate changes as the lens translates along the vector.

14. The optical switch of claim 10 further including a lens spaced apart from the substrate and configured to diffract light onto the optical antenna, wherein the substrate is configured to translate along a vector perpendicular to lens and a distance of the substrate from the lens changes as the substrate translates along the vector.

15. The optical switch of claim 10 , wherein when a voltage difference applied to the interdigitated electrodes is between the lower threshold and the upper threshold, then the coupling efficiency is greater than 50 percent.

16. A beam steering system comprising:
a bus waveguide supported by a substrate;
an optical antenna supported a distance over the bus waveguide via a spring;
interdigitated electrodes that couple the substrate to the optical antenna and are configured to control a position of the optical antenna relative to the bus waveguide;
an optical tree having at least one type of optical switch, the optical tree configured to collect light from the optical antenna; and
a lens spaced apart from the substrate and configured to diffract the light onto the optical antenna,
wherein when a voltage difference applied to the interdigitated electrodes is less than a lower threshold, the optical antenna is positioned a first distance offset from the bus waveguide, when the voltage difference applied to the interdigitated electrodes is greater than an upper threshold, the optical antenna is positioned a second distance offset from the bus waveguide, and the second distance is less than the first distance.

17. The beam steering system of claim 16 , wherein the optical antenna is an array of optical antennae arranged in at least one row and at least one column, and the optical tree is configured to selectively enable one of the at least one row.

18. The beam steering system of claim 16 , wherein the optical antenna is an array of optical antennae arranged in at least one row and at least one column, and the optical tree is configured to selectively enable one of the at least one column.

19. The beam steering system of claim 16 , wherein the lens is configured to translate along a vector perpendicular to the substrate and the distance of the lens from the substrate is changed as the lens translates along the vector.

20. The beam s

Assignees

• Bosch Gmbh Robert

Inventors

• Wang Ning
• Huebel Alexander
• Schelling Christoph
• Caspers Jan Niklas
• Kueppers Hartmut
• Pinter Stefan

Classifications

• G02B6/3518

  the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device (MEMS devices in general B81B; manufacture of MEM devices in general B81C; micromechanical devices controlling the direction of light G02B26/0833) · CPC title

• G02B6/122 Primary

  Basic optical elements, e.g. light-guiding paths · CPC title

• G02B6/12 Primary

  of the integrated circuit kind (electric integrated circuits H10B, H10D84/00 - H10D89/00, H10F19/00, H10F39/00, H10H29/00, H10K19/00, H10K39/00, H10K59/00, H10N19/00, H10N39/00, H10N59/00, H10N69/00, H10N79/00, H10N89/00) · CPC title

• G02B2006/12145

  Switch · CPC title

• G02B6/12004

  Combinations of two or more optical elements · CPC title