Probe card pad geometry in automated test equipment

Patent metadata

Field	Value
Publication number	US-11340260-B2
Application number	US-201916726640-A
Country	US
Kind code	B2
Filing date	Dec 24, 2019
Priority date	Dec 24, 2019
Publication date	May 24, 2022
Grant date	May 24, 2022

Abstract

A probe card in an automated test equipment (ATE) and methods for operating the same for testing electronic devices. The probe card may be a portion of a vertical-type probe card assembly in which pads on a circuit board are contacted by probe pins. The probe card has a pad geometry that compensates for misalignment with corresponding probe pins due to manufacturing error or a mismatch of coefficient of thermal expansion, enabling reliable operation of the ATE over a wide range of test temperatures. The pad array may have a plurality of elongated pads, each of uniquely designed size, tilt angle, and/or center location, with the characteristics of each pad being dependent on a distance between each pad and a centroid of the pad array, such that a probe pin to pad location errors can be mitigated.

First claim

What is claimed is:

1. An automated test equipment for testing a device under test (DUT), comprising:
a plurality of probe pins configured to contact the DUT;
a probe card;
a plurality of pads disposed on a surface of the probe card and configured to be in contact with the plurality of probe pins, the plurality of pads comprising a first column of elongated pads arranged along a first direction, each elongated pad having a long axis with a tilt angle relative to the first direction, wherein:
a first tilt angle of a first elongated pad in the first column is different from a second tilt angle of a second elongated pad in the first column,
the plurality of pads are arranged in an array having a center,
the long axis of each of the elongated pads tilts toward the center of the array,
each of the elongated pads is shaped to have a linear edge with a first length along the long axis for the respective elongated pad, such that the first lengths are proportional to distances of respective elongated pads from the center of the array, and wherein
the probe card comprises a circuit board having a first coefficient of thermal expansion (CTE), and the plurality of pads are disposed on a surface of the circuit board, and the plurality of probe pins are disposed in a guide plate having a second coefficient of thermal expansion (CTE), wherein the elongated pads are shaped such that:
the first lengths are proportional to a difference between the first and second CTEs.

2. The automated test equipment of claim 1 , wherein
each of the elongated pads is shaped to have a width, and wherein
the widths vary based on distances of respective elongated pads from the center of the array.

3. The automated test equipment of claim 1 , wherein:
the guide plate is configured to:
position a first probe pin of the plurality of probe pins to be in contact with a first elongated pad of the first column of elongated pads at a first location when the DUT is at a first temperature of no more than −40° C., and
position the first probe pin to be in contact with the first elongated pad at a second location when the DUT is at a second temperature of at least 55° C., and

a center of the first elongated pad is between the first location and the second location.

4. The automated test equipment of claim 1 , wherein each of the elongated pad is further shaped to have two linear edges having the first length and in parallel with the long axis.

5. The automated test equipment of claim 1 , wherein
tilt angles for elongated pads in the first column vary monotonically from a center of the first column to an end of the first column.

6. The automated test equipment of claim 1 , wherein
a spacing between adjacent elongated pads in the first column along the first direction varies from a center of the first column to an outer portion of the first column.

7. The automated test equipment of claim 6 , wherein the spacing at the center of the first column is less than 70 μm, and wherein the spacing at the outer portion of the first column is more than 70 μm.

8. The automated test equipment of claim 1 , wherein the circuit board is a multilayer organic board.

9. The automated test equipment of claim 1 , wherein the probe pins comprise needles that extend perpendicularly from the surface of the probe card where the plurality of pads are disposed thereon.

Assignees

• Teradyne Inc

Inventors

• Brecht Brian
• Ledford Steve

Classifications

• G01R31/2834

  Automated test systems [ATE]; using microprocessors or computers (G01R31/317 takes precedence; ATE for detection of defective computer hardware G06F11/2736) · CPC title

• G01R1/07378

  using an intermediate adapter, e.g. space transformers (G01R1/07371 takes precedence) · CPC title

• G01R1/07342 Primary

  the body of the probe being at an angle other than perpendicular to test object, e.g. probe card · CPC title

• G01R1/07314 Primary

  the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support (on an elastic support, e.g. a film, G01R1/0735) · CPC title