Dry etching method and β-diketone-filled container

Patent metadata

Field	Value
Publication number	US-11335573-B2
Application number	US-201716461448-A
Country	US
Kind code	B2
Filing date	Dec 20, 2017
Priority date	Jan 4, 2017
Publication date	May 17, 2022
Grant date	May 17, 2022

Abstract

Disclosed is a dry etching method for etching a metal film on a substrate with an etching gas containing a β-diketone and an additive gas, wherein the metal film contains a metal element capable of forming a complex with the β-diketone; and wherein the amount of water contained in the etching gas is 30 mass ppm or less relative to the amount of the β-diketone. It is preferable that the β-diketone used for the dry etching method is supplied from a β-diketone filled container, wherein the β-diketone filled container has a sealed container body filled with a β-diketone whose water content is 15 mass ppm or less relative to the β-diketone. This etching method enables etching of the metal film while suppressing etching rate variations from the initial stage to the later stage of use of the filled container.

First claim

The invention claimed is:

1. A dry etching method comprising etching a metal film on a substrate with an etching gas containing a β-diketone and an additive gas,
wherein the metal film contains at least one kind of metal element selected from the group consisting of Co, Fe, Ni, Zn, Hf, V and Cu β, and is in the form of a film consisting of the metal element or a film consisting of a metal oxide containing the metal element,
wherein the β-diketone is hexafluoroacetylacetone,
wherein the additive gas is at least one kind of gas selected from the group consisting of NO, N 2 O, O 2 , O 3 and H 2 O 2 ,
wherein the amount of water contained in the etching gas is 30 mass ppm or less relative to the amount of the β-diketone,
wherein the etching is performed by a plasma-less etching process,
wherein the etching comprises supplying the β-diketone from a β-diketone filled container filled with a purified β-diketone, the purified β-diketone having a purity of 99 mass % or higher and a water content of 4 to 15 mass ppm relative to the β-diketone, and
wherein the dry etching method further comprises, before the etching, pretreating the metal film on the substrate by supplying at least one kind of reducing gas selected from the group consisting of hydrogen gas, carbon monoxide gas and formaldehyde gas.

2. The dry etching method according to claim 1 ,
wherein the etching is performed by bringing the etching gas into contact with the metal film in a temperature range of 100° C. to 350° C.

3. The dry etching method according to claim 1 ,
wherein the metal film contains cobalt,
wherein the etching gas contains nitrogen monoxide as the additive gas, and
wherein the etching is performed by bringing the etching gas into contact with the metal film in a temperature range of 150° C. to 250° C.

4. The dry etching method according to claim 1 ,
wherein the etching gas further contains at least one kind of inert gas selected from the group consisting of N 2 , Ar, He, Ne and Kr.

5. The dry etching method according to claim 1 , wherein the amount of water contained in the etching gas is 0.1 mass ppm or more relative to the amount of the β-diketone.

6. The dry etching method according to claim 1 , wherein a flow rate of the reducing gas is controlled such that the pretreating is performed under a pressure of 1.33 to 66.5 kPa.

7. A manufacturing method of a semiconductor device, comprising etching a metal film on a substrate by the dry etching method according to claim 1 .

8. A dry etching method for etching a metal film on a substrate, comprising:
pretreating the metal film on the substrate by supplying a reducing gas;
after the pretreating, etching the metal with an etching gas containing a β-diketone and an additive gas,
wherein the metal film contains at least one kind of metal element selected from the group consisting of Co, Fe, Ni, Zn, Hf, V and Cu,
wherein the reducing gas is hydrogen gas and is supplied such that the pretreating is preformed under a pressure of 1.33 to 66.5 kPa,
wherein the amount of water contained in the etching gas is 0.1 to 30 mass ppm relative to the amount of the β-diketone,
wherein the β-diketone is at least one kind of compound selected from the group consisting of hexafluoroacetylacetone, trifluoroacetylacetone and acetylacetone,
wherein the additive gas is at least one kind of gas selected from the group consisting of NO, N 2 O, O 2 , O 3 and H 2 O 2 ,
wherein the etching is performed by a plasma-less etching process, and
wherein the etching comprises supplying the β-diketone from a β-diketone filled container filled with a purified β-diketone, the purified β-diketone having a purity of 99 mass % or higher and a water content of 4 to 15 mass ppm relative to the β-diketone.

Assignees

• Central Glass Co Ltd
• Cental Glass Company Ltd

Inventors

• Yamauchi Kunihiro
• Masuda Takashi
• Yao Akifumi

Classifications

• H10P50/266

  by vapour etching only · CPC title

• H10P50/00

  Etching of wafers, substrates or parts of devices · CPC title

• H10P72/0421 Primary

  for drying etching · CPC title

• C23F1/12

  Gaseous compositions · CPC title

• C23F1/08 Primary

  Apparatus, e.g. for photomechanical printing surfaces (photo- mechanical reproduction G03F) · CPC title