Device and method for the controlled processing of a workpiece with processing radiation

Patent metadata

Field	Value
Publication number	US-11334047-B2
Application number	US-201916721271-A
Country	US
Kind code	B2
Filing date	Dec 19, 2019
Priority date	Dec 20, 2018
Publication date	May 17, 2022
Grant date	May 17, 2022

Abstract

A device and method for the controlled processing of at least one workpiece (1), comprising a workpiece carrier (2) on which at least one workpiece receptacle (2.1) is present remote from a rotary shaft (2.0), at least one processing unit (3) and at least one inspection unit (4), which are offset relative to the rotary shaft (2.0) by an angular distance (βn) from one another, are each arranged so that they can be adjusted and moved in a translational manner radially with respect to the rotary shaft (2.0), so that a processing beam (E) and an inspection beam (P), offset relative to one another by the angular distance (βn), describe the same spiral-shaped movement path (S) relative to the workpiece carrier (2), and the inspection results derived at an inspection point (PP) are used to control process parameters in order to change the effect of the processing beam (E).

First claim

What is claimed is:

1. A device for controlled processing of at least one workpiece with processing radiation, the device comprising:
a workpiece carrier having a revolving rotary shaft and at least one workpiece receptacle for receiving the at least one workpiece, at least one processing unit having a processing beam source which directs a processing beam (E) onto the workpiece received in the at least one workpiece receptacle, at least one inspection unit having an inspection beam source which directs an inspection beam (P) onto the workpiece, and a detector which detects a transmitted, reflected or scattered inspection beam portion (P′) of the inspection beam (P), and at least one linear motor by which the at least one processing unit and the at least one inspection unit can be moved relative to the workpiece carrier, wherein the workpiece is scanned by the processing beam (E) and the inspection beam (P) following the processing beam (E), along scanning lines extending side by side, and the workpiece is processed and inspected along the scanning lines;
the revolving rotary shaft is connected to a motor to generate rotary motion of the workpiece carrier in a direction of rotation (R rot );
the at least one processing unit and the at least one inspection unit being offset by an angular distance (β n ) relative to one another and each being arranged to be radially adjustable relative to the rotary shaft and being connected to the at least one linear motor to generate translational movements of the processing unit and of the inspection unit relative to the workpiece carrier in two radial translational directions (R trans 1 , R trans 2 ) forming the angular distance (β n ) with one another;
whereby the processing beam (E) and the inspection beam (P) are offset from one another by the angular distance (β n ) and follow the same spiral movement path (S) with a plurality of turnings (W) relative to the workpiece carrier;
the at least one workpiece receptacle being arranged at a distance (a) from the rotary shaft so that the at least one workpiece receptacle or the at least one workpiece positioned therein is covered by partial sections (S′) of the turnings (W) which each represent one of the scanning lines; and
a control and computing unit being connected to the at least one inspection unit, to the at least one processing unit, to the motor and to the at least one linear motor to change at least one process parameter of the device as a function of inspection results derived from the inspection beam portion (P)′.

2. The device according to claim 1 , wherein several processing units are arranged to form a circle around the rotary shaft and wherein a number of the several processing units is greater than a number of workpiece receptacles.

3. The device according to claim 2 , further comprising at least one first tilting unit and at least one second tilting unit, the at least one first tilting unit being connected to the at least one processing unit, and the at least one second tilting unit being connected to the at least one inspection unit, in order to change orientation of the processing beam (E) and of the inspection beam (P) with respect to a surface of the workpiece.

4. The device according to claim 1 , wherein the processing beam source of the at least one processing unit is a laser or a plasma beam source.

5. A method for controlled processing of at least one workpiece with processing radiation, the method comprising:
positioning the at least one workpiece in a workpiece receptacle on a workpiece carrier and scanning the at least one workpiece several times in each case in one scanning cycle by a processing beam (E) along scanning lines extending side by side;
scanning the at least one workpiece by an inspection beam (P) following the processing beam (E); carrying out measurements and deriving location-related inspection results from transmitted, reflected or scattered inspection beam portions (P′) of the inspection beam (P) impinging on the at least one workpiece at extended inspection points (P P ) in each case;
using inspection results to determine the effect of local action of the processing beam (E) on the at least one workpiece; wherein

the at least one workpiece executes a rotary motion in a direction of rotation (R rot ) at a rotational speed (ω) about a rotary shaft of the workpiece carrier lying outside the workpiece, and at the same time the processing beam (E) and the inspection beam (P) perform translational movements radially to the rotary shaft at a feed rate (v) in two translational directions (R trans 1 , R trans 2 ) enclosing an angular distance (β n ) with one another, so that the processing beam (E) and the inspection beam (P) each describe, by the superposition of the rotary motion with one of the translational movements over a plurality of revolutions of the workpiece carrier, a respective identical spiral-shaped movement path (S) with a plurality of turnings (W) about the rotary shaft relative to the workpiece carrier wherein in each case a partial section (S′) of one of the turnings (W) covering the workpiece receptacle forms one of the scanning lines; and
wherein the inspection results are respectively supplied as actual values which are location-related to one of the inspection points (P P ), to a control and computing unit where they are assigned to stored target values which are location-related to the at least one workpiece and are compared with these and, in the event of a deviation of one of the target values from the assigned actual value, at least one process parameter is changed if the processing beam (E) subsequently impinges on the workpiece ( 1 ) at a point of incidence (P E ) within the relevant inspection point (P P ) at which the location-related actual values on which the change is based were previously obtained.

6. The method according to claim 5 , wherein the inspection points (P P ) each have a larger extension than points of incidence (P E ) and a change in process parameters occurs within the same scanning cycle.

7. The method according to claim 5 wherein a change in process parameters occurs within a subsequent scanning cycle.

8. The method according to claim 5 , wherein the rotational speed (ω) is controlled as a function of the radial distance (r) of the point of incidence (P E ) of the processing beam (E) to achieve a constant exposure time of the processing beam (E) along the scanning lines.

9. The method according to claim 5 , further comprising setting the ratio between the rotational speed ω and the feed rate v to set a pitch of the spiral movement path S and a distance between the scanning lines.

10. The method according to claim 5 , wherein the direction of rotation (R rot ) is reversed during the scanning process.

11. The method according to claim 5 , wherein the at least one workpiece is processed by more than one processing beam (E) during one revolution of the workpiece carrier.

12. The method according to claim 11 , wherein the at least one workpiece is inspected by more than one inspection beam (P) during one revolution of the workpiece carrier.

13. The method according to claim 5 , wherein several workpieces are processed and inspected in the same scanning cycles by positioning them on the workpiece carrier for the same processing period.

Assignees

• Zeiss Carl Jena Gmbh

Inventors

• Koehler Thomas
• Schindler Christian
• Scheibe Hannes
• Roth Eckhard

Classifications

• B23K26/362

  Laser etching · CPC title

• B23K26/0624

  using ultrashort pulses, i.e. pulses of 1 ns or less · CPC title

• B23K26/04

  Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light · CPC title

• H01J37/302

  Controlling tubes by external information, e.g. program control (H01J37/304 takes precedence) · CPC title

• B23K26/53

  for modifying or reforming the material inside the workpiece, e.g. for producing break initiation cracks · CPC title