Thin film transistor, display apparatus including the same, and manufacturing methods thereof

Patent metadata

Field	Value
Publication number	US-11329117-B2
Application number	US-202016877735-A
Country	US
Kind code	B2
Filing date	May 19, 2020
Priority date	Jul 12, 2019
Publication date	May 10, 2022
Grant date	May 10, 2022

Abstract

A method of manufacturing a thin film transistor includes: removing an oxide film on a surface of an amorphous silicon layer by performing a surface cleaning; and forming an active layer by performing a heat treatment on the amorphous silicon layer, where the amorphous silicon layer is changed into crystalline silicon by the heat treatment.

First claim

What is claimed is:

1. A method of manufacturing a thin film transistor, the method comprising:
providing an amorphous silicon layer over a substrate;
removing an oxide film on a surface of the amorphous silicon layer by performing a surface cleaning without an oxidant solution; and
forming an active layer by performing a heat treatment on the amorphous silicon layer, wherein the amorphous silicon layer is changed into crystalline silicon by the heat treatment.

2. The method of claim 1 , wherein the removing the oxide film on the surface of the amorphous silicon layer by performing the surface cleaning comprises
spraying a hydrogen fluoride solution onto the surface of the amorphous silicon layer.

3. The method of claim 2 , wherein the hydrogen fluoride solution comprises about 0.5 vol % of hydrogen fluoride.

4. The method of claim 2 , wherein the removing the oxide film on the surface of the amorphous silicon layer by performing the surface cleaning further comprises
performing a first rinse cleaning including supplying hydrogen water to the surface of the amorphous silicon layer in a free fall manner.

5. The method of claim 4 , wherein the removing the oxide film on the surface of the amorphous silicon layer by performing the surface cleaning further comprises
performing a second rinse cleaning including supplying hydrogen water to the surface of the amorphous silicon layer in a free fall manner while applying vibration to the hydrogen water with megasonic waves.

6. The method of claim 1 , wherein the forming the active layer comprises:
radiating a laser beam onto the amorphous silicon layer arranged over the substrate, wherein the laser beam has long sides and short sides in a first direction and a second direction perpendicular to each other, respectively; and
moving the substrate by a predetermined pitch in the second direction parallel to the short sides.

7. The method of claim 6 ,
wherein the laser beam is repeatedly turned on and off whenever the substrate is moved by the predetermined pitch,
wherein the predetermined pitch is set to allow the laser beam to be turned on at least 7 times in a unit region of the amorphous silicon layer.

8. The method of claim 1 , further comprising:
providing a buffer layer between the substrate and the amorphous silicon layer,
wherein a thickness of the amorphous silicon layer is in a range of about 370 Å to about 430 Å, and
wherein the buffer layer comprises SiOx in a thickness of about 4000 Å to about 5000 Å.

9. A method of manufacturing a display apparatus, the method comprising:
providing a thin film transistor over a substrate, and providing an organic light-emitting device connected to the thin film transistor,
wherein the providing the thin film transistor comprises:
providing an amorphous silicon layer over the substrate;
removing an oxide film on a surface of the amorphous silicon layer by performing a surface cleaning without using an oxidant solution; and
forming an active layer by performing a heat treatment on the amorphous silicon layer, wherein the amorphous silicon layer is changed into crystalline silicon by the heat treatment.

10. The method of claim 9 wherein the removing the oxide film on the surface of the amorphous silicon layer by performing the surface cleaning comprises
spraying a hydrogen fluoride solution onto the surface of the amorphous silicon layer.

11. The method of claim 10 ,
wherein the hydrogen fluoride solution comprises about 0.5 vol % of hydrogen fluoride.

12. The method of claim 10 , wherein the removing the oxide film on the surface of the amorphous silicon layer by performing the surface cleaning further comprises
performing a first rinse cleaning including supplying hydrogen water to the surface of the amorphous silicon layer in a free fall manner.

13. The method of claim 12 , wherein the removing the oxide film on the surface of the amorphous silicon layer by performing the surface cleaning further comprises
performing a second rinse cleaning including supplying hydrogen water to the surface of the amorphous silicon layer in a free fall manner while applying vibration to the hydrogen water with megasonic waves.

14. The method of claim 9 , wherein the forming the active layer comprises:
radiating a laser beam onto the amorphous silicon layer arranged over the substrate, wherein the laser beam has long sides and short sides in a first direction and a second direction perpendicular to each other, respectively; and

moving the substrate by a predetermined pitch in the second direction parallel to the short sides.

15. The method of claim 14 ,
wherein the laser beam is repeatedly turned on and off whenever the substrate is moved by the predetermined pitch, and
wherein the predetermined pitch is set to allow the laser beam to be turned on at least 7 times in a unit region of the amorphous silicon layer.

16. The method of claim 9 , further comprising:
providing a buffer layer between the substrate and the amorphous silicon layer,
wherein a thickness of the amorphous silicon layer is in a range of about 370 Å to about 430 Å, and
wherein the buffer layer comprises SiOx in a thickness of about 4000 Å to about 5000 Å.

Assignees

• Samsung Display Co Ltd

Inventors

• Lee Dongsung
• Kim Jihwan
• Seo Jongoh
• So Byungsoo
• Lee Dongmin
• Jeon Yeonhee
• Choi Jonghoon
• Son Byungkyu
• Jang Seunghyun

Classifications

• H10P14/3816

  Pulsed laser beam · CPC title

• H10P14/3602

  In-situ cleaning · CPC title

• H10P14/3454

  Amorphous · CPC title

• H10P14/3238

  being insulating materials · CPC title

• H10P14/3411 Primary

  Silicon, silicon germanium or germanium · CPC title